KR102381412B1 - 기판 이송 장치 - Google Patents

기판 이송 장치 Download PDF

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Publication number
KR102381412B1
KR102381412B1 KR1020167022339A KR20167022339A KR102381412B1 KR 102381412 B1 KR102381412 B1 KR 102381412B1 KR 1020167022339 A KR1020167022339 A KR 1020167022339A KR 20167022339 A KR20167022339 A KR 20167022339A KR 102381412 B1 KR102381412 B1 KR 102381412B1
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KR
South Korea
Prior art keywords
drive
arms
axis
arm
power transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020167022339A
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English (en)
Korean (ko)
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KR20160107327A (ko
Inventor
로버트 티. 케이브니
Original Assignee
브룩스 오토메이션 인코퍼레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to KR1020227010326A priority Critical patent/KR20220044392A/ko
Publication of KR20160107327A publication Critical patent/KR20160107327A/ko
Application granted granted Critical
Publication of KR102381412B1 publication Critical patent/KR102381412B1/ko
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/009—Gripping heads and other end effectors with pins for accurately positioning the object on the gripping head
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
KR1020167022339A 2014-01-17 2015-01-16 기판 이송 장치 Active KR102381412B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020227010326A KR20220044392A (ko) 2014-01-17 2015-01-16 기판 이송 장치

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461928681P 2014-01-17 2014-01-17
US61/928,681 2014-01-17
PCT/US2015/011764 WO2015109189A1 (en) 2014-01-17 2015-01-16 Substrate transport apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR1020227010326A Division KR20220044392A (ko) 2014-01-17 2015-01-16 기판 이송 장치

Publications (2)

Publication Number Publication Date
KR20160107327A KR20160107327A (ko) 2016-09-13
KR102381412B1 true KR102381412B1 (ko) 2022-03-31

Family

ID=53543480

Family Applications (3)

Application Number Title Priority Date Filing Date
KR1020237021822A Ceased KR20230104993A (ko) 2014-01-17 2015-01-16 기판 이송 장치
KR1020227010326A Ceased KR20220044392A (ko) 2014-01-17 2015-01-16 기판 이송 장치
KR1020167022339A Active KR102381412B1 (ko) 2014-01-17 2015-01-16 기판 이송 장치

Family Applications Before (2)

Application Number Title Priority Date Filing Date
KR1020237021822A Ceased KR20230104993A (ko) 2014-01-17 2015-01-16 기판 이송 장치
KR1020227010326A Ceased KR20220044392A (ko) 2014-01-17 2015-01-16 기판 이송 장치

Country Status (5)

Country Link
US (2) US11273558B2 (enExample)
JP (3) JP6863744B2 (enExample)
KR (3) KR20230104993A (enExample)
CN (2) CN106103011A (enExample)
WO (1) WO2015109189A1 (enExample)

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* Cited by examiner, † Cited by third party
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US20180308728A1 (en) * 2017-02-07 2018-10-25 Brooks Automation, Inc. Method and apparatus for substrate transport
US11088004B2 (en) * 2018-01-30 2021-08-10 Brooks Automation, Inc. Automatic wafer centering method and apparatus
TWI815869B (zh) 2018-03-16 2023-09-21 美商布魯克斯自動機械美國公司 基板輸送裝置及用於基板輸送裝置之方法
US11535460B2 (en) * 2018-05-31 2022-12-27 Brooks Automation Us, Llc Substrate processing apparatus
US11545380B2 (en) * 2018-11-01 2023-01-03 Brooks Automation Us Llc Transport apparatus with linear bearing
JP6522225B2 (ja) * 2018-12-19 2019-05-29 日本たばこ産業株式会社 霧化ユニットの製造方法、非燃焼型香味吸引器、霧化ユニット及び霧化ユニットパッケージ
CN121011552A (zh) * 2021-06-30 2025-11-25 北京屹唐半导体科技股份有限公司 传送装置和处理系统
KR102638655B1 (ko) * 2023-08-07 2024-02-20 에이피티씨 주식회사 멀티 층 efem을 포함하는 기판 이송 장치

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005125479A (ja) * 2003-04-16 2005-05-19 Daihen Corp 直線移動機構およびこれを用いた搬送ロボット
KR101268111B1 (ko) * 2013-03-14 2013-05-29 주식회사 티이에스 기판 이송 장치
JP2014030328A (ja) 2012-06-28 2014-02-13 Ichinomiya Denki:Kk モータ駆動システム

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US7837425B2 (en) * 2003-07-16 2010-11-23 Tokyo Electron Limited Transportation apparatus and drive mechanism
JP4319504B2 (ja) 2003-10-06 2009-08-26 東京エレクトロン株式会社 基板搬送装置および基板処理システム
US7797968B2 (en) 2004-06-01 2010-09-21 INVISTA North America S.à.r.l. Method to make circular knit elastic fabric comprising spandex and hard yarns
JP2006240867A (ja) * 2005-03-07 2006-09-14 Hitachi Plant Technologies Ltd 移載機におけるテレスコピックアームの旋回機構
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JP2008246644A (ja) * 2007-03-30 2008-10-16 Daihen Corp 搬送装置
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KR102223624B1 (ko) * 2010-11-10 2021-03-05 브룩스 오토메이션 인코퍼레이티드 기판 처리 장치
JP2012152851A (ja) * 2011-01-26 2012-08-16 Sinfonia Technology Co Ltd 搬送アーム装置
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Publication number Priority date Publication date Assignee Title
JP2005125479A (ja) * 2003-04-16 2005-05-19 Daihen Corp 直線移動機構およびこれを用いた搬送ロボット
JP2014030328A (ja) 2012-06-28 2014-02-13 Ichinomiya Denki:Kk モータ駆動システム
KR101268111B1 (ko) * 2013-03-14 2013-05-29 주식회사 티이에스 기판 이송 장치

Also Published As

Publication number Publication date
WO2015109189A1 (en) 2015-07-23
US20220266460A1 (en) 2022-08-25
US20160325440A1 (en) 2016-11-10
US11273558B2 (en) 2022-03-15
JP2017504492A (ja) 2017-02-09
JP2021106288A (ja) 2021-07-26
KR20160107327A (ko) 2016-09-13
KR20220044392A (ko) 2022-04-07
JP2023100955A (ja) 2023-07-19
JP7280309B2 (ja) 2023-05-23
KR20230104993A (ko) 2023-07-11
CN106103011A (zh) 2016-11-09
CN113270350A (zh) 2021-08-17
JP6863744B2 (ja) 2021-04-21

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