JPWO2023188410A1 - - Google Patents

Info

Publication number
JPWO2023188410A1
JPWO2023188410A1 JP2024511142A JP2024511142A JPWO2023188410A1 JP WO2023188410 A1 JPWO2023188410 A1 JP WO2023188410A1 JP 2024511142 A JP2024511142 A JP 2024511142A JP 2024511142 A JP2024511142 A JP 2024511142A JP WO2023188410 A1 JPWO2023188410 A1 JP WO2023188410A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2024511142A
Other languages
Japanese (ja)
Other versions
JP7693099B2 (ja
JPWO2023188410A5 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2023188410A1 publication Critical patent/JPWO2023188410A1/ja
Publication of JPWO2023188410A5 publication Critical patent/JPWO2023188410A5/ja
Application granted granted Critical
Publication of JP7693099B2 publication Critical patent/JP7693099B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/165—Electrospray ionisation
    • H01J49/167—Capillaries and nozzles specially adapted therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/188—Differential pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0404—Capillaries used for transferring samples or ions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2024511142A 2022-03-31 2022-03-31 分析装置 Active JP7693099B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/016938 WO2023188410A1 (ja) 2022-03-31 2022-03-31 分析装置

Publications (3)

Publication Number Publication Date
JPWO2023188410A1 true JPWO2023188410A1 (https=) 2023-10-05
JPWO2023188410A5 JPWO2023188410A5 (https=) 2024-12-24
JP7693099B2 JP7693099B2 (ja) 2025-06-16

Family

ID=88200489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024511142A Active JP7693099B2 (ja) 2022-03-31 2022-03-31 分析装置

Country Status (5)

Country Link
US (1) US20250226197A1 (https=)
EP (1) EP4503089A4 (https=)
JP (1) JP7693099B2 (https=)
CN (1) CN118922911A (https=)
WO (1) WO2023188410A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113787A (en) * 1975-03-11 1976-10-07 Pye Ltd Detector for volatile organic substances
JPS60113551U (ja) * 1983-12-30 1985-08-01 株式会社島津製作所 ガラス製ジエツト型分子セパレ−タ
JPH09210965A (ja) * 1996-01-31 1997-08-15 Shimadzu Corp 液体クロマトグラフ質量分析装置
JP2011512639A (ja) * 2008-02-20 2011-04-21 バリアン・インコーポレイテッド 真空システム用のシャッタおよびゲートバルブアセンブリ
WO2017010163A1 (ja) * 2015-07-13 2017-01-19 株式会社島津製作所 シャッター

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0668843A (ja) * 1992-08-21 1994-03-11 Hitachi Ltd 大気圧イオン化質量分析計
GB2590351B (en) * 2019-11-08 2024-01-03 Thermo Fisher Scient Bremen Gmbh Atmospheric pressure ion source interface

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51113787A (en) * 1975-03-11 1976-10-07 Pye Ltd Detector for volatile organic substances
JPS60113551U (ja) * 1983-12-30 1985-08-01 株式会社島津製作所 ガラス製ジエツト型分子セパレ−タ
JPH09210965A (ja) * 1996-01-31 1997-08-15 Shimadzu Corp 液体クロマトグラフ質量分析装置
JP2011512639A (ja) * 2008-02-20 2011-04-21 バリアン・インコーポレイテッド 真空システム用のシャッタおよびゲートバルブアセンブリ
WO2017010163A1 (ja) * 2015-07-13 2017-01-19 株式会社島津製作所 シャッター

Also Published As

Publication number Publication date
WO2023188410A1 (ja) 2023-10-05
JP7693099B2 (ja) 2025-06-16
CN118922911A (zh) 2024-11-08
US20250226197A1 (en) 2025-07-10
EP4503089A4 (en) 2026-01-28
EP4503089A1 (en) 2025-02-05

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