KR20230115304A - 중공 석영 실린더를 생산하기 위한 시스템 및 방법 - Google Patents

중공 석영 실린더를 생산하기 위한 시스템 및 방법 Download PDF

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Publication number
KR20230115304A
KR20230115304A KR1020237020159A KR20237020159A KR20230115304A KR 20230115304 A KR20230115304 A KR 20230115304A KR 1020237020159 A KR1020237020159 A KR 1020237020159A KR 20237020159 A KR20237020159 A KR 20237020159A KR 20230115304 A KR20230115304 A KR 20230115304A
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KR
South Korea
Prior art keywords
housing
ports
port
vacuum
arc furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020237020159A
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English (en)
Korean (ko)
Inventor
프루스 유진
알그렌 프레드릭
코윈 더글라스
플레이트 마이클
키르허 씨어도어
Original Assignee
모멘티브 퍼포먼스 머티리얼즈 쿼츠, 인크.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 모멘티브 퍼포먼스 머티리얼즈 쿼츠, 인크. filed Critical 모멘티브 퍼포먼스 머티리얼즈 쿼츠, 인크.
Publication of KR20230115304A publication Critical patent/KR20230115304A/ko
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
    • C03B5/02—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating
    • C03B5/025—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating by arc discharge or plasma heating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Furnace Details (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
KR1020237020159A 2020-11-16 2021-11-16 중공 석영 실린더를 생산하기 위한 시스템 및 방법 Pending KR20230115304A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063114009P 2020-11-16 2020-11-16
US63/114,009 2020-11-16
PCT/US2021/059582 WO2022104284A1 (en) 2020-11-16 2021-11-16 Apparatus and method for producing hollow quartz cylinders

Publications (1)

Publication Number Publication Date
KR20230115304A true KR20230115304A (ko) 2023-08-02

Family

ID=78844845

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020237020159A Pending KR20230115304A (ko) 2020-11-16 2021-11-16 중공 석영 실린더를 생산하기 위한 시스템 및 방법

Country Status (6)

Country Link
US (1) US12384712B2 (https=)
EP (1) EP4244193A1 (https=)
JP (1) JP2023549526A (https=)
KR (1) KR20230115304A (https=)
CN (1) CN116783149A (https=)
WO (1) WO2022104284A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250103312A (ko) * 2023-12-28 2025-07-07 주식회사 케이텍 저기포 석영 유리 실린더의 제조 방법
KR20250134901A (ko) * 2024-03-05 2025-09-12 주식회사 케이텍 석영 실린더의 전기 분해를 통한 금속 불순물 제거방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1254492A (en) * 1968-06-06 1971-11-24 Westinghouse Electric Corp Method of reducing air lines and water content in the manufacture of silica glass
DE2263589C2 (de) 1972-12-27 1974-05-30 Heraeus Schott Quarzschmelze Gmbh, 6450 Hanau Verfahren zum Herstellen von Hohlzylindern, insbesondere von Rohren, aus Quarzglas und Vorrichtung zur Durchführung des Verfahrens
US4188201A (en) * 1978-04-17 1980-02-12 Lothar Jung Apparatus for forming an ingot in a rotating housing
US4212661A (en) * 1979-02-16 1980-07-15 Lothar Jung Method for the manufacture of hollow fused quartz or fused silica ingots
US4414026A (en) * 1981-07-30 1983-11-08 Nippon Kokan Kabushiki Kaisha Method for the production of ferrochromium
US5312471A (en) * 1991-12-02 1994-05-17 Lothar Jung Method and apparatus for the manufacture of large optical grade SiO2 glass preforms
DE4334795A1 (de) * 1993-10-13 1995-04-20 Bayer Ag Vorrichtung zur Begasung eines Drehrohrofens
JP4482567B2 (ja) * 1998-05-25 2010-06-16 信越石英株式会社 シリコン単結晶引き上げ用石英ガラスるつぼの製造方法
US20030226376A1 (en) * 2002-06-10 2003-12-11 General Electric Company Fabrication of heavy walled silica tubing
DE102004035086B4 (de) * 2004-07-20 2008-07-03 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Hohlzylinders aus Quarzglas mit kleinem Innendurchmesser sowie zur Durchführung des Verfahrens geeignete Vorrichtung
DE102010045934B4 (de) * 2010-09-21 2012-04-05 Heraeus Quarzglas Gmbh & Co. Kg Verfahren für die Herstellung eines Quarzglastiegels mit transparenter Innenschicht aus synthetisch erzeