JP2013541843A5 - - Google Patents
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- Publication number
- JP2013541843A5 JP2013541843A5 JP2013529313A JP2013529313A JP2013541843A5 JP 2013541843 A5 JP2013541843 A5 JP 2013541843A5 JP 2013529313 A JP2013529313 A JP 2013529313A JP 2013529313 A JP2013529313 A JP 2013529313A JP 2013541843 A5 JP2013541843 A5 JP 2013541843A5
- Authority
- JP
- Japan
- Prior art keywords
- forearm
- actuator
- transfer robot
- substrate transfer
- pulley
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000245 forearm Anatomy 0.000 claims description 59
- 239000000758 substrate Substances 0.000 claims description 22
- 239000012636 effector Substances 0.000 claims description 11
- 230000008878 coupling Effects 0.000 claims 3
- 238000010168 coupling process Methods 0.000 claims 3
- 238000005859 coupling reaction Methods 0.000 claims 3
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 2
- 238000013480 data collection Methods 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38314010P | 2010-09-15 | 2010-09-15 | |
| US61/383,140 | 2010-09-15 | ||
| US13/232,951 US20120063874A1 (en) | 2010-09-15 | 2011-09-14 | Low profile dual arm vacuum robot |
| US13/232,951 | 2011-09-14 | ||
| PCT/US2011/051699 WO2012037312A2 (en) | 2010-09-15 | 2011-09-15 | Low profile dual arm vacuum robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013541843A JP2013541843A (ja) | 2013-11-14 |
| JP2013541843A5 true JP2013541843A5 (enExample) | 2015-01-15 |
Family
ID=45806871
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013529313A Pending JP2013541843A (ja) | 2010-09-15 | 2011-09-15 | 高さが低い双アーム真空ロボット |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20120063874A1 (enExample) |
| JP (1) | JP2013541843A (enExample) |
| KR (1) | KR20130100153A (enExample) |
| CN (1) | CN103430296A (enExample) |
| TW (1) | TW201228784A (enExample) |
| WO (1) | WO2012037312A2 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102326244B (zh) | 2009-01-11 | 2014-12-17 | 应用材料公司 | 用于在电子器件制造中传输基板的机械手系统、装置及方法 |
| WO2014008009A1 (en) * | 2012-07-05 | 2014-01-09 | Applied Materials, Inc | Boom drive apparatus, multi-arm robot apparatus, electronic device processing systems, and methods for transporting substrates in electronic device manufacturing systems |
| US20140220777A1 (en) * | 2013-02-05 | 2014-08-07 | International Business Machines Corporation | Processing system for combined metal deposition and reflow anneal for forming interconnect structures |
| CN106015497B (zh) * | 2016-05-16 | 2017-11-14 | 太原理工大学 | 一种密闭空间定位操作机构 |
| US11270904B2 (en) * | 2016-07-12 | 2022-03-08 | Brooks Automation Us, Llc | Substrate processing apparatus |
| US10704142B2 (en) * | 2017-07-27 | 2020-07-07 | Applied Materials, Inc. | Quick disconnect resistance temperature detector assembly for rotating pedestal |
| CN109994358B (zh) * | 2017-12-29 | 2021-04-27 | 中微半导体设备(上海)股份有限公司 | 一种等离子处理系统和等离子处理系统的运行方法 |
| KR20240167943A (ko) | 2019-07-12 | 2024-11-28 | 어플라이드 머티어리얼스, 인코포레이티드 | 동시 기판 이송을 위한 로봇 |
| US11443973B2 (en) | 2019-07-12 | 2022-09-13 | Applied Materials, Inc. | Robot for simultaneous substrate transfer |
| US11117265B2 (en) | 2019-07-12 | 2021-09-14 | Applied Materials, Inc. | Robot for simultaneous substrate transfer |
| US11574826B2 (en) * | 2019-07-12 | 2023-02-07 | Applied Materials, Inc. | High-density substrate processing systems and methods |
| KR20230002355A (ko) * | 2020-03-02 | 2023-01-05 | 퍼시몬 테크놀로지스 코포레이션 | 소형 횡단 로봇 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4392776A (en) * | 1981-05-15 | 1983-07-12 | Westinghouse Electric Corp. | Robotic manipulator structure |
| US6428266B1 (en) * | 1995-07-10 | 2002-08-06 | Brooks Automation, Inc. | Direct driven robot |
| US5789878A (en) * | 1996-07-15 | 1998-08-04 | Applied Materials, Inc. | Dual plane robot |
| JPH10163296A (ja) * | 1996-11-27 | 1998-06-19 | Rootsue Kk | 基板搬送装置 |
| JP3562748B2 (ja) * | 1997-03-05 | 2004-09-08 | 大日本スクリーン製造株式会社 | 基板処理装置 |
| US6155768A (en) * | 1998-01-30 | 2000-12-05 | Kensington Laboratories, Inc. | Multiple link robot arm system implemented with offset end effectors to provide extended reach and enhanced throughput |
| JPH11277467A (ja) * | 1998-03-25 | 1999-10-12 | Mecs Corp | 薄型基板搬送ロボット |
| JPH11300663A (ja) * | 1998-04-24 | 1999-11-02 | Mecs Corp | 薄型基板搬送装置 |
| AU2041000A (en) * | 1998-12-02 | 2000-06-19 | Kensington Laboratories, Inc. | Specimen holding robotic arm end effector |
| JP4456725B2 (ja) * | 2000-05-24 | 2010-04-28 | 株式会社ダイヘン | 搬送装置 |
| JP2002158272A (ja) * | 2000-11-17 | 2002-05-31 | Tatsumo Kk | ダブルアーム基板搬送装置 |
| JP2002166376A (ja) * | 2000-11-30 | 2002-06-11 | Hirata Corp | 基板搬送用ロボット |
| US20020098072A1 (en) * | 2001-01-19 | 2002-07-25 | Applied Materials, Inc. | Dual bladed robot apparatus and associated method |
| US7281741B2 (en) * | 2001-07-13 | 2007-10-16 | Semitool, Inc. | End-effectors for handling microelectronic workpieces |
| JP4222068B2 (ja) * | 2003-03-10 | 2009-02-12 | 東京エレクトロン株式会社 | 被処理体の搬送装置 |
| JP2005032994A (ja) * | 2003-07-14 | 2005-02-03 | Hitachi Kokusai Electric Inc | 基板処理装置 |
| US7244095B2 (en) * | 2004-12-16 | 2007-07-17 | Energent Corporation | Dual pressure Euler steam turbine |
| US9248568B2 (en) * | 2005-07-11 | 2016-02-02 | Brooks Automation, Inc. | Unequal link SCARA arm |
| CN100358097C (zh) * | 2005-08-05 | 2007-12-26 | 中微半导体设备(上海)有限公司 | 半导体工艺处理系统及其处理方法 |
| US7946800B2 (en) * | 2007-04-06 | 2011-05-24 | Brooks Automation, Inc. | Substrate transport apparatus with multiple independently movable articulated arms |
| KR101366651B1 (ko) * | 2007-05-31 | 2014-02-25 | 어플라이드 머티어리얼스, 인코포레이티드 | 이중 스카라 로봇 링키지의 리치를 연장하기 위한 방법 및 장치 |
| JP4971063B2 (ja) * | 2007-07-27 | 2012-07-11 | 株式会社ダイヘン | 搬送装置 |
-
2011
- 2011-09-14 US US13/232,951 patent/US20120063874A1/en not_active Abandoned
- 2011-09-15 JP JP2013529313A patent/JP2013541843A/ja active Pending
- 2011-09-15 CN CN2011800445226A patent/CN103430296A/zh active Pending
- 2011-09-15 WO PCT/US2011/051699 patent/WO2012037312A2/en not_active Ceased
- 2011-09-15 TW TW100133251A patent/TW201228784A/zh unknown
- 2011-09-15 KR KR1020137009365A patent/KR20130100153A/ko not_active Withdrawn
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