CN116783149A - 用于生产中空石英圆筒的设备和方法 - Google Patents

用于生产中空石英圆筒的设备和方法 Download PDF

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Publication number
CN116783149A
CN116783149A CN202180090877.2A CN202180090877A CN116783149A CN 116783149 A CN116783149 A CN 116783149A CN 202180090877 A CN202180090877 A CN 202180090877A CN 116783149 A CN116783149 A CN 116783149A
Authority
CN
China
Prior art keywords
housing
ports
vacuum
electric arc
arc furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202180090877.2A
Other languages
English (en)
Chinese (zh)
Inventor
尤金·普拉斯
弗雷德里克·阿尔格伦
道格拉斯·科尔温
迈克尔·普拉特
西奥多·基尔舍
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Momentiv Performance Materials Quartz Co ltd
Original Assignee
Momentiv Performance Materials Quartz Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Momentiv Performance Materials Quartz Co ltd filed Critical Momentiv Performance Materials Quartz Co ltd
Publication of CN116783149A publication Critical patent/CN116783149A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/02—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating
    • C03B5/025—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating by arc discharge or plasma heating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Furnace Details (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
CN202180090877.2A 2020-11-16 2021-11-16 用于生产中空石英圆筒的设备和方法 Pending CN116783149A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063114009P 2020-11-16 2020-11-16
US63/114,009 2020-11-16
PCT/US2021/059582 WO2022104284A1 (en) 2020-11-16 2021-11-16 Apparatus and method for producing hollow quartz cylinders

Publications (1)

Publication Number Publication Date
CN116783149A true CN116783149A (zh) 2023-09-19

Family

ID=78844845

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202180090877.2A Pending CN116783149A (zh) 2020-11-16 2021-11-16 用于生产中空石英圆筒的设备和方法

Country Status (6)

Country Link
US (1) US12384712B2 (https=)
EP (1) EP4244193A1 (https=)
JP (1) JP2023549526A (https=)
KR (1) KR20230115304A (https=)
CN (1) CN116783149A (https=)
WO (1) WO2022104284A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102860206B1 (ko) * 2023-12-28 2025-09-16 주식회사 케이텍 저기포 석영 유리 실린더의 제조 방법
KR102896554B1 (ko) * 2024-03-05 2025-12-05 주식회사 케이텍 석영 실린더의 전기 분해를 통한 금속 불순물 제거방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1254492A (en) * 1968-06-06 1971-11-24 Westinghouse Electric Corp Method of reducing air lines and water content in the manufacture of silica glass
CN1675134A (zh) * 2002-06-10 2005-09-28 通用电气公司 厚壁石英管的制造
CN1989077A (zh) * 2004-07-20 2007-06-27 赫罗伊斯·坦尼沃有限责任公司 用于生产空心石英玻璃圆筒的方法和装置
CN109922935A (zh) * 2016-10-05 2019-06-21 库斯奥伊尔梅瑙熔融石英有限责任公司 由陶瓷材料制成的空心柱筒、用于其制造的方法及其应用

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2263589C2 (de) 1972-12-27 1974-05-30 Heraeus Schott Quarzschmelze Gmbh, 6450 Hanau Verfahren zum Herstellen von Hohlzylindern, insbesondere von Rohren, aus Quarzglas und Vorrichtung zur Durchführung des Verfahrens
US4188201A (en) * 1978-04-17 1980-02-12 Lothar Jung Apparatus for forming an ingot in a rotating housing
US4212661A (en) * 1979-02-16 1980-07-15 Lothar Jung Method for the manufacture of hollow fused quartz or fused silica ingots
US4414026A (en) * 1981-07-30 1983-11-08 Nippon Kokan Kabushiki Kaisha Method for the production of ferrochromium
US5312471A (en) * 1991-12-02 1994-05-17 Lothar Jung Method and apparatus for the manufacture of large optical grade SiO2 glass preforms
DE4334795A1 (de) * 1993-10-13 1995-04-20 Bayer Ag Vorrichtung zur Begasung eines Drehrohrofens
JP4482567B2 (ja) * 1998-05-25 2010-06-16 信越石英株式会社 シリコン単結晶引き上げ用石英ガラスるつぼの製造方法
DE102010045934B4 (de) * 2010-09-21 2012-04-05 Heraeus Quarzglas Gmbh & Co. Kg Verfahren für die Herstellung eines Quarzglastiegels mit transparenter Innenschicht aus synthetisch erzeugtem Quarzglas
WO2013149882A1 (de) * 2012-04-05 2013-10-10 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung eines formkörpers aus elektrogeschmolzenem synthetischem quarzglas
TW201732221A (zh) * 2015-12-21 2017-09-16 Ｓｕｍｃｏ股份有限公司 氧化矽玻璃坩堝的歪曲測量裝置、單晶矽的製造方法、氧化矽玻璃坩堝的歪曲測量方法、相位差圖、錠及同質外延晶圓

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1254492A (en) * 1968-06-06 1971-11-24 Westinghouse Electric Corp Method of reducing air lines and water content in the manufacture of silica glass
CN1675134A (zh) * 2002-06-10 2005-09-28 通用电气公司 厚壁石英管的制造
CN1989077A (zh) * 2004-07-20 2007-06-27 赫罗伊斯·坦尼沃有限责任公司 用于生产空心石英玻璃圆筒的方法和装置
US20070271964A1 (en) * 2004-07-20 2007-11-29 Heraeus Tenevo Gmbh Method and Device for Producing a Hollow Quartz-Glass Cylinder
CN109922935A (zh) * 2016-10-05 2019-06-21 库斯奥伊尔梅瑙熔融石英有限责任公司 由陶瓷材料制成的空心柱筒、用于其制造的方法及其应用

Also Published As

Publication number Publication date
JP2023549526A (ja) 2023-11-27
KR20230115304A (ko) 2023-08-02
EP4244193A1 (en) 2023-09-20
US20230416135A1 (en) 2023-12-28
WO2022104284A1 (en) 2022-05-19
US12384712B2 (en) 2025-08-12

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