JP3298990B2 - シリカ含有セラミックコーティングの形成方法 - Google Patents

シリカ含有セラミックコーティングの形成方法

Info

Publication number
JP3298990B2
JP3298990B2 JP17296893A JP17296893A JP3298990B2 JP 3298990 B2 JP3298990 B2 JP 3298990B2 JP 17296893 A JP17296893 A JP 17296893A JP 17296893 A JP17296893 A JP 17296893A JP 3298990 B2 JP3298990 B2 JP 3298990B2
Authority
JP
Japan
Prior art keywords
coating
resin
silica
silicon hydride
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP17296893A
Other languages
English (en)
Japanese (ja)
Other versions
JPH06191970A (ja
Inventor
スティーブン バランス デビッド
ノートン エクステイン マリー
ジョン ロボダ マーク
ウィントン マイケル キース
ベル シェルトン リバティ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Silicones Corp
Original Assignee
Dow Corning Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning Corp filed Critical Dow Corning Corp
Publication of JPH06191970A publication Critical patent/JPH06191970A/ja
Application granted granted Critical
Publication of JP3298990B2 publication Critical patent/JP3298990B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H10W99/00—
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
    • C04B41/455—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application the coating or impregnating process including a chemical conversion or reaction
    • C04B41/4554—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application the coating or impregnating process including a chemical conversion or reaction the coating or impregnating material being an organic or organo-metallic precursor of an inorganic material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/5025—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with ceramic materials
    • C04B41/5035—Silica
    • H10P14/6529—
    • H10W74/476—
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
    • C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
    • C04B2111/00844—Uses not provided for elsewhere in C04B2111/00 for electronic applications
    • H10P14/6342—
    • H10P14/6686—
    • H10P14/6922—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Formation Of Insulating Films (AREA)
  • Paints Or Removers (AREA)
  • Silicon Compounds (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP17296893A 1992-07-13 1993-07-13 シリカ含有セラミックコーティングの形成方法 Expired - Fee Related JP3298990B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US91243692A 1992-07-13 1992-07-13
US912436 1992-07-13
US994225 1992-12-21
US07/994,225 US5436029A (en) 1992-07-13 1992-12-21 Curing silicon hydride containing materials by exposure to nitrous oxide

Publications (2)

Publication Number Publication Date
JPH06191970A JPH06191970A (ja) 1994-07-12
JP3298990B2 true JP3298990B2 (ja) 2002-07-08

Family

ID=27129600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17296893A Expired - Fee Related JP3298990B2 (ja) 1992-07-13 1993-07-13 シリカ含有セラミックコーティングの形成方法

Country Status (7)

Country Link
US (1) US5436029A (enExample)
EP (1) EP0579456B1 (enExample)
JP (1) JP3298990B2 (enExample)
KR (1) KR100251819B1 (enExample)
CA (1) CA2100278A1 (enExample)
DE (1) DE69311639T2 (enExample)
TW (1) TW252054B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8097690B2 (en) 2005-08-05 2012-01-17 Dow Corning Toray Company, Ltd. Cyclic dihydrogenpolysiloxanes, hydrogenpolysiloxanes, processes for their production, silica type glass moldings and a process for their production, optical elements and a process for their production

