JP2017504492A5 - - Google Patents
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- Publication number
- JP2017504492A5 JP2017504492A5 JP2016546929A JP2016546929A JP2017504492A5 JP 2017504492 A5 JP2017504492 A5 JP 2017504492A5 JP 2016546929 A JP2016546929 A JP 2016546929A JP 2016546929 A JP2016546929 A JP 2016546929A JP 2017504492 A5 JP2017504492 A5 JP 2017504492A5
- Authority
- JP
- Japan
- Prior art keywords
- arm
- axis
- arms
- drive
- common
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005540 biological transmission Effects 0.000 claims description 25
- 239000012636 effector Substances 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 16
- 230000033001 locomotion Effects 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 2
- 230000009977 dual effect Effects 0.000 claims 9
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021063106A JP7280309B2 (ja) | 2014-01-17 | 2021-04-01 | 搬送装置および処理装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461928681P | 2014-01-17 | 2014-01-17 | |
| US61/928,681 | 2014-01-17 | ||
| PCT/US2015/011764 WO2015109189A1 (en) | 2014-01-17 | 2015-01-16 | Substrate transport apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021063106A Division JP7280309B2 (ja) | 2014-01-17 | 2021-04-01 | 搬送装置および処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017504492A JP2017504492A (ja) | 2017-02-09 |
| JP2017504492A5 true JP2017504492A5 (enExample) | 2018-02-22 |
| JP6863744B2 JP6863744B2 (ja) | 2021-04-21 |
Family
ID=53543480
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016546929A Active JP6863744B2 (ja) | 2014-01-17 | 2015-01-16 | 搬送装置および処理装置 |
| JP2021063106A Active JP7280309B2 (ja) | 2014-01-17 | 2021-04-01 | 搬送装置および処理装置 |
| JP2023078736A Pending JP2023100955A (ja) | 2014-01-17 | 2023-05-11 | 搬送装置および処理装置 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021063106A Active JP7280309B2 (ja) | 2014-01-17 | 2021-04-01 | 搬送装置および処理装置 |
| JP2023078736A Pending JP2023100955A (ja) | 2014-01-17 | 2023-05-11 | 搬送装置および処理装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US11273558B2 (enExample) |
| JP (3) | JP6863744B2 (enExample) |
| KR (3) | KR102381412B1 (enExample) |
| CN (2) | CN106103011A (enExample) |
| WO (1) | WO2015109189A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180308728A1 (en) * | 2017-02-07 | 2018-10-25 | Brooks Automation, Inc. | Method and apparatus for substrate transport |
| US11088004B2 (en) * | 2018-01-30 | 2021-08-10 | Brooks Automation, Inc. | Automatic wafer centering method and apparatus |
| TWI815869B (zh) | 2018-03-16 | 2023-09-21 | 美商布魯克斯自動機械美國公司 | 基板輸送裝置及用於基板輸送裝置之方法 |
| US11535460B2 (en) * | 2018-05-31 | 2022-12-27 | Brooks Automation Us, Llc | Substrate processing apparatus |
| US11545380B2 (en) * | 2018-11-01 | 2023-01-03 | Brooks Automation Us Llc | Transport apparatus with linear bearing |
| JP6522225B2 (ja) * | 2018-12-19 | 2019-05-29 | 日本たばこ産業株式会社 | 霧化ユニットの製造方法、非燃焼型香味吸引器、霧化ユニット及び霧化ユニットパッケージ |
| CN121011552A (zh) * | 2021-06-30 | 2025-11-25 | 北京屹唐半导体科技股份有限公司 | 传送装置和处理系统 |
| KR102638655B1 (ko) * | 2023-08-07 | 2024-02-20 | 에이피티씨 주식회사 | 멀티 층 efem을 포함하는 기판 이송 장치 |
Family Cites Families (36)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5135349A (en) * | 1990-05-17 | 1992-08-04 | Cybeq Systems, Inc. | Robotic handling system |
| JP2808826B2 (ja) * | 1990-05-25 | 1998-10-08 | 松下電器産業株式会社 | 基板の移し換え装置 |
| US5180276A (en) * | 1991-04-18 | 1993-01-19 | Brooks Automation, Inc. | Articulated arm transfer device |
| JP2659676B2 (ja) * | 1993-11-02 | 1997-09-30 | シーケーディ株式会社 | ウェハ把持装置 |
| JPH11188670A (ja) | 1997-12-26 | 1999-07-13 | Daihen Corp | 2アーム方式の搬送用ロボット装置 |
