JP3082389B2 - クリーンルーム用保管庫 - Google Patents
クリーンルーム用保管庫Info
- Publication number
- JP3082389B2 JP3082389B2 JP04012311A JP1231192A JP3082389B2 JP 3082389 B2 JP3082389 B2 JP 3082389B2 JP 04012311 A JP04012311 A JP 04012311A JP 1231192 A JP1231192 A JP 1231192A JP 3082389 B2 JP3082389 B2 JP 3082389B2
- Authority
- JP
- Japan
- Prior art keywords
- container
- storage
- cleaning
- lid
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000003860 storage Methods 0.000 title claims description 118
- 238000004140 cleaning Methods 0.000 claims description 74
- 239000007788 liquid Substances 0.000 claims description 23
- 239000007789 gas Substances 0.000 claims description 18
- 238000002360 preparation method Methods 0.000 claims description 13
- 238000002347 injection Methods 0.000 claims description 11
- 239000007924 injection Substances 0.000 claims description 11
- 238000011109 contamination Methods 0.000 claims description 10
- 238000005406 washing Methods 0.000 claims description 10
- 230000003028 elevating effect Effects 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 2
- 229940081330 tena Drugs 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 60
- 239000004065 semiconductor Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 5
- 239000000428 dust Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 3
- 238000007667 floating Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000003599 detergent Substances 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 101100321304 Bacillus subtilis (strain 168) yxdM gene Proteins 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Ventilation (AREA)
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04012311A JP3082389B2 (ja) | 1992-01-27 | 1992-01-27 | クリーンルーム用保管庫 |
| TW082100102A TW227545B (enrdf_load_stackoverflow) | 1992-01-27 | 1993-01-09 | |
| KR1019930000637A KR100236273B1 (ko) | 1992-01-27 | 1993-01-20 | 클린룸용 보관고 |
| US08/006,318 US5363867A (en) | 1992-01-21 | 1993-01-21 | Article storage house in a clean room |
| EP93100881A EP0552756A1 (en) | 1992-01-21 | 1993-01-21 | Article storage house in a clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP04012311A JP3082389B2 (ja) | 1992-01-27 | 1992-01-27 | クリーンルーム用保管庫 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05201506A JPH05201506A (ja) | 1993-08-10 |
| JP3082389B2 true JP3082389B2 (ja) | 2000-08-28 |
Family
ID=11801776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP04012311A Expired - Fee Related JP3082389B2 (ja) | 1992-01-21 | 1992-01-27 | クリーンルーム用保管庫 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP3082389B2 (enrdf_load_stackoverflow) |
| KR (1) | KR100236273B1 (enrdf_load_stackoverflow) |
| TW (1) | TW227545B (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0530081U (ja) * | 1991-09-25 | 1993-04-20 | 新明和工業株式会社 | フツク格納式クレーン |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996030288A1 (fr) * | 1995-03-27 | 1996-10-03 | Toyo Umpanki Co., Ltd. | Dispositif de manipulation de conteneurs et systeme de commande |
| US5980183A (en) * | 1997-04-14 | 1999-11-09 | Asyst Technologies, Inc. | Integrated intrabay buffer, delivery, and stocker system |
| US6379096B1 (en) * | 1999-02-22 | 2002-04-30 | Scp Global Technologies, Inc. | Buffer storage system |
| CN100446220C (zh) * | 2005-08-16 | 2008-12-24 | 力晶半导体股份有限公司 | 半导体元件的制造方法 |
| CN100468697C (zh) * | 2005-08-16 | 2009-03-11 | 力晶半导体股份有限公司 | 半导体元件的制造方法 |
| WO2007149513A2 (en) * | 2006-06-19 | 2007-12-27 | Entegris, Inc. | System for purging reticle storage |
| KR100958793B1 (ko) * | 2007-09-28 | 2010-05-18 | 주식회사 실트론 | 웨이퍼 쉽핑박스의 세정을 위한 박스 크리너 |
| JP4412391B2 (ja) * | 2007-11-16 | 2010-02-10 | 村田機械株式会社 | 搬送車システム |
| JP2009196748A (ja) * | 2008-02-20 | 2009-09-03 | Murata Mach Ltd | 載置台 |
| WO2017212841A1 (ja) * | 2016-06-08 | 2017-12-14 | 村田機械株式会社 | 容器保管装置及び容器保管方法 |
| CN111365957B (zh) * | 2020-04-16 | 2023-05-09 | 重庆电力高等专科学校 | 镀铬管清洗烘干生产线 |
| KR102709447B1 (ko) * | 2021-12-27 | 2024-09-26 | 세메스 주식회사 | 세정 모듈, 보관 시스템 및 보관 장치의 세정 방법 |
| CN115215030B (zh) * | 2022-07-14 | 2024-03-19 | 深圳市创新特科技有限公司 | 一种用于无尘室的立体仓储系统 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990014273A1 (en) | 1989-05-19 | 1990-11-29 | Asyst Technologies, Inc. | Sealable transportable container having improved latch mechanism |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6036205A (ja) * | 1983-08-08 | 1985-02-25 | Hitachi Ltd | 収納装置 |
-
1992
- 1992-01-27 JP JP04012311A patent/JP3082389B2/ja not_active Expired - Fee Related
-
1993
- 1993-01-09 TW TW082100102A patent/TW227545B/zh not_active IP Right Cessation
- 1993-01-20 KR KR1019930000637A patent/KR100236273B1/ko not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1990014273A1 (en) | 1989-05-19 | 1990-11-29 | Asyst Technologies, Inc. | Sealable transportable container having improved latch mechanism |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0530081U (ja) * | 1991-09-25 | 1993-04-20 | 新明和工業株式会社 | フツク格納式クレーン |
Also Published As
| Publication number | Publication date |
|---|---|
| KR930016317A (ko) | 1993-08-26 |
| JPH05201506A (ja) | 1993-08-10 |
| KR100236273B1 (ko) | 1999-12-15 |
| TW227545B (enrdf_load_stackoverflow) | 1994-08-01 |
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