JPH0415232U - - Google Patents

Info

Publication number
JPH0415232U
JPH0415232U JP5669690U JP5669690U JPH0415232U JP H0415232 U JPH0415232 U JP H0415232U JP 5669690 U JP5669690 U JP 5669690U JP 5669690 U JP5669690 U JP 5669690U JP H0415232 U JPH0415232 U JP H0415232U
Authority
JP
Japan
Prior art keywords
processing tank
processing
reinforcing plate
corrosion
immersion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5669690U
Other languages
English (en)
Japanese (ja)
Other versions
JP2511250Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5669690U priority Critical patent/JP2511250Y2/ja
Publication of JPH0415232U publication Critical patent/JPH0415232U/ja
Application granted granted Critical
Publication of JP2511250Y2 publication Critical patent/JP2511250Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Weting (AREA)
JP5669690U 1990-05-29 1990-05-29 浸漬型基板処理装置 Expired - Lifetime JP2511250Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5669690U JP2511250Y2 (ja) 1990-05-29 1990-05-29 浸漬型基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5669690U JP2511250Y2 (ja) 1990-05-29 1990-05-29 浸漬型基板処理装置

Publications (2)

Publication Number Publication Date
JPH0415232U true JPH0415232U (enrdf_load_stackoverflow) 1992-02-06
JP2511250Y2 JP2511250Y2 (ja) 1996-09-25

Family

ID=31580751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5669690U Expired - Lifetime JP2511250Y2 (ja) 1990-05-29 1990-05-29 浸漬型基板処理装置

Country Status (1)

Country Link
JP (1) JP2511250Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08148458A (ja) * 1994-04-15 1996-06-07 Steag Micro Tech Gmbh Donaueschingen 基板の化学処理のための方法及び装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08148458A (ja) * 1994-04-15 1996-06-07 Steag Micro Tech Gmbh Donaueschingen 基板の化学処理のための方法及び装置

Also Published As

Publication number Publication date
JP2511250Y2 (ja) 1996-09-25

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