JP2024523207A5 - - Google Patents

Info

Publication number
JP2024523207A5
JP2024523207A5 JP2023575566A JP2023575566A JP2024523207A5 JP 2024523207 A5 JP2024523207 A5 JP 2024523207A5 JP 2023575566 A JP2023575566 A JP 2023575566A JP 2023575566 A JP2023575566 A JP 2023575566A JP 2024523207 A5 JP2024523207 A5 JP 2024523207A5
Authority
JP
Japan
Prior art keywords
detection device
leak detection
vacuum pump
inlet
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023575566A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024523207A (ja
Filing date
Publication date
Priority claimed from DE102021115463.4A external-priority patent/DE102021115463A1/de
Application filed filed Critical
Publication of JP2024523207A publication Critical patent/JP2024523207A/ja
Publication of JP2024523207A5 publication Critical patent/JP2024523207A5/ja
Pending legal-status Critical Current

Links

JP2023575566A 2021-06-15 2022-05-24 漏れ検知装置 Pending JP2024523207A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021115463.4 2021-06-15
DE102021115463.4A DE102021115463A1 (de) 2021-06-15 2021-06-15 Leckdetektionsvorrichtung
PCT/EP2022/064017 WO2022263121A1 (de) 2021-06-15 2022-05-24 Leckdetektionsvorrichtung

Publications (2)

Publication Number Publication Date
JP2024523207A JP2024523207A (ja) 2024-06-28
JP2024523207A5 true JP2024523207A5 (https=) 2025-02-04

Family

ID=82021080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023575566A Pending JP2024523207A (ja) 2021-06-15 2022-05-24 漏れ検知装置

Country Status (9)

Country Link
US (1) US20240361201A1 (https=)
EP (1) EP4356091B1 (https=)
JP (1) JP2024523207A (https=)
CN (1) CN117413165A (https=)
BR (1) BR112023025094A2 (https=)
CA (1) CA3220515A1 (https=)
DE (1) DE102021115463A1 (https=)
MX (1) MX2023013907A (https=)
WO (1) WO2022263121A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021125707A1 (de) * 2021-10-04 2023-04-06 Inficon Gmbh Lecksuche bei viskoser Strömung
DE102023129743A1 (de) * 2023-10-27 2025-04-30 Inficon Gmbh Vorrichtung und Verfahren zur massenspektrometrischen Hochvakuumlecksuche

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2827537A1 (de) 1978-06-23 1980-01-10 Leybold Heraeus Gmbh & Co Kg Betriebsverfahren fuer eine einrichtung zur lecksuche, gasanalyse o.dgl. und dazu geeignete einrichtung
JPS56149913U (https=) * 1980-04-10 1981-11-11
DE3775213D1 (de) * 1987-03-27 1992-01-23 Leybold Ag Lecksuchgeraet und betriebsverfahren dazu.
JPH01195348A (ja) 1988-01-29 1989-08-07 Shimadzu Corp 赤外線式ガス分析計
DE19853049C2 (de) * 1998-11-17 2001-09-06 Joachim Franzke Vorrichtung und Verfahren zum Feststellen eines Lecks sowie Verwendung einer solchen Vorrichtung für die Lecksuche
DE10062126A1 (de) * 2000-12-13 2002-06-20 Inficon Gmbh Verfahren zur Feststellung eines Gases mit Hilfe eines Infrarot-Gasanlaysators sowie für die Durchführung dieser Verfahren geigneter Gasanalysator
JP4026579B2 (ja) * 2003-10-16 2007-12-26 株式会社デンソー 気密漏れ検査方法及び装置
DE102004059485A1 (de) 2004-12-10 2006-06-22 Inficon Gmbh Lecksuchgerät
DE102005043494A1 (de) 2005-09-13 2007-03-15 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102006047856A1 (de) 2006-10-10 2008-04-17 Inficon Gmbh Schnüffellecksucher
DE102008008262A1 (de) * 2008-02-08 2009-08-13 Inficon Gmbh Schnüffellecksucher nach dem Referenzmessprinzip
DE102010048982B4 (de) * 2010-09-03 2022-06-09 Inficon Gmbh Lecksuchgerät
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
CN205748829U (zh) * 2016-06-20 2016-11-30 中国兵器工业第二一三研究所 一种用于氦质谱检漏仪的泄漏率多路自动化测量装置
KR101930219B1 (ko) * 2018-08-06 2018-12-17 주식회사 제일그린시스 단일 펌프를 이용한 샘플링 및 클리닝 기능을 갖춘 가스 샘플링 장치

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