JP2512775Y2 - クリ―ンル―ムの気流路構造 - Google Patents

クリ―ンル―ムの気流路構造

Info

Publication number
JP2512775Y2
JP2512775Y2 JP1990003478U JP347890U JP2512775Y2 JP 2512775 Y2 JP2512775 Y2 JP 2512775Y2 JP 1990003478 U JP1990003478 U JP 1990003478U JP 347890 U JP347890 U JP 347890U JP 2512775 Y2 JP2512775 Y2 JP 2512775Y2
Authority
JP
Japan
Prior art keywords
clean room
air flow
floor
ceiling
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990003478U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0397138U (cs
Inventor
忠弘 大見
泰彦 笠間
直 柴田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP1990003478U priority Critical patent/JP2512775Y2/ja
Publication of JPH0397138U publication Critical patent/JPH0397138U/ja
Application granted granted Critical
Publication of JP2512775Y2 publication Critical patent/JP2512775Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1990003478U 1990-01-18 1990-01-18 クリ―ンル―ムの気流路構造 Expired - Lifetime JP2512775Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990003478U JP2512775Y2 (ja) 1990-01-18 1990-01-18 クリ―ンル―ムの気流路構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990003478U JP2512775Y2 (ja) 1990-01-18 1990-01-18 クリ―ンル―ムの気流路構造

Publications (2)

Publication Number Publication Date
JPH0397138U JPH0397138U (cs) 1991-10-04
JP2512775Y2 true JP2512775Y2 (ja) 1996-10-02

Family

ID=31507296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990003478U Expired - Lifetime JP2512775Y2 (ja) 1990-01-18 1990-01-18 クリ―ンル―ムの気流路構造

Country Status (1)

Country Link
JP (1) JP2512775Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07225Y2 (ja) * 1988-07-18 1995-01-11 ローム株式会社 クリーンユニット

Also Published As

Publication number Publication date
JPH0397138U (cs) 1991-10-04

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