JP2006525498A - リークディテクタ - Google Patents
リークディテクタ Download PDFInfo
- Publication number
- JP2006525498A JP2006525498A JP2006505077A JP2006505077A JP2006525498A JP 2006525498 A JP2006525498 A JP 2006525498A JP 2006505077 A JP2006505077 A JP 2006505077A JP 2006505077 A JP2006505077 A JP 2006505077A JP 2006525498 A JP2006525498 A JP 2006525498A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- high vacuum
- valve
- leak detector
- inlet side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004949 mass spectrometry Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 abstract description 23
- 239000001307 helium Substances 0.000 abstract description 12
- 229910052734 helium Inorganic materials 0.000 abstract description 12
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract description 12
- 230000035484 reaction time Effects 0.000 abstract description 4
- 238000005086 pumping Methods 0.000 abstract description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
出口側25: 15mbar
中間吸込口42: 1mbar
中間吸込口41: 10−2mbar
入口側23: 10−4mbar
Claims (4)
- 逆流原理に基づくリークディテクタであって、該リークディテクタに、第1の高真空ポンプ(16)が設けられており、該第1の高真空ポンプ(16)の入口側(15)が、リークディテクタ(14)の吸込口(13)に接続されており、第2の高真空ポンプ(22)が設けられており、該第2の高真空ポンプ(22)の入口側(23)が、質量分析計(24)に接続されており、補助真空ポンプ(20)が設けられており、該補助真空ポンプ(20)の入口側(19)が、両方の高真空ポンプ(16,22)の出口側(17,25)に接続されており、リークディテクタの吸込口(13)を補助真空ポンプ(20)に接続する、第1の弁(31)を有する迂回管路(30)が設けられている形式のものにおいて、
第1の高真空ポンプ(16)が、絞られずに、弁なしにリークディテクタ(14)の吸込口(13)に接続されており、第2の弁(18)が、第1の高真空ポンプ(16)の出口側(17)と、補助真空ポンプ(20)との間に設けられていることを特徴とする、リークディテクタ。 - 第1の高真空ポンプ(16)が、第1の弁(31)の開放時に、第2の弁(18)の開放と同時に始動される、請求項1記載のリークディテクタ。
- 吸込口(13)の圧力が、粘性流範囲を離れた場合に、若しくは限界値よりも低下した場合に、第1の高真空ポンプ(16)が、第1の弁(31)の開放後にはじめて始動される、請求項1記載のリークディテクタ。
- 第2の高真空ポンプ(22)が、少なくとも1つの中間吸込口(41,42)を有しており、この中間吸込口(41,42)が、弁(43,44)を介して第1の高真空ポンプ(16)の出口側(17)に接続されており、前記弁が、第1の高真空ポンプ(16)の出口側の圧力に関連して制御されている、請求項1から3までのいずれか1項記載のリークディテクタ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10319633A DE10319633A1 (de) | 2003-05-02 | 2003-05-02 | Lecksuchgerät |
PCT/EP2004/003789 WO2004097363A2 (de) | 2003-05-02 | 2004-04-08 | Lecksuchgerät |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006525498A true JP2006525498A (ja) | 2006-11-09 |
JP4357528B2 JP4357528B2 (ja) | 2009-11-04 |
Family
ID=33305104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006505077A Expired - Fee Related JP4357528B2 (ja) | 2003-05-02 | 2004-04-08 | リークディテクタ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7717681B2 (ja) |
EP (1) | EP1620706B1 (ja) |
JP (1) | JP4357528B2 (ja) |
CN (1) | CN100533091C (ja) |
DE (2) | DE10319633A1 (ja) |
WO (1) | WO2004097363A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190019070A (ko) * | 2016-06-15 | 2019-02-26 | 인피콘 게엠베하 | 공통 샤프트 상에 터보분자 펌프와 부스터 펌프가 구비된 질량 분석 누출 검출기 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2910964A1 (fr) * | 2007-01-03 | 2008-07-04 | Alcatel Lucent Sa | Dispositif et procede de detection rapide de fuites. |