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5380555A (en) * 1993-02-09 1995-01-10 Dow Corning Toray Silicone Co., Ltd. Methods for the formation of a silicon oxide film
US5547703A (en) * 1994-04-11 1996-08-20 Dow Corning Corporation Method of forming si-o containing coatings
US5508238A (en) * 1995-05-11 1996-04-16 Dow Corning Corporation Monolithic ceramic bodies using modified hydrogen silsesquioxane resin
US5609925A (en) 1995-12-04 1997-03-11 Dow Corning Corporation Curing hydrogen silsesquioxane resin with an electron beam
US5707683A (en) * 1996-02-22 1998-01-13 Dow Corning Corporation Electronic coating composition method of coating an electronic substrate, composition and article
US5707681A (en) * 1997-02-07 1998-01-13 Dow Corning Corporation Method of producing coatings on electronic substrates
US6743856B1 (en) 1997-04-21 2004-06-01 Honeywell International Inc. Synthesis of siloxane resins
US6218497B1 (en) 1997-04-21 2001-04-17 Alliedsignal Inc. Organohydridosiloxane resins with low organic content
US6143855A (en) * 1997-04-21 2000-11-07 Alliedsignal Inc. Organohydridosiloxane resins with high organic content
US6015457A (en) * 1997-04-21 2000-01-18 Alliedsignal Inc. Stable inorganic polymers
TW392288B (en) * 1997-06-06 2000-06-01 Dow Corning Thermally stable dielectric coatings
US5866197A (en) * 1997-06-06 1999-02-02 Dow Corning Corporation Method for producing thick crack-free coating from hydrogen silsequioxane resin
DE19756325A1 (de) * 1997-12-18 1999-07-01 Daimler Chrysler Ag Halbleiterscheibe mit integrierten Einzelbauelementen, Verfahren und Vorrichtung zur Herstellung einer Halbleiterscheibe
US6177199B1 (en) 1999-01-07 2001-01-23 Alliedsignal Inc. Dielectric films from organohydridosiloxane resins with low organic content
US6218020B1 (en) 1999-01-07 2001-04-17 Alliedsignal Inc. Dielectric films from organohydridosiloxane resins with high organic content
KR100371436B1 (ko) * 1999-07-30 2003-02-07 이형찬 자동 또는 수동으로 채널 선택이 가능한 무선 헤드폰
US6440550B1 (en) * 1999-10-18 2002-08-27 Honeywell International Inc. Deposition of fluorosilsesquioxane films
US6472076B1 (en) 1999-10-18 2002-10-29 Honeywell International Inc. Deposition of organosilsesquioxane films
SE521977C2 (sv) * 2002-06-20 2003-12-23 Mobile Media Group Stockholm A Metod och apparat för att formatera en webbtjänst
JP2008547194A (ja) * 2005-06-15 2008-12-25 ダウ・コーニング・コーポレイション 水素シルセスキオキサンを硬化させていき、ナノスケールのトレンチ中において密にさせる方法
JP4783117B2 (ja) * 2005-10-21 2011-09-28 東レ・ダウコーニング株式会社 シリカ系ガラス薄層付き無機質基板、その製造方法、コーテイング剤および半導体装置
JP2008260918A (ja) * 2007-03-16 2008-10-30 Jsr Corp 膜形成用組成物およびシリカ系膜とその形成方法
JP2008260917A (ja) * 2007-03-16 2008-10-30 Jsr Corp 膜形成用組成物およびシリカ系膜とその形成方法
WO2008114835A1 (ja) * 2007-03-16 2008-09-25 Jsr Corporation 膜形成用組成物およびシリ力系膜とその形成方法
JP5313478B2 (ja) * 2007-10-05 2013-10-09 東レ・ダウコーニング株式会社 セラミック状酸化ケイ素系被膜の形成方法、セラミック状酸化ケイ素系被膜を有する無機質基材の製造方法、セラミック状酸化ケイ素系被膜形成剤および半導体装置
US8318582B2 (en) * 2008-02-01 2012-11-27 Jsr Corporation Method of forming a trench isolation
KR100963224B1 (ko) * 2009-02-03 2010-06-10 (주) 더몰론코리아 물 또는 공기 중에서 겸용 사용이 가능한 세라믹 코팅 히터
KR101236491B1 (ko) 2011-03-08 2013-02-22 (주)우드케어 상온에서 경화가 가능한 세라믹 도료 조성물
US9741918B2 (en) 2013-10-07 2017-08-22 Hypres, Inc. Method for increasing the integration level of superconducting electronics circuits, and a resulting circuit

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3615272A (en) * 1968-11-04 1971-10-26 Dow Corning Condensed soluble hydrogensilsesquioxane resin
JPS6377139A (ja) * 1986-09-19 1988-04-07 Fujitsu Ltd 絶縁膜の形成方法
US4756977A (en) * 1986-12-03 1988-07-12 Dow Corning Corporation Multilayer ceramics from hydrogen silsesquioxane
US4847162A (en) * 1987-12-28 1989-07-11 Dow Corning Corporation Multilayer ceramics coatings from the ceramification of hydrogen silsequioxane resin in the presence of ammonia
US4999397A (en) * 1989-07-28 1991-03-12 Dow Corning Corporation Metastable silane hydrolyzates and process for their preparation
US5010159A (en) * 1989-09-01 1991-04-23 Dow Corning Corporation Process for the synthesis of soluble, condensed hydridosilicon resins containing low levels of silanol
US5262201A (en) * 1990-06-04 1993-11-16 Dow Corning Corporation Low temperature process for converting silica precursor coatings to ceramic silica coatings by exposure to ammonium hydroxide or an environment to which water vapor and ammonia vapor have been added
US5116637A (en) * 1990-06-04 1992-05-26 Dow Corning Corporation Amine catalysts for the low temperature conversion of silica precursors to silica
US5059448A (en) * 1990-06-18 1991-10-22 Dow Corning Corporation Rapid thermal process for obtaining silica coatings
US5063267A (en) * 1990-11-28 1991-11-05 Dow Corning Corporation Hydrogen silsesquioxane resin fractions and their use as coating materials
US5145723A (en) * 1991-06-05 1992-09-08 Dow Corning Corporation Process for coating a substrate with silica

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8097690B2 (en) 2005-08-05 2012-01-17 Dow Corning Toray Company, Ltd. Cyclic dihydrogenpolysiloxanes, hydrogenpolysiloxanes, processes for their production, silica type glass moldings and a process for their production, optical elements and a process for their production

Also Published As

Publication number Publication date
DE69311639D1 (de) 1997-07-24
CA2100278A1 (en) 1994-01-14
TW252054B (enExample) 1995-07-21
US5436029A (en) 1995-07-25
EP0579456A3 (enExample) 1994-04-20
KR940005519A (ko) 1994-03-21
DE69311639T2 (de) 1998-01-22
JPH06191970A (ja) 1994-07-12
EP0579456A2 (en) 1994-01-19
KR100251819B1 (ko) 2000-04-15
EP0579456B1 (en) 1997-06-18

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Effective date: 20020305

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