JP2024532903A5 - - Google Patents

Info

Publication number
JP2024532903A5
JP2024532903A5 JP2024513736A JP2024513736A JP2024532903A5 JP 2024532903 A5 JP2024532903 A5 JP 2024532903A5 JP 2024513736 A JP2024513736 A JP 2024513736A JP 2024513736 A JP2024513736 A JP 2024513736A JP 2024532903 A5 JP2024532903 A5 JP 2024532903A5
Authority
JP
Japan
Application number
JP2024513736A
Other languages
Japanese (ja)
Other versions
JPWO2023034738A5 (https=
JP2024532903A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2022/075576 external-priority patent/WO2023034738A1/en
Publication of JP2024532903A publication Critical patent/JP2024532903A/ja
Publication of JP2024532903A5 publication Critical patent/JP2024532903A5/ja
Publication of JPWO2023034738A5 publication Critical patent/JPWO2023034738A5/ja
Pending legal-status Critical Current

Links

JP2024513736A 2021-09-01 2022-08-29 インターポーザを備えた積層構造 Pending JP2024532903A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202163239783P 2021-09-01 2021-09-01
US63/239,783 2021-09-01
PCT/US2022/075576 WO2023034738A1 (en) 2021-09-01 2022-08-29 Stacked structure with interposer

Publications (3)

Publication Number Publication Date
JP2024532903A JP2024532903A (ja) 2024-09-10
JP2024532903A5 true JP2024532903A5 (https=) 2025-09-04
JPWO2023034738A5 JPWO2023034738A5 (https=) 2025-09-04

Family

ID=85287152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024513736A Pending JP2024532903A (ja) 2021-09-01 2022-08-29 インターポーザを備えた積層構造

Country Status (6)

Country Link
US (1) US20230069183A1 (https=)
EP (1) EP4396872A4 (https=)
JP (1) JP2024532903A (https=)
KR (1) KR20240052815A (https=)
CN (1) CN118302858A (https=)
WO (1) WO2023034738A1 (https=)