DE102008061807A1 (de) | 2008-12-11 | 2010-06-17 | Inficon Gmbh | Verfahren zur Dichtheitsprüfung eines Stacks von Brennstoffzellen |
EP3502472B1 (en) * | 2009-12-24 | 2020-09-09 | Sumitomo Seika Chemicals Co., Ltd. | Exhaust gas vibration suppressing device in double vacuum pump apparatus |
CA2795970C (en) * | 2010-05-21 | 2016-11-29 | Exxonmobil Upstream Research Company | Parallel dynamic compressor apparatus and methods related thereto |
DE102010033373A1 (de) * | 2010-08-04 | 2012-02-09 | Inficon Gmbh | Lecksuchgerät |
DE102010048982B4 (de) * | 2010-09-03 | 2022-06-09 | Inficon Gmbh | Lecksuchgerät |
FR2969287B1 (fr) * | 2010-12-17 | 2013-10-25 | Alcatel Lucent | Dispositif de detection de fuite utilisant l'hydrogene comme gaz traceur |
DE102013218506A1 (de) * | 2013-09-16 | 2015-03-19 | Inficon Gmbh | Schnüffellecksucher mit mehrstufiger Membranpumpe |
DE102014223841A1 (de) | 2014-11-21 | 2016-05-25 | Inficon Gmbh | Vorrichtung und Verfahren zur Gegenstrom-Leckdetektion |
FR3070489B1 (fr) * | 2017-08-29 | 2020-10-23 | Pfeiffer Vacuum | Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester |
FR3072774B1 (fr) * | 2017-10-19 | 2019-11-15 | Pfeiffer Vacuum | Detecteur de fuites pour le controle de l'etancheite d'un objet a tester |
CN109390204B (zh) * | 2018-12-10 | 2024-03-12 | 合肥中科离子医学技术装备有限公司 | 一种大量程可调节移动式真空质谱测量设备 |
DE102020132896A1 (de) | 2020-12-10 | 2022-06-15 | Inficon Gmbh | Vorrichtung zur massenspektrometrischen Leckdetektion mit dreistufiger Turbomolekularpumpe und Boosterpumpe |
DE102020134370A1 (de) | 2020-12-21 | 2022-06-23 | Inficon Gmbh | Gaslecksuchvorrichtung und Gaslecksuchverfahren zur Erkennung eines Gaslecks in einem Prüfling |
DE102021119256A1 (de) | 2021-07-26 | 2023-01-26 | Inficon Gmbh | Leckdetektoren |
CN114411110B (zh) * | 2022-01-24 | 2023-04-14 | 苏州中科科仪技术发展有限公司 | 镀膜设备和镀膜设备的控制方法 |
DE102022115562A1 (de) * | 2022-06-22 | 2023-12-28 | Inficon Gmbh | Verfahren zur Messung der Umgebungskonzentration eines leichten Gases mit einer massenspektrometrischen Gegenstrom-Lecksuchvorrichtung |
CN117928845A (zh) * | 2023-12-12 | 2024-04-26 | 北京中科科仪股份有限公司 | 一种适于高效除氦的氦质谱检漏仪及其检漏方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
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DE1648648C3 (de) * | 1967-04-12 | 1980-01-24 | Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar | Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip |
DE2430314C3 (de) * | 1974-06-24 | 1982-11-25 | Siemens AG, 1000 Berlin und 8000 München | Flüssigkeitsring-Vakuumpumpe mit vorgeschaltetem Verdichter |
US4505647A (en) * | 1978-01-26 | 1985-03-19 | Grumman Allied Industries, Inc. | Vacuum pumping system |
