JP2024509519A5 - - Google Patents

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Publication number
JP2024509519A5
JP2024509519A5 JP2023551144A JP2023551144A JP2024509519A5 JP 2024509519 A5 JP2024509519 A5 JP 2024509519A5 JP 2023551144 A JP2023551144 A JP 2023551144A JP 2023551144 A JP2023551144 A JP 2023551144A JP 2024509519 A5 JP2024509519 A5 JP 2024509519A5
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JP
Japan
Prior art keywords
end effector
rotation
axis
rotation axis
forearm
Prior art date
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Application number
JP2023551144A
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English (en)
Japanese (ja)
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JP7682288B2 (ja
JP2024509519A (ja
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Priority claimed from US17/188,374 external-priority patent/US11358809B1/en
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Publication of JP2024509519A publication Critical patent/JP2024509519A/ja
Publication of JP2024509519A5 publication Critical patent/JP2024509519A5/ja
Application granted granted Critical
Publication of JP7682288B2 publication Critical patent/JP7682288B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023551144A 2021-03-01 2022-02-11 可変ピッチアクセス用真空ロボット装置 Active JP7682288B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17/188,374 2021-03-01
US17/188,374 US11358809B1 (en) 2021-03-01 2021-03-01 Vacuum robot apparatus for variable pitch access
PCT/US2022/016209 WO2022186968A1 (en) 2021-03-01 2022-02-11 Vacuum robot apparatus for variable pitch access

Publications (3)

Publication Number Publication Date
JP2024509519A JP2024509519A (ja) 2024-03-04
JP2024509519A5 true JP2024509519A5 (enExample) 2024-04-19
JP7682288B2 JP7682288B2 (ja) 2025-05-23

Family

ID=81944143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023551144A Active JP7682288B2 (ja) 2021-03-01 2022-02-11 可変ピッチアクセス用真空ロボット装置

Country Status (6)

Country Link
US (2) US11358809B1 (enExample)
JP (1) JP7682288B2 (enExample)
KR (1) KR102834294B1 (enExample)
CN (1) CN116940445A (enExample)
TW (1) TWI861471B (enExample)
WO (1) WO2022186968A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102833850B1 (ko) * 2020-03-24 2025-07-14 주식회사 원익아이피에스 이송로봇 및 이를 포함하는 기판처리시스템
US11358809B1 (en) * 2021-03-01 2022-06-14 Applied Materials, Inc. Vacuum robot apparatus for variable pitch access
US12226896B2 (en) 2021-10-22 2025-02-18 Applied Materials, Inc. Operations of robot apparatuses within rectangular mainframes
CN115632023B (zh) * 2022-12-22 2023-08-04 河北博特半导体设备科技有限公司 一种双臂晶圆传输装置

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JP2002184834A (ja) * 2000-12-15 2002-06-28 Yaskawa Electric Corp 基板搬送用ロボット
AU2002327249A1 (en) * 2001-07-13 2003-01-29 Brooks Automation, Inc. Substrate transport apparatus with multiple independent end effectors
US7578649B2 (en) * 2002-05-29 2009-08-25 Brooks Automation, Inc. Dual arm substrate transport apparatus
KR20080004118A (ko) * 2006-07-04 2008-01-09 피에스케이 주식회사 기판 처리 설비
JP2008135630A (ja) * 2006-11-29 2008-06-12 Jel:Kk 基板搬送装置
JP4979530B2 (ja) * 2007-09-28 2012-07-18 日本電産サンキョー株式会社 産業用ロボット
JP5610952B2 (ja) * 2010-09-24 2014-10-22 日本電産サンキョー株式会社 産業用ロボット
CN201913647U (zh) * 2010-12-21 2011-08-03 沈阳新松机器人自动化股份有限公司 机器人手臂机构
KR102359364B1 (ko) * 2012-02-10 2022-02-07 브룩스 오토메이션 인코퍼레이티드 기판 프로세싱 장치
CN104380452B (zh) * 2012-04-12 2016-10-19 应用材料公司 具有独立能旋转机身中段的机械手系统、设备及方法
US10427303B2 (en) * 2013-03-15 2019-10-01 Applied Materials, Inc. Substrate deposition systems, robot transfer apparatus, and methods for electronic device manufacturing
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JP6594304B2 (ja) * 2013-10-18 2019-10-23 ブルックス オートメーション インコーポレイテッド 処理装置
US20160332301A1 (en) * 2015-05-13 2016-11-17 Boris Kesil Method of handling and transporting flat objects between a plurality of flat object pocessing units at robotic station
KR102587203B1 (ko) * 2015-07-13 2023-10-10 브룩스 오토메이션 인코퍼레이티드 온 더 플라이 자동 웨이퍼 센터링 방법 및 장치
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JP7183635B2 (ja) * 2018-08-31 2022-12-06 東京エレクトロン株式会社 基板搬送機構、基板処理装置及び基板搬送方法
JP7225613B2 (ja) * 2018-09-03 2023-02-21 東京エレクトロン株式会社 基板搬送機構、基板処理装置及び基板搬送方法
US10636693B2 (en) * 2018-09-11 2020-04-28 Kawasaki Jukogyo Kabushiki Kaisha Substrate transfer device and control method therefor
US11883958B2 (en) 2019-06-07 2024-01-30 Applied Materials, Inc. Robot apparatus including dual end effectors with variable pitch and methods
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US11358809B1 (en) * 2021-03-01 2022-06-14 Applied Materials, Inc. Vacuum robot apparatus for variable pitch access

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