Families Citing this family (89)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7109092B2 (en) 2003-05-19 2006-09-19 Ziptronix, Inc. Method of room temperature covalent bonding
US8735219B2 (en) 2012-08-30 2014-05-27 Ziptronix, Inc. Heterogeneous annealing method and device
US9953941B2 (en) 2015-08-25 2018-04-24 Invensas Bonding Technologies, Inc. Conductive barrier direct hybrid bonding
US10204893B2 (en) 2016-05-19 2019-02-12 Invensas Bonding Technologies, Inc. Stacked dies and methods for forming bonded structures
US10672663B2 (en) 2016-10-07 2020-06-02 Xcelsis Corporation 3D chip sharing power circuit
US10580735B2 (en) 2016-10-07 2020-03-03 Xcelsis Corporation Stacked IC structure with system level wiring on multiple sides of the IC die
US10719762B2 (en) 2017-08-03 2020-07-21 Xcelsis Corporation Three dimensional chip structure implementing machine trained network
TWI910033B (zh) 2016-10-27 2025-12-21 美商艾德亞半導體科技有限責任公司 用於低溫接合的結構和方法
US10002844B1 (en) 2016-12-21 2018-06-19 Invensas Bonding Technologies, Inc. Bonded structures
US20180182665A1 (en) 2016-12-28 2018-06-28 Invensas Bonding Technologies, Inc. Processed Substrate
KR102320673B1 (ko) 2016-12-28 2021-11-01 인벤사스 본딩 테크놀로지스 인코포레이티드 적층된 기판의 처리
KR20190092584A (ko) 2016-12-29 2019-08-07 인벤사스 본딩 테크놀로지스 인코포레이티드 집적된 수동 컴포넌트를 구비한 접합된 구조체
WO2018169968A1 (en) 2017-03-16 2018-09-20 Invensas Corporation Direct-bonded led arrays and applications
US10515913B2 (en) 2017-03-17 2019-12-24 Invensas Bonding Technologies, Inc. Multi-metal contact structure
US10508030B2 (en) 2017-03-21 2019-12-17 Invensas Bonding Technologies, Inc. Seal for microelectronic assembly
US10269756B2 (en) 2017-04-21 2019-04-23 Invensas Bonding Technologies, Inc. Die processing
US10879212B2 (en) 2017-05-11 2020-12-29 Invensas Bonding Technologies, Inc. Processed stacked dies
US10446441B2 (en) 2017-06-05 2019-10-15 Invensas Corporation Flat metal features for microelectronics applications
US10217720B2 (en) 2017-06-15 2019-02-26 Invensas Corporation Multi-chip modules formed using wafer-level processing of a reconstitute wafer
US10840205B2 (en) 2017-09-24 2020-11-17 Invensas Bonding Technologies, Inc. Chemical mechanical polishing for hybrid bonding
US11031285B2 (en) 2017-10-06 2021-06-08 Invensas Bonding Technologies, Inc. Diffusion barrier collar for interconnects
US11011503B2 (en) 2017-12-15 2021-05-18 Invensas Bonding Technologies, Inc. Direct-bonded optoelectronic interconnect for high-density integrated photonics
US11380597B2 (en) 2017-12-22 2022-07-05 Invensas Bonding Technologies, Inc. Bonded structures
US10727219B2 (en) 2018-02-15 2020-07-28 Invensas Bonding Technologies, Inc. Techniques for processing devices
US11169326B2 (en) 2018-02-26 2021-11-09 Invensas Bonding Technologies, Inc. Integrated optical waveguides, direct-bonded waveguide interface joints, optical routing and interconnects
US11256004B2 (en) 2018-03-20 2022-02-22 Invensas Bonding Technologies, Inc. Direct-bonded lamination for improved image clarity in optical devices
US10991804B2 (en) 2018-03-29 2021-04-27 Xcelsis Corporation Transistor level interconnection methodologies utilizing 3D interconnects
US11056348B2 (en) 2018-04-05 2021-07-06 Invensas Bonding Technologies, Inc. Bonding surfaces for microelectronics
US11244916B2 (en) 2018-04-11 2022-02-08 Invensas Bonding Technologies, Inc. Low temperature bonded structures
US10790262B2 (en) 2018-04-11 2020-09-29 Invensas Bonding Technologies, Inc. Low temperature bonded structures
US10964664B2 (en) 2018-04-20 2021-03-30 Invensas Bonding Technologies, Inc. DBI to Si bonding for simplified handle wafer
US11004757B2 (en) 2018-05-14 2021-05-11 Invensas Bonding Technologies, Inc. Bonded structures
US11276676B2 (en) 2018-05-15 2022-03-15 Invensas Bonding Technologies, Inc. Stacked devices and methods of fabrication
US10923413B2 (en) 2018-05-30 2021-02-16 Xcelsis Corporation Hard IP blocks with physically bidirectional passageways
US11393779B2 (en) 2018-06-13 2022-07-19 Invensas Bonding Technologies, Inc. Large metal pads over TSV
US11749645B2 (en) 2018-06-13 2023-09-05 Adeia Semiconductor Bonding Technologies Inc. TSV as pad
WO2020010056A1 (en) 2018-07-03 2020-01-09 Invensas Bonding Technologies, Inc. Techniques for joining dissimilar materials in microelectronics
US11158606B2 (en) 2018-07-06 2021-10-26 Invensas Bonding Technologies, Inc. Molded direct bonded and interconnected stack
WO2020010265A1 (en) 2018-07-06 2020-01-09 Invensas Bonding Technologies, Inc. Microelectronic assemblies
US12406959B2 (en) 2018-07-26 2025-09-02 Adeia Semiconductor Bonding Technologies Inc. Post CMP processing for hybrid bonding
US11515291B2 (en) 2018-08-28 2022-11-29 Adeia Semiconductor Inc. Integrated voltage regulator and passive components
US11296044B2 (en) 2018-08-29 2022-04-05 Invensas Bonding Technologies, Inc. Bond enhancement structure in microelectronics for trapping contaminants during direct-bonding processes
US11011494B2 (en) 2018-08-31 2021-05-18 Invensas Bonding Technologies, Inc. Layer structures for making direct metal-to-metal bonds at low temperatures in microelectronics
US11158573B2 (en) 2018-10-22 2021-10-26 Invensas Bonding Technologies, Inc. Interconnect structures
US11244920B2 (en) 2018-12-18 2022-02-08 Invensas Bonding Technologies, Inc. Method and structures for low temperature device bonding
CN113330557A (zh) 2019-01-14 2021-08-31 伊文萨思粘合技术公司 键合结构
US11387202B2 (en) 2019-03-01 2022-07-12 Invensas Llc Nanowire bonding interconnect for fine-pitch microelectronics
US11901281B2 (en) 2019-03-11 2024-02-13 Adeia Semiconductor Bonding Technologies Inc. Bonded structures with integrated passive component
US10854578B2 (en) 2019-03-29 2020-12-01 Invensas Corporation Diffused bitline replacement in stacked wafer memory
US11205625B2 (en) 2019-04-12 2021-12-21 Invensas Bonding Technologies, Inc. Wafer-level bonding of obstructive elements
US11373963B2 (en) 2019-04-12 2022-06-28 Invensas Bonding Technologies, Inc. Protective elements for bonded structures
US11610846B2 (en) 2019-04-12 2023-03-21 Adeia Semiconductor Bonding Technologies Inc. Protective elements for bonded structures including an obstructive element
US11355404B2 (en) 2019-04-22 2022-06-07 Invensas Bonding Technologies, Inc. Mitigating surface damage of probe pads in preparation for direct bonding of a substrate
US11385278B2 (en) 2019-05-23 2022-07-12 Invensas Bonding Technologies, Inc. Security circuitry for bonded structures
US12374641B2 (en) 2019-06-12 2025-07-29 Adeia Semiconductor Bonding Technologies Inc. Sealed bonded structures and methods for forming the same
US11296053B2 (en) 2019-06-26 2022-04-05 Invensas Bonding Technologies, Inc. Direct bonded stack structures for increased reliability and improved yield in microelectronics
US12080672B2 (en) 2019-09-26 2024-09-03 Adeia Semiconductor Bonding Technologies Inc. Direct gang bonding methods including directly bonding first element to second element to form bonded structure without adhesive
US12113054B2 (en) 2019-10-21 2024-10-08 Adeia Semiconductor Technologies Llc Non-volatile dynamic random access memory
US11862602B2 (en) 2019-11-07 2024-01-02 Adeia Semiconductor Technologies Llc Scalable architecture for reduced cycles across SOC
US11762200B2 (en) 2019-12-17 2023-09-19 Adeia Semiconductor Bonding Technologies Inc. Bonded optical devices
US11876076B2 (en) 2019-12-20 2024-01-16 Adeia Semiconductor Technologies Llc Apparatus for non-volatile random access memory stacks
US11721653B2 (en) 2019-12-23 2023-08-08 Adeia Semiconductor Bonding Technologies Inc. Circuitry for electrical redundancy in bonded structures
KR20260009391A (ko) 2019-12-23 2026-01-19 아데이아 세미컨덕터 본딩 테크놀로지스 인코포레이티드 결합형 구조체를 위한 전기적 리던던시
CN115943489A (zh) 2020-03-19 2023-04-07 隔热半导体粘合技术公司 用于直接键合结构的尺寸补偿控制
US11742314B2 (en) 2020-03-31 2023-08-29 Adeia Semiconductor Bonding Technologies Inc. Reliable hybrid bonded apparatus
US11735523B2 (en) 2020-05-19 2023-08-22 Adeia Semiconductor Bonding Technologies Inc. Laterally unconfined structure
US11631647B2 (en) 2020-06-30 2023-04-18 Adeia Semiconductor Bonding Technologies Inc. Integrated device packages with integrated device die and dummy element
US11728273B2 (en) 2020-09-04 2023-08-15 Adeia Semiconductor Bonding Technologies Inc. Bonded structure with interconnect structure
US11764177B2 (en) 2020-09-04 2023-09-19 Adeia Semiconductor Bonding Technologies Inc. Bonded structure with interconnect structure
US11264357B1 (en) 2020-10-20 2022-03-01 Invensas Corporation Mixed exposure for large die
WO2022094587A1 (en) 2020-10-29 2022-05-05 Invensas Bonding Technologies, Inc. Direct bonding methods and structures
CN116762163A (zh) 2020-12-28 2023-09-15 美商艾德亚半导体接合科技有限公司 具有贯穿衬底过孔的结构及其形成方法
WO2022147429A1 (en) 2020-12-28 2022-07-07 Invensas Bonding Technologies, Inc. Structures with through-substrate vias and methods for forming the same
CN116848631A (zh) 2020-12-30 2023-10-03 美商艾德亚半导体接合科技有限公司 具有导电特征的结构及其形成方法
US12550799B2 (en) 2021-03-31 2026-02-10 Adeia Semiconductor Bonding Technologies Inc. Direct bonding methods and structures
EP4315398A4 (en) 2021-03-31 2025-03-05 Adeia Semiconductor Bonding Technologies Inc. DIRECT ADHESION AND REMOVING A CARRIER
KR20240036698A (ko) 2021-08-02 2024-03-20 아데이아 세미컨덕터 본딩 테크놀로지스 인코포레이티드 결합 구조체를 위한 보호 반도체 소자
EP4406020A4 (en) 2021-09-24 2026-01-21 Adeia Semiconductor Bonding Technologies Inc Bonded structure with active interposer
US12604771B2 (en) * 2021-10-28 2026-04-14 Adeia Semiconductor Bonding Technologies Inc. Direct bonding methods and structures
US12563749B2 (en) 2021-10-28 2026-02-24 Adeia Semiconductor Bonding Technologies Inc Stacked electronic devices
US12557615B2 (en) 2021-12-13 2026-02-17 Adeia Semiconductor Technologies Llc Methods for bonding semiconductor elements
KR20240128904A (ko) 2021-12-20 2024-08-27 아데이아 세미컨덕터 본딩 테크놀로지스 인코포레이티드 다이 패키지를 위한 열전 냉각
US12512425B2 (en) 2022-04-25 2025-12-30 Adeia Semiconductor Bonding Technologies Inc. Expansion controlled structure for direct bonding and method of forming same
JP2025517291A (ja) 2022-05-23 2025-06-05 アデイア セミコンダクター ボンディング テクノロジーズ インコーポレイテッド ボンデッド構造体のための試験用素子
US12506114B2 (en) 2022-12-29 2025-12-23 Adeia Semiconductor Bonding Technologies Inc. Directly bonded metal structures having aluminum features and methods of preparing same
US12545010B2 (en) 2022-12-29 2026-02-10 Adeia Semiconductor Bonding Technologies Inc. Directly bonded metal structures having oxide layers therein
US12341083B2 (en) 2023-02-08 2025-06-24 Adeia Semiconductor Bonding Technologies Inc. Electronic device cooling structures bonded to semiconductor elements
US12598962B2 (en) 2023-03-14 2026-04-07 Adeia Semiconductor Bonding Technologies Inc. System and method for bonding transparent conductor substrates
CN119133167B (zh) * 2024-08-20 2025-08-05 丽水威固电子科技有限责任公司 多芯片封装结构及封装方法

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6984571B1 (en) 1999-10-01 2006-01-10 Ziptronix, Inc. Three dimensional device integration method and integrated device
US6902987B1 (en) 2000-02-16 2005-06-07 Ziptronix, Inc. Method for low temperature bonding and bonded structure
US6822326B2 (en) 2002-09-25 2004-11-23 Ziptronix Wafer bonding hermetic encapsulation
US6962835B2 (en) 2003-02-07 2005-11-08 Ziptronix, Inc. Method for room temperature metal direct bonding
US7109092B2 (en) 2003-05-19 2006-09-19 Ziptronix, Inc. Method of room temperature covalent bonding
US7060601B2 (en) * 2003-12-17 2006-06-13 Tru-Si Technologies, Inc. Packaging substrates for integrated circuits and soldering methods
US7485968B2 (en) 2005-08-11 2009-02-03 Ziptronix, Inc. 3D IC method and device
US8049338B2 (en) * 2006-04-07 2011-11-01 General Electric Company Power semiconductor module and fabrication method
KR20100037300A (ko) * 2008-10-01 2010-04-09 삼성전자주식회사 내장형 인터포저를 갖는 반도체장치의 형성방법
US8379917B2 (en) 2009-10-02 2013-02-19 DigitalOptics Corporation Europe Limited Face recognition performance using additional image features
US8466544B2 (en) * 2011-02-25 2013-06-18 Stats Chippac, Ltd. Semiconductor device and method of forming interposer and opposing build-up interconnect structure with connecting conductive TMV for electrical interconnect of Fo-WLCSP
TWI492680B (zh) * 2011-08-05 2015-07-11 欣興電子股份有限公司 嵌埋有中介層之封裝基板及其製法
US8735219B2 (en) 2012-08-30 2014-05-27 Ziptronix, Inc. Heterogeneous annealing method and device
IL223414A (en) * 2012-12-04 2017-07-31 Elta Systems Ltd Integrated electronic device and method for creating it
US9633869B2 (en) * 2013-08-16 2017-04-25 Taiwan Semiconductor Manufacturing Company, Ltd. Packages with interposers and methods for forming the same
US9627358B2 (en) * 2013-09-27 2017-04-18 Intel Corporation Method for interconnecting stacked semiconductor devices
US10283492B2 (en) * 2015-06-23 2019-05-07 Invensas Corporation Laminated interposers and packages with embedded trace interconnects
US9953941B2 (en) 2015-08-25 2018-04-24 Invensas Bonding Technologies, Inc. Conductive barrier direct hybrid bonding
US9768145B2 (en) * 2015-08-31 2017-09-19 Taiwan Semiconductor Manufacturing Company, Ltd. Methods of forming multi-die package structures including redistribution layers
US9852988B2 (en) 2015-12-18 2017-12-26 Invensas Bonding Technologies, Inc. Increased contact alignment tolerance for direct bonding
US10446532B2 (en) 2016-01-13 2019-10-15 Invensas Bonding Technologies, Inc. Systems and methods for efficient transfer of semiconductor elements
US10204893B2 (en) 2016-05-19 2019-02-12 Invensas Bonding Technologies, Inc. Stacked dies and methods for forming bonded structures
US11195748B2 (en) 2017-09-27 2021-12-07 Invensas Corporation Interconnect structures and methods for forming same
US10665554B2 (en) * 2017-10-30 2020-05-26 Taiwan Semiconductor Manufacturing Company Ltd. Magnetic structure for transmission lines in a package system
US10658313B2 (en) * 2017-12-11 2020-05-19 Invensas Bonding Technologies, Inc. Selective recess
KR102560697B1 (ko) * 2018-07-31 2023-07-27 삼성전자주식회사 인터포저를 가지는 반도체 패키지
KR102803426B1 (ko) * 2019-01-24 2025-05-07 삼성전기주식회사 브리지 내장 인터포저, 및 이를 포함하는 패키지 기판 및 반도체 패키지
US10903169B2 (en) * 2019-04-30 2021-01-26 Advanced Semiconductor Engineering, Inc. Conductive structure and wiring structure including the same
US11094635B2 (en) * 2019-08-22 2021-08-17 Taiwan Semiconductor Manufacturing Co., Ltd. Package structure and method for forming the same
US11545438B2 (en) * 2019-12-25 2023-01-03 Taiwan Semiconductor Manufacturing Company, Ltd. Semiconductor packages and methods of forming the same

Similar Documents

Publication Publication Date Title
JP2024532903A5 (https=)
CL2025003220A1 (es) Inhibidores de prmt5 y usos de estos
CL2025004106A1 (es) Compuesto macrocíclico polisustituido y uso para tratar trombos.
CL2025003551A1 (es) Autoinyector y métodos de uso relacionados.
BR202022001779U2 (https=)
BR202022000931U2 (https=)
CN307044751S (https=)
BY13175U (https=)
CN307049510S (https=)
CN307049216S (https=)
CN307049100S (https=)
CN307048100S (https=)
CN307047772S (https=)
CN307047267S (https=)
CN307047126S (https=)
CN307047065S (https=)
CN307047015S (https=)
CN307046965S (https=)
CN307046027S (https=)
CN307046018S (https=)
CN307045849S (https=)
CN307045639S (https=)
CN307045543S (https=)
CN307045112S (https=)
BY23963C1 (https=)