CN117413165A - 泄漏检测器 - Google Patents

泄漏检测器 Download PDF

Info

Publication number
CN117413165A
CN117413165A CN202280038927.7A CN202280038927A CN117413165A CN 117413165 A CN117413165 A CN 117413165A CN 202280038927 A CN202280038927 A CN 202280038927A CN 117413165 A CN117413165 A CN 117413165A
Authority
CN
China
Prior art keywords
gas
inlet
vacuum pump
outlet
leak detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280038927.7A
Other languages
English (en)
Chinese (zh)
Inventor
丹尼尔·维茨格
马克西米利安·赖斯曼
约亨·普哈拉-柯尼格
约瑟夫·格伦茨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Publication of CN117413165A publication Critical patent/CN117413165A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/207—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material calibration arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
CN202280038927.7A 2021-06-15 2022-05-24 泄漏检测器 Pending CN117413165A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102021115463.4 2021-06-15
DE102021115463.4A DE102021115463A1 (de) 2021-06-15 2021-06-15 Leckdetektionsvorrichtung
PCT/EP2022/064017 WO2022263121A1 (de) 2021-06-15 2022-05-24 Leckdetektionsvorrichtung

Publications (1)

Publication Number Publication Date
CN117413165A true CN117413165A (zh) 2024-01-16

Family

ID=82021080

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280038927.7A Pending CN117413165A (zh) 2021-06-15 2022-05-24 泄漏检测器

Country Status (9)

Country Link
US (1) US20240361201A1 (https=)
EP (1) EP4356091B1 (https=)
JP (1) JP2024523207A (https=)
CN (1) CN117413165A (https=)
BR (1) BR112023025094A2 (https=)
CA (1) CA3220515A1 (https=)
DE (1) DE102021115463A1 (https=)
MX (1) MX2023013907A (https=)
WO (1) WO2022263121A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021125707A1 (de) * 2021-10-04 2023-04-06 Inficon Gmbh Lecksuche bei viskoser Strömung
DE102023129743A1 (de) * 2023-10-27 2025-04-30 Inficon Gmbh Vorrichtung und Verfahren zur massenspektrometrischen Hochvakuumlecksuche

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN87105703A (zh) * 1987-03-27 1988-10-19 莱博尔德有限公司 泄漏检测器以及其工作方法
US20040051043A1 (en) * 2000-12-13 2004-03-18 Ralf Kilian Method for detecting a gas using an infrared gas analyser and gas analyser suitable for carrying out said method
JP2005121481A (ja) * 2003-10-16 2005-05-12 Denso Corp 気密漏れ検査方法及び装置
CN101939628A (zh) * 2008-02-08 2011-01-05 因菲康有限公司 根据参考测量原理的嗅吸检漏器
CN105556272A (zh) * 2013-09-16 2016-05-04 英福康有限责任公司 具有多级隔膜泵的嗅探泄漏探测器
KR101930219B1 (ko) * 2018-08-06 2018-12-17 주식회사 제일그린시스 단일 펌프를 이용한 샘플링 및 클리닝 기능을 갖춘 가스 샘플링 장치

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2827537A1 (de) 1978-06-23 1980-01-10 Leybold Heraeus Gmbh & Co Kg Betriebsverfahren fuer eine einrichtung zur lecksuche, gasanalyse o.dgl. und dazu geeignete einrichtung
JPS56149913U (https=) * 1980-04-10 1981-11-11
JPH01195348A (ja) 1988-01-29 1989-08-07 Shimadzu Corp 赤外線式ガス分析計
DE19853049C2 (de) * 1998-11-17 2001-09-06 Joachim Franzke Vorrichtung und Verfahren zum Feststellen eines Lecks sowie Verwendung einer solchen Vorrichtung für die Lecksuche
DE102004059485A1 (de) 2004-12-10 2006-06-22 Inficon Gmbh Lecksuchgerät
DE102005043494A1 (de) 2005-09-13 2007-03-15 Inficon Gmbh Lecksuchgerät mit Schnüffelsonde
DE102006047856A1 (de) 2006-10-10 2008-04-17 Inficon Gmbh Schnüffellecksucher
DE102010048982B4 (de) * 2010-09-03 2022-06-09 Inficon Gmbh Lecksuchgerät
CN205748829U (zh) * 2016-06-20 2016-11-30 中国兵器工业第二一三研究所 一种用于氦质谱检漏仪的泄漏率多路自动化测量装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN87105703A (zh) * 1987-03-27 1988-10-19 莱博尔德有限公司 泄漏检测器以及其工作方法
US20040051043A1 (en) * 2000-12-13 2004-03-18 Ralf Kilian Method for detecting a gas using an infrared gas analyser and gas analyser suitable for carrying out said method
JP2005121481A (ja) * 2003-10-16 2005-05-12 Denso Corp 気密漏れ検査方法及び装置
CN101939628A (zh) * 2008-02-08 2011-01-05 因菲康有限公司 根据参考测量原理的嗅吸检漏器
CN105556272A (zh) * 2013-09-16 2016-05-04 英福康有限责任公司 具有多级隔膜泵的嗅探泄漏探测器
KR101930219B1 (ko) * 2018-08-06 2018-12-17 주식회사 제일그린시스 단일 펌프를 이용한 샘플링 및 클리닝 기능을 갖춘 가스 샘플링 장치

Also Published As

Publication number Publication date
EP4356091A1 (de) 2024-04-24
MX2023013907A (es) 2023-12-08
CA3220515A1 (en) 2022-12-22
BR112023025094A2 (pt) 2024-02-20
JP2024523207A (ja) 2024-06-28
EP4356091B1 (de) 2025-03-05
WO2022263121A1 (de) 2022-12-22
US20240361201A1 (en) 2024-10-31
DE102021115463A1 (de) 2022-12-15

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