| JP3806272B2 (ja) * | 1999-09-13 | 2006-08-09 | 三菱重工業株式会社 | マルチチャンバ型真空処理システム及び基板搬送装置 |
| US7066707B1 (en) * | 2001-08-31 | 2006-06-27 | Asyst Technologies, Inc. | Wafer engine |
| CN1996552B (zh) * | 2001-08-31 | 2012-09-05 | 克罗辛自动化公司 | 晶片机 |
| US7891935B2 (en) * | 2002-05-09 | 2011-02-22 | Brooks Automation, Inc. | Dual arm robot |
| JP4291709B2 (ja) | 2003-04-16 | 2009-07-08 | 株式会社ダイヘン | 直線移動機構およびこれを用いた搬送ロボット |
| US7837425B2 (en) * | 2003-07-16 | 2010-11-23 | Tokyo Electron Limited | Transportation apparatus and drive mechanism |
| JP4319504B2 (ja) * | 2003-10-06 | 2009-08-26 | 東京エレクトロン株式会社 | 基板搬送装置および基板処理システム |
| US7797968B2 (en) | 2004-06-01 | 2010-09-21 | INVISTA North America S.à.r.l. | Method to make circular knit elastic fabric comprising spandex and hard yarns |
| JP2006240867A (ja) * | 2005-03-07 | 2006-09-14 | Hitachi Plant Technologies Ltd | 移載機におけるテレスコピックアームの旋回機構 |
| US8419341B2 (en) | 2006-09-19 | 2013-04-16 | Brooks Automation, Inc. | Linear vacuum robot with Z motion and articulated arm |
| JP2008246644A (ja) * | 2007-03-30 | 2008-10-16 | Daihen Corp | 搬送装置 |
| US8752449B2 (en) * | 2007-05-08 | 2014-06-17 | Brooks Automation, Inc. | Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism |
| JPWO2008140093A1 (ja) * | 2007-05-15 | 2010-08-05 | 株式会社アルバック | 搬送装置及びこれを用いた真空処理装置 |
| JP4766274B2 (ja) * | 2007-07-18 | 2011-09-07 | 株式会社安川電機 | 基板搬送ロボット及びそれを備えた半導体製造装置 |
| JP4971063B2 (ja) * | 2007-07-27 | 2012-07-11 | 株式会社ダイヘン | 搬送装置 |
| JP4824645B2 (ja) * | 2007-08-03 | 2011-11-30 | 株式会社アルバック | 基板搬送装置 |
| US8777547B2 (en) | 2009-01-11 | 2014-07-15 | Applied Materials, Inc. | Systems, apparatus and methods for transporting substrates |
| JP5304601B2 (ja) * | 2009-11-10 | 2013-10-02 | 株式会社安川電機 | アーム機構およびそれを備えた真空ロボット |
| CN201781112U (zh) | 2010-07-22 | 2011-03-30 | 番禺得意精密电子工业有限公司 | 电连接器 |
| KR101431460B1 (ko) | 2010-08-24 | 2014-08-20 | 울박, 인크 | 반송 장치 |
| US9656386B2 (en) * | 2010-10-08 | 2017-05-23 | Brooks Automation, Inc. | Coaxial drive vacuum robot |
| KR102223624B1 (ko) * | 2010-11-10 | 2021-03-05 | 브룩스 오토메이션 인코퍼레이티드 | 기판 처리 장치 |
| JP2012152851A (ja) * | 2011-01-26 | 2012-08-16 | Sinfonia Technology Co Ltd | 搬送アーム装置 |
| US9188973B2 (en) * | 2011-07-08 | 2015-11-17 | Restoration Robotics, Inc. | Calibration and transformation of a camera system's coordinate system |
| JP2013084823A (ja) * | 2011-10-11 | 2013-05-09 | Ulvac Japan Ltd | 搬送ロボット及び真空装置 |
| TWI629743B (zh) | 2012-02-10 | 2018-07-11 | 布魯克斯自動機械公司 | 基材處理設備 |
| KR20130096072A (ko) * | 2012-02-21 | 2013-08-29 | 삼성전자주식회사 | 기판 반송 장치 |
| JP5274702B1 (ja) | 2012-06-28 | 2013-08-28 | 株式会社一宮電機 | モータ駆動システム |
| JP5663638B2 (ja) * | 2012-10-11 | 2015-02-04 | 株式会社ティーイーエス | 基板移送装置 |
| KR101268111B1 (ko) * | 2013-03-14 | 2013-05-29 | 주식회사 티이에스 | 기판 이송 장치 |
| KR101246362B1 (ko) * | 2012-10-11 | 2013-03-25 | 주식회사 티이에스 | 기판 이송 장치 |
-
2015
- 2015-01-16 CN CN201580014344.0A patent/CN106103011A/zh active Pending
- 2015-01-16 WO PCT/US2015/011764 patent/WO2015109189A1/en not_active Ceased
- 2015-01-16 KR KR1020167022339A patent/KR102381412B1/ko active Active
- 2015-01-16 CN CN202110464317.0A patent/CN113270350A/zh active Pending
- 2015-01-16 KR KR1020237021822A patent/KR20230104993A/ko not_active Ceased
- 2015-01-16 US US15/110,130 patent/US11273558B2/en active Active
- 2015-01-16 KR KR1020227010326A patent/KR20220044392A/ko not_active Ceased
- 2015-01-16 JP JP2016546929A patent/JP6863744B2/ja active Active
-
2021
- 2021-04-01 JP JP2021063106A patent/JP7280309B2/ja active Active
-
2022
- 2022-03-15 US US17/654,849 patent/US20220266460A1/en active Pending
-
2023
- 2023-05-11 JP JP2023078736A patent/JP2023100955A/ja active Pending
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