JP2024523207A - 漏れ検知装置 - Google Patents

漏れ検知装置 Download PDF

Info

Publication number
JP2024523207A
JP2024523207A JP2023575566A JP2023575566A JP2024523207A JP 2024523207 A JP2024523207 A JP 2024523207A JP 2023575566 A JP2023575566 A JP 2023575566A JP 2023575566 A JP2023575566 A JP 2023575566A JP 2024523207 A JP2024523207 A JP 2024523207A
Authority
JP
Japan
Prior art keywords
inlet
gas
leak detection
vacuum pump
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023575566A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024523207A5 (https=
Inventor
ヴェツィヒ・ダニエル
ライスマン・マクシミリアン
プシャラ－ケーニッヒ・ヨッヘン
グレンツ・ヨーゼフ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of JP2024523207A publication Critical patent/JP2024523207A/ja
Publication of JP2024523207A5 publication Critical patent/JP2024523207A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/207—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material calibration arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
JP2023575566A 2021-06-15 2022-05-24 漏れ検知装置 Pending JP2024523207A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021115463.4 2021-06-15
DE102021115463.4A DE102021115463A1 (de) 2021-06-15 2021-06-15 Leckdetektionsvorrichtung
PCT/EP2022/064017 WO2022263121A1 (de) 2021-06-15 2022-05-24 Leckdetektionsvorrichtung

Publications (2)

Publication Number Publication Date
JP2024523207A true JP2024523207A (ja) 2024-06-28
JP2024523207A5 JP2024523207A5 (https=) 2025-02-04

Family

ID=82021080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023575566A Pending JP2024523207A (ja) 2021-06-15 2022-05-24 漏れ検知装置

Country Status (9)

Country Link
US (1) US20240361201A1 (https=)
EP (1) EP4356091B1 (https=)
JP (1) JP2024523207A (https=)
CN (1) CN117413165A (https=)
BR (1) BR112023025094A2 (https=)
CA (1) CA3220515A1 (https=)
DE (1) DE102021115463A1 (https=)
MX (1) MX2023013907A (https=)
WO (1) WO2022263121A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021125707A1 (de) * 2021-10-04 2023-04-06 Inficon Gmbh Lecksuche bei viskoser Strömung
DE102023129743A1 (de) * 2023-10-27 2025-04-30 Inficon Gmbh Vorrichtung und Verfahren zur massenspektrometrischen Hochvakuumlecksuche

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56149913U (https=) * 1980-04-10 1981-11-11
JP2005121481A (ja) * 2003-10-16 2005-05-12 Denso Corp 気密漏れ検査方法及び装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2827537A1 (de) 1978-06-23 1980-01-10 Leybold Heraeus Gmbh & Co Kg Betriebsverfahren fuer eine einrichtung zur lecksuche, gasanalyse o.dgl. und dazu geeignete einrichtung
DE3775213D1 (de) * 1987-03-27 1992-01-23 Leybold Ag Lecksuchgeraet und betriebsverfahren dazu.
JPH01195348A (ja) 1988-01-29 1989-08-07 Shimadzu Corp 赤外線式ガス分析計
DE19853049C2 (de) * 1998-11-17 2001-09-06 Joachim Franzke Vorrichtung und Verfahren zum Feststellen eines Lecks sowie Verwendung einer solchen Vorrichtung für die Lecksuche
DE10062126A1 (de) * 2000-12-13 2002-06-20 Inficon Gmbh Verfahren zur Feststellung eines Gases mit Hilfe eines Infrarot-Gasanlaysators sowie für die Durchführung dieser Verfahren geigneter Gasanalysator
DE102004059485A1 (de) 2004-12-10 2006-06-22 Inficon Gmbh Lecksuchgerät
DE102005043494A1 (de) 2005-09-13 2007-03-15 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102006047856A1 (de) 2006-10-10 2008-04-17 Inficon Gmbh Schnüffellecksucher
DE102008008262A1 (de) * 2008-02-08 2009-08-13 Inficon Gmbh Schnüffellecksucher nach dem Referenzmessprinzip
DE102010048982B4 (de) * 2010-09-03 2022-06-09 Inficon Gmbh Lecksuchgerät
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
CN205748829U (zh) * 2016-06-20 2016-11-30 中国兵器工业第二一三研究所 一种用于氦质谱检漏仪的泄漏率多路自动化测量装置
KR101930219B1 (ko) * 2018-08-06 2018-12-17 주식회사 제일그린시스 단일 펌프를 이용한 샘플링 및 클리닝 기능을 갖춘 가스 샘플링 장치

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56149913U (https=) * 1980-04-10 1981-11-11
JP2005121481A (ja) * 2003-10-16 2005-05-12 Denso Corp 気密漏れ検査方法及び装置

Also Published As

Publication number Publication date
EP4356091A1 (de) 2024-04-24
MX2023013907A (es) 2023-12-08
CA3220515A1 (en) 2022-12-22
BR112023025094A2 (pt) 2024-02-20
CN117413165A (zh) 2024-01-16
EP4356091B1 (de) 2025-03-05
WO2022263121A1 (de) 2022-12-22
US20240361201A1 (en) 2024-10-31
DE102021115463A1 (de) 2022-12-15

Similar Documents

Publication Publication Date Title
CN101517390B (zh) 嗅测检漏器
JP6018632B2 (ja) 漏れ検出装置及び漏れ検出装置を用いて気密性に関して物体を検査するための方法
JP6883036B2 (ja) 試験ガス入口における圧力測定
US5090258A (en) Multiple flow-dividing dilution tunnel system
JP5337802B2 (ja) 吸込み式漏れ検出器
JP2024523207A (ja) 漏れ検知装置
US7779675B2 (en) Leak indicator comprising a sniffer probe
CN105659067A (zh) 用于测量污染水平的多采样端口监测装置和使用该装置的监测方法
JP2016532122A (ja) 多段膜式ポンプを備えた嗅気型漏洩検出器
CN109716092B (zh) 用于测量内燃机废气的废气分析单元的气体输送单元
US12492960B2 (en) Vacuum leak detection system, gas control unit and method for gas leak detection
JP7822383B2 (ja) 試験体のガスリークを検出するガスリーク検知装置およびガスリーク検知方法
JPH11153508A (ja) 真空装置用ヘリウムリークディテクター装置
US20240310234A1 (en) Leak detectors
JP3390506B2 (ja) ガス漏れ検査装置
JP3675983B2 (ja) ヘリウムリークディテクター
JP2004340726A (ja) 漏洩検知装置
JP2001249065A (ja) 排出ガス希釈装置
JP2023552606A (ja) ３段式ターボ分子ポンプおよびブースターポンプを備えた質量分析計用漏洩検知装置
JPH11326108A (ja) ヘリウムリークディテクタ
TWI920350B (zh) 洩漏檢測裝置及洩漏檢測方法
CN119256215A (zh) 使用质谱逆流泄漏检测装置测量轻质气体的环境浓度的方法
JPH11211631A (ja) 排気ガス希釈サンプリング装置
JP2025519694A5 (https=)
JPH11230871A (ja) 排気ガス希釈サンプリング装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250124

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250124

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20260210

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260427