CA3220515A1 - Leakage detection device - Google Patents

Leakage detection device Download PDF

Info

Publication number
CA3220515A1
CA3220515A1 CA3220515A CA3220515A CA3220515A1 CA 3220515 A1 CA3220515 A1 CA 3220515A1 CA 3220515 A CA3220515 A CA 3220515A CA 3220515 A CA3220515 A CA 3220515A CA 3220515 A1 CA3220515 A1 CA 3220515A1
Authority
CA
Canada
Prior art keywords
gas
inlet
vacuum pump
outlet
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CA3220515A
Other languages
English (en)
French (fr)
Inventor
Daniel Wetzig
Maximilian REISMANN
Jochen Puchalla-Konig
Josef GRENZ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA3220515A1 publication Critical patent/CA3220515A1/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/207—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material calibration arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
CA3220515A 2021-06-15 2022-05-24 Leakage detection device Pending CA3220515A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021115463.4 2021-06-15
DE102021115463.4A DE102021115463A1 (de) 2021-06-15 2021-06-15 Leckdetektionsvorrichtung
PCT/EP2022/064017 WO2022263121A1 (de) 2021-06-15 2022-05-24 Leckdetektionsvorrichtung

Publications (1)

Publication Number Publication Date
CA3220515A1 true CA3220515A1 (en) 2022-12-22

Family

ID=82021080

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3220515A Pending CA3220515A1 (en) 2021-06-15 2022-05-24 Leakage detection device

Country Status (9)

Country Link
US (1) US20240361201A1 (https=)
EP (1) EP4356091B1 (https=)
JP (1) JP2024523207A (https=)
CN (1) CN117413165A (https=)
BR (1) BR112023025094A2 (https=)
CA (1) CA3220515A1 (https=)
DE (1) DE102021115463A1 (https=)
MX (1) MX2023013907A (https=)
WO (1) WO2022263121A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021125707A1 (de) * 2021-10-04 2023-04-06 Inficon Gmbh Lecksuche bei viskoser Strömung
DE102023129743A1 (de) * 2023-10-27 2025-04-30 Inficon Gmbh Vorrichtung und Verfahren zur massenspektrometrischen Hochvakuumlecksuche

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2827537A1 (de) 1978-06-23 1980-01-10 Leybold Heraeus Gmbh & Co Kg Betriebsverfahren fuer eine einrichtung zur lecksuche, gasanalyse o.dgl. und dazu geeignete einrichtung
JPS56149913U (https=) * 1980-04-10 1981-11-11
DE3775213D1 (de) * 1987-03-27 1992-01-23 Leybold Ag Lecksuchgeraet und betriebsverfahren dazu.
JPH01195348A (ja) 1988-01-29 1989-08-07 Shimadzu Corp 赤外線式ガス分析計
DE19853049C2 (de) * 1998-11-17 2001-09-06 Joachim Franzke Vorrichtung und Verfahren zum Feststellen eines Lecks sowie Verwendung einer solchen Vorrichtung für die Lecksuche
DE10062126A1 (de) * 2000-12-13 2002-06-20 Inficon Gmbh Verfahren zur Feststellung eines Gases mit Hilfe eines Infrarot-Gasanlaysators sowie für die Durchführung dieser Verfahren geigneter Gasanalysator
JP4026579B2 (ja) * 2003-10-16 2007-12-26 株式会社デンソー 気密漏れ検査方法及び装置
DE102004059485A1 (de) 2004-12-10 2006-06-22 Inficon Gmbh Lecksuchgerät
DE102005043494A1 (de) 2005-09-13 2007-03-15 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102006047856A1 (de) 2006-10-10 2008-04-17 Inficon Gmbh Schnüffellecksucher
DE102008008262A1 (de) * 2008-02-08 2009-08-13 Inficon Gmbh Schnüffellecksucher nach dem Referenzmessprinzip
DE102010048982B4 (de) * 2010-09-03 2022-06-09 Inficon Gmbh Lecksuchgerät
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
CN205748829U (zh) * 2016-06-20 2016-11-30 中国兵器工业第二一三研究所 一种用于氦质谱检漏仪的泄漏率多路自动化测量装置
KR101930219B1 (ko) * 2018-08-06 2018-12-17 주식회사 제일그린시스 단일 펌프를 이용한 샘플링 및 클리닝 기능을 갖춘 가스 샘플링 장치

Also Published As

Publication number Publication date
EP4356091A1 (de) 2024-04-24
MX2023013907A (es) 2023-12-08
BR112023025094A2 (pt) 2024-02-20
JP2024523207A (ja) 2024-06-28
CN117413165A (zh) 2024-01-16
EP4356091B1 (de) 2025-03-05
WO2022263121A1 (de) 2022-12-22
US20240361201A1 (en) 2024-10-31
DE102021115463A1 (de) 2022-12-15

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