DE3775213D1 (de) * | 1987-03-27 | 1992-01-23 | Leybold Ag | Lecksuchgeraet und betriebsverfahren dazu. |
DE3865012D1 (de) * | 1988-06-01 | 1991-10-24 | Leybold Ag | Pumpsystem fuer ein lecksuchgeraet. |
DE4140366A1 (de) * | 1991-12-07 | 1993-06-09 | Leybold Ag, 6450 Hanau, De | Lecksucher fuer vakuumanlagen sowie verfahren zur durchfuehrung der lecksuche an vakuumanlagen |
DE4228313A1 (de) * | 1992-08-26 | 1994-03-03 | Leybold Ag | Gegenstrom-Lecksucher mit Hochvakuumpumpe |
DE19504278A1 (de) * | 1995-02-09 | 1996-08-14 | Leybold Ag | Testgas-Lecksuchgerät |
DE19522466A1 (de) * | 1995-06-21 | 1997-01-02 | Leybold Ag | Lecksuchgerät mit Vorvakuumpumpe |
US5703281A (en) * | 1996-05-08 | 1997-12-30 | Southeastern Univ. Research Assn. | Ultra high vacuum pumping system and high sensitivity helium leak detector |
DE19638506A1 (de) * | 1996-09-20 | 1998-03-26 | Leybold Vakuum Gmbh | Verfahren zur Untersuchung einer Mehrzahl ähnlicher Prüflinge auf Lecks sowie für die Durchführung dieses Verfahrens geeigneter Lecksucher |
US5944049A (en) * | 1997-07-15 | 1999-08-31 | Applied Materials, Inc. | Apparatus and method for regulating a pressure in a chamber |
DE19735250A1 (de) * | 1997-08-14 | 1999-02-18 | Leybold Vakuum Gmbh | Verfahren zum Betrieb eines Heliumlecksuchers und für die Durchführung dieses Verfahrens geeigneter Heliumlecksucher |
-
2003
- 2003-05-02 DE DE10319633A patent/DE10319633A1/de not_active Withdrawn
-
2004
- 2004-04-08 DE DE502004003887T patent/DE502004003887D1/de not_active Expired - Lifetime
- 2004-04-08 CN CNB2004800106301A patent/CN100533091C/zh not_active Expired - Lifetime
- 2004-04-08 WO PCT/EP2004/003789 patent/WO2004097363A2/de active IP Right Grant
- 2004-04-08 EP EP04726475A patent/EP1620706B1/de not_active Expired - Lifetime
- 2004-04-08 JP JP2006505077A patent/JP4357528B2/ja not_active Expired - Fee Related
- 2004-04-08 US US10/553,457 patent/US7717681B2/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20190019070A (ko) * | 2016-06-15 | 2019-02-26 | 인피콘 게엠베하 | 공통 샤프트 상에 터보분자 펌프와 부스터 펌프가 구비된 질량 분석 누출 검출기 |
JP2019523882A (ja) * | 2016-06-15 | 2019-08-29 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツングInficon GmbH | 共通のシャフト上にターボ分子ポンプおよびブースターポンプを有する質量分析式漏洩検出器 |
KR102430735B1 (ko) | 2016-06-15 | 2022-08-08 | 인피콘 게엠베하 | 공통 샤프트 상에 터보분자 펌프와 부스터 펌프가 구비된 질량 분석 누출 검출기 |
Also Published As
Publication number | Publication date |
---|---|
US20060280615A1 (en) | 2006-12-14 |
WO2004097363A2 (de) | 2004-11-11 |
CN100533091C (zh) | 2009-08-26 |
DE10319633A1 (de) | 2004-11-18 |
DE502004003887D1 (de) | 2007-07-05 |
CN1777797A (zh) | 2006-05-24 |
EP1620706A2 (de) | 2006-02-01 |
WO2004097363A3 (de) | 2005-05-19 |
JP4357528B2 (ja) | 2009-11-04 |
EP1620706B1 (de) | 2007-05-23 |
US7717681B2 (en) | 2010-05-18 |
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