CN118922911A - 分析装置 - Google Patents

分析装置 Download PDF

Info

Publication number
CN118922911A
CN118922911A CN202280093727.1A CN202280093727A CN118922911A CN 118922911 A CN118922911 A CN 118922911A CN 202280093727 A CN202280093727 A CN 202280093727A CN 118922911 A CN118922911 A CN 118922911A
Authority
CN
China
Prior art keywords
vacuum
hole
plug
analysis device
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280093727.1A
Other languages
English (en)
Chinese (zh)
Inventor
石黑浩二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Publication of CN118922911A publication Critical patent/CN118922911A/zh
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/165—Electrospray ionisation
    • H01J49/167—Capillaries and nozzles specially adapted therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/18—Vacuum control means
    • H01J2237/188—Differential pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0404—Capillaries used for transferring samples or ions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CN202280093727.1A 2022-03-31 2022-03-31 分析装置 Pending CN118922911A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/016938 WO2023188410A1 (ja) 2022-03-31 2022-03-31 分析装置

Publications (1)

Publication Number Publication Date
CN118922911A true CN118922911A (zh) 2024-11-08

Family

ID=88200489

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280093727.1A Pending CN118922911A (zh) 2022-03-31 2022-03-31 分析装置

Country Status (5)

Country Link
US (1) US20250226197A1 (https=)
EP (1) EP4503089A4 (https=)
JP (1) JP7693099B2 (https=)
CN (1) CN118922911A (https=)
WO (1) WO2023188410A1 (https=)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1497436A (en) * 1975-03-11 1978-01-12 Pye Ltd Apparatus for the detection of volatile organic substance
JPS60113551U (ja) * 1983-12-30 1985-08-01 株式会社島津製作所 ガラス製ジエツト型分子セパレ−タ
JPH0668843A (ja) * 1992-08-21 1994-03-11 Hitachi Ltd 大気圧イオン化質量分析計
JPH09210965A (ja) * 1996-01-31 1997-08-15 Shimadzu Corp 液体クロマトグラフ質量分析装置
US7743790B2 (en) * 2008-02-20 2010-06-29 Varian, Inc. Shutter and gate valve assemblies for vacuum systems
EP3324422B1 (en) * 2015-07-13 2019-08-07 Shimadzu Corporation Shutter
GB2590351B (en) * 2019-11-08 2024-01-03 Thermo Fisher Scient Bremen Gmbh Atmospheric pressure ion source interface

Also Published As

Publication number Publication date
WO2023188410A1 (ja) 2023-10-05
JPWO2023188410A1 (https=) 2023-10-05
JP7693099B2 (ja) 2025-06-16
US20250226197A1 (en) 2025-07-10
EP4503089A4 (en) 2026-01-28
EP4503089A1 (en) 2025-02-05

Similar Documents

Publication Publication Date Title
US7615765B2 (en) Charged particle beam apparatus
EP2312609B1 (en) Method and apparatus of pretreatment of an electron gun chamber
US8669518B2 (en) Mass spectrometer
EP3291281B1 (en) Method for transferring ions
JP5056597B2 (ja) 大気圧イオン化質量分析装置
JP2001273869A (ja) 質量分析装置
CN113906538A (zh) 离子化设备和质谱仪
JP6382166B2 (ja) 大気圧イオン化方法
US9666404B2 (en) Charged particle source arrangement for a charged particle beam device, charged particle beam device for sample inspection, and method for providing a primary charged particle beam for sample inspection in a charged particle beam
US7230234B2 (en) Orthogonal acceleration time-of-flight mass spectrometer
CN118922911A (zh) 分析装置
CN114026671B (zh) 质量分析装置
US20170347443A1 (en) Ion Throughput Pump and Method
JP4172561B2 (ja) ガス分析装置
US20240145225A1 (en) Mass spectrometer
US12173712B2 (en) Vacuum pumping system having a plurality of positive displacement vacuum pumps and method for operating the same
WO2007102204A1 (ja) 質量分析装置
CN113748488B (zh) 离子分析装置
JP4571003B2 (ja) クラスターイオンビーム装置
JP7780410B2 (ja) イオン源、質量分析計、及び、イオン源製造方法
JPH11162397A (ja) イオンビーム照射装置
RU2298247C1 (ru) Электрическая развязка газового тракта катода плазменного ускорителя
CN121075897A (zh) 离子透镜组件、离子源、质谱仪以及质谱系统
JP2001304174A (ja) ターボ分子ポンプ
CN114823274A (zh) 防金属气体中毒的离子泵

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination