JPWO2023188410A5 - - Google Patents

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Publication number
JPWO2023188410A5
JPWO2023188410A5 JP2024511142A JP2024511142A JPWO2023188410A5 JP WO2023188410 A5 JPWO2023188410 A5 JP WO2023188410A5 JP 2024511142 A JP2024511142 A JP 2024511142A JP 2024511142 A JP2024511142 A JP 2024511142A JP WO2023188410 A5 JPWO2023188410 A5 JP WO2023188410A5
Authority
JP
Japan
Prior art keywords
vacuum chamber
vacuum
plug hole
plug
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024511142A
Other languages
English (en)
Japanese (ja)
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JPWO2023188410A1 (https=
JP7693099B2 (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/016938 external-priority patent/WO2023188410A1/ja
Publication of JPWO2023188410A1 publication Critical patent/JPWO2023188410A1/ja
Publication of JPWO2023188410A5 publication Critical patent/JPWO2023188410A5/ja
Application granted granted Critical
Publication of JP7693099B2 publication Critical patent/JP7693099B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2024511142A 2022-03-31 2022-03-31 分析装置 Active JP7693099B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/016938 WO2023188410A1 (ja) 2022-03-31 2022-03-31 分析装置

Publications (3)

Publication Number Publication Date
JPWO2023188410A1 JPWO2023188410A1 (https=) 2023-10-05
JPWO2023188410A5 true JPWO2023188410A5 (https=) 2024-12-24
JP7693099B2 JP7693099B2 (ja) 2025-06-16

Family

ID=88200489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024511142A Active JP7693099B2 (ja) 2022-03-31 2022-03-31 分析装置

Country Status (5)

Country Link
US (1) US20250226197A1 (https=)
EP (1) EP4503089A4 (https=)
JP (1) JP7693099B2 (https=)
CN (1) CN118922911A (https=)
WO (1) WO2023188410A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1497436A (en) * 1975-03-11 1978-01-12 Pye Ltd Apparatus for the detection of volatile organic substance
JPS60113551U (ja) * 1983-12-30 1985-08-01 株式会社島津製作所 ガラス製ジエツト型分子セパレ−タ
JPH0668843A (ja) * 1992-08-21 1994-03-11 Hitachi Ltd 大気圧イオン化質量分析計
JPH09210965A (ja) * 1996-01-31 1997-08-15 Shimadzu Corp 液体クロマトグラフ質量分析装置
US7743790B2 (en) * 2008-02-20 2010-06-29 Varian, Inc. Shutter and gate valve assemblies for vacuum systems
EP3324422B1 (en) * 2015-07-13 2019-08-07 Shimadzu Corporation Shutter
GB2590351B (en) * 2019-11-08 2024-01-03 Thermo Fisher Scient Bremen Gmbh Atmospheric pressure ion source interface

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