JP2511250Y2 - 浸漬型基板処理装置 - Google Patents
浸漬型基板処理装置Info
- Publication number
- JP2511250Y2 JP2511250Y2 JP5669690U JP5669690U JP2511250Y2 JP 2511250 Y2 JP2511250 Y2 JP 2511250Y2 JP 5669690 U JP5669690 U JP 5669690U JP 5669690 U JP5669690 U JP 5669690U JP 2511250 Y2 JP2511250 Y2 JP 2511250Y2
- Authority
- JP
- Japan
- Prior art keywords
- processing tank
- reinforcing plate
- processing
- tank
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 title claims description 29
- 238000007654 immersion Methods 0.000 title claims description 7
- 230000003014 reinforcing effect Effects 0.000 claims description 27
- 239000010453 quartz Substances 0.000 claims description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 25
- 239000007788 liquid Substances 0.000 claims description 21
- 230000007797 corrosion Effects 0.000 claims description 12
- 238000005260 corrosion Methods 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 claims description 11
- 230000001070 adhesive effect Effects 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 10
- 230000003028 elevating effect Effects 0.000 claims description 4
- 238000004381 surface treatment Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 description 37
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 239000005341 toughened glass Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000013464 silicone adhesive Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5669690U JP2511250Y2 (ja) | 1990-05-29 | 1990-05-29 | 浸漬型基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5669690U JP2511250Y2 (ja) | 1990-05-29 | 1990-05-29 | 浸漬型基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0415232U JPH0415232U (enrdf_load_stackoverflow) | 1992-02-06 |
| JP2511250Y2 true JP2511250Y2 (ja) | 1996-09-25 |
Family
ID=31580751
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5669690U Expired - Lifetime JP2511250Y2 (ja) | 1990-05-29 | 1990-05-29 | 浸漬型基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2511250Y2 (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2908277B2 (ja) * | 1994-04-15 | 1999-06-21 | ステアーグ ミクロテヒ ゲゼルシャフト ミット ベシュレンクテル ハフツング | 基板の化学処理のための方法及び装置 |
-
1990
- 1990-05-29 JP JP5669690U patent/JP2511250Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0415232U (enrdf_load_stackoverflow) | 1992-02-06 |
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