JP7693099B2 - 分析装置 - Google Patents

分析装置 Download PDF

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Publication number
JP7693099B2
JP7693099B2 JP2024511142A JP2024511142A JP7693099B2 JP 7693099 B2 JP7693099 B2 JP 7693099B2 JP 2024511142 A JP2024511142 A JP 2024511142A JP 2024511142 A JP2024511142 A JP 2024511142A JP 7693099 B2 JP7693099 B2 JP 7693099B2
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JP
Japan
Prior art keywords
vacuum
hole
plug
sealing plug
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024511142A
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English (en)
Japanese (ja)
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JPWO2023188410A1 (https=
JPWO2023188410A5 (https=
Inventor
浩二 石黒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Publication of JPWO2023188410A1 publication Critical patent/JPWO2023188410A1/ja
Publication of JPWO2023188410A5 publication Critical patent/JPWO2023188410A5/ja
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Publication of JP7693099B2 publication Critical patent/JP7693099B2/ja
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/165—Electrospray ionisation
    • H01J49/167—Capillaries and nozzles specially adapted therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/188—Differential pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0404—Capillaries used for transferring samples or ions

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
JP2024511142A 2022-03-31 2022-03-31 分析装置 Active JP7693099B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/016938 WO2023188410A1 (ja) 2022-03-31 2022-03-31 分析装置

Publications (3)

Publication Number Publication Date
JPWO2023188410A1 JPWO2023188410A1 (https=) 2023-10-05
JPWO2023188410A5 JPWO2023188410A5 (https=) 2024-12-24
JP7693099B2 true JP7693099B2 (ja) 2025-06-16

Family

ID=88200489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024511142A Active JP7693099B2 (ja) 2022-03-31 2022-03-31 分析装置

Country Status (5)

Country Link
US (1) US20250226197A1 (https=)
EP (1) EP4503089A4 (https=)
JP (1) JP7693099B2 (https=)
CN (1) CN118922911A (https=)
WO (1) WO2023188410A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011512639A (ja) 2008-02-20 2011-04-21 バリアン・インコーポレイテッド 真空システム用のシャッタおよびゲートバルブアセンブリ
WO2017010163A1 (ja) 2015-07-13 2017-01-19 株式会社島津製作所 シャッター

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1497436A (en) * 1975-03-11 1978-01-12 Pye Ltd Apparatus for the detection of volatile organic substance
JPS60113551U (ja) * 1983-12-30 1985-08-01 株式会社島津製作所 ガラス製ジエツト型分子セパレ−タ
JPH0668843A (ja) * 1992-08-21 1994-03-11 Hitachi Ltd 大気圧イオン化質量分析計
JPH09210965A (ja) * 1996-01-31 1997-08-15 Shimadzu Corp 液体クロマトグラフ質量分析装置
GB2590351B (en) * 2019-11-08 2024-01-03 Thermo Fisher Scient Bremen Gmbh Atmospheric pressure ion source interface

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011512639A (ja) 2008-02-20 2011-04-21 バリアン・インコーポレイテッド 真空システム用のシャッタおよびゲートバルブアセンブリ
WO2017010163A1 (ja) 2015-07-13 2017-01-19 株式会社島津製作所 シャッター

Also Published As

Publication number Publication date
WO2023188410A1 (ja) 2023-10-05
JPWO2023188410A1 (https=) 2023-10-05
CN118922911A (zh) 2024-11-08
US20250226197A1 (en) 2025-07-10
EP4503089A4 (en) 2026-01-28
EP4503089A1 (en) 2025-02-05

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