JP2023549526A - 中空石英円筒体を製作するための装置および方法 - Google Patents

中空石英円筒体を製作するための装置および方法 Download PDF

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Publication number
JP2023549526A
JP2023549526A JP2023528608A JP2023528608A JP2023549526A JP 2023549526 A JP2023549526 A JP 2023549526A JP 2023528608 A JP2023528608 A JP 2023528608A JP 2023528608 A JP2023528608 A JP 2023528608A JP 2023549526 A JP2023549526 A JP 2023549526A
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JP
Japan
Prior art keywords
housing
ports
rotating
barrel
arc furnace
Prior art date
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Pending
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JP2023528608A
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English (en)
Japanese (ja)
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JP2023549526A5 (https=
Inventor
プルス，ユージーン
アルグレン，フレデリック
コーウィン，ダグラス
プラテ，ミヒャエル
ケルヒャー，セオドア
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Momentive Performance Materials Quartz Inc
Original Assignee
Momentive Performance Materials Quartz Inc
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Filing date
Publication date
Application filed by Momentive Performance Materials Quartz Inc filed Critical Momentive Performance Materials Quartz Inc
Publication of JP2023549526A publication Critical patent/JP2023549526A/ja
Publication of JP2023549526A5 publication Critical patent/JP2023549526A5/ja
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/02—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating
    • C03B5/025—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating by arc discharge or plasma heating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Furnace Details (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
JP2023528608A 2020-11-16 2021-11-16 中空石英円筒体を製作するための装置および方法 Pending JP2023549526A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063114009P 2020-11-16 2020-11-16
US63/114,009 2020-11-16
PCT/US2021/059582 WO2022104284A1 (en) 2020-11-16 2021-11-16 Apparatus and method for producing hollow quartz cylinders

Publications (2)

Publication Number Publication Date
JP2023549526A true JP2023549526A (ja) 2023-11-27
JP2023549526A5 JP2023549526A5 (https=) 2024-11-26

Family

ID=78844845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023528608A Pending JP2023549526A (ja) 2020-11-16 2021-11-16 中空石英円筒体を製作するための装置および方法

Country Status (6)

Country Link
US (1) US12384712B2 (https=)
EP (1) EP4244193A1 (https=)
JP (1) JP2023549526A (https=)
KR (1) KR20230115304A (https=)
CN (1) CN116783149A (https=)
WO (1) WO2022104284A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102860206B1 (ko) * 2023-12-28 2025-09-16 주식회사 케이텍 저기포 석영 유리 실린더의 제조 방법
KR102896554B1 (ko) * 2024-03-05 2025-12-05 주식회사 케이텍 석영 실린더의 전기 분해를 통한 금속 불순물 제거방법

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4990710A (https=) * 1972-12-27 1974-08-29
US4212661A (en) * 1979-02-16 1980-07-15 Lothar Jung Method for the manufacture of hollow fused quartz or fused silica ingots
JPH069236A (ja) * 1991-12-02 1994-01-18 Lothar Jung 光学品位の二酸化ケイ素ガラスインゴット製品の製造方法および製造装置
JP2005529050A (ja) * 2002-06-10 2005-09-29 ゼネラル・エレクトリック・カンパニイ 厚肉シリカ管の製造
JP2007191392A (ja) * 1998-05-25 2007-08-02 Shinetsu Quartz Prod Co Ltd シリコン単結晶引き上げ用石英ガラスるつぼの製造方法
JP2013538179A (ja) * 2010-09-21 2013-10-10 ヘレウス・クアルツグラース・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンディット・ゲゼルシャフト 合成石英ガラスから成る透明な内層を備えた石英ガラスるつぼを製造する方法
WO2017110762A1 (ja) * 2015-12-21 2017-06-29 株式会社Sumco シリカガラスルツボの歪測定装置、シリコン単結晶の製造方法、シリカガラスルツボの歪測定方法、位相差マップ、インゴットおよびホモエピタキシャルウェーハ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1254492A (en) * 1968-06-06 1971-11-24 Westinghouse Electric Corp Method of reducing air lines and water content in the manufacture of silica glass
US4188201A (en) * 1978-04-17 1980-02-12 Lothar Jung Apparatus for forming an ingot in a rotating housing
US4414026A (en) * 1981-07-30 1983-11-08 Nippon Kokan Kabushiki Kaisha Method for the production of ferrochromium
DE4334795A1 (de) * 1993-10-13 1995-04-20 Bayer Ag Vorrichtung zur Begasung eines Drehrohrofens
DE102004035086B4 (de) * 2004-07-20 2008-07-03 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Hohlzylinders aus Quarzglas mit kleinem Innendurchmesser sowie zur Durchführung des Verfahrens geeignete Vorrichtung
WO2013149882A1 (de) * 2012-04-05 2013-10-10 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung eines formkörpers aus elektrogeschmolzenem synthetischem quarzglas
DE102016118826A1 (de) 2016-10-05 2018-04-05 Qsil Gmbh Quarzschmelze Ilmenau Hohlzylinder aus keramischem Material, ein Verfahren zu seiner Herstellung und seine Verwendung

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4990710A (https=) * 1972-12-27 1974-08-29
US4212661A (en) * 1979-02-16 1980-07-15 Lothar Jung Method for the manufacture of hollow fused quartz or fused silica ingots
JPH069236A (ja) * 1991-12-02 1994-01-18 Lothar Jung 光学品位の二酸化ケイ素ガラスインゴット製品の製造方法および製造装置
JP2007191392A (ja) * 1998-05-25 2007-08-02 Shinetsu Quartz Prod Co Ltd シリコン単結晶引き上げ用石英ガラスるつぼの製造方法
JP2005529050A (ja) * 2002-06-10 2005-09-29 ゼネラル・エレクトリック・カンパニイ 厚肉シリカ管の製造
JP2013538179A (ja) * 2010-09-21 2013-10-10 ヘレウス・クアルツグラース・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング・ウント・コンパニー・コマンディット・ゲゼルシャフト 合成石英ガラスから成る透明な内層を備えた石英ガラスるつぼを製造する方法
WO2017110762A1 (ja) * 2015-12-21 2017-06-29 株式会社Sumco シリカガラスルツボの歪測定装置、シリコン単結晶の製造方法、シリカガラスルツボの歪測定方法、位相差マップ、インゴットおよびホモエピタキシャルウェーハ

Also Published As

Publication number Publication date
KR20230115304A (ko) 2023-08-02
EP4244193A1 (en) 2023-09-20
CN116783149A (zh) 2023-09-19
US20230416135A1 (en) 2023-12-28
WO2022104284A1 (en) 2022-05-19
US12384712B2 (en) 2025-08-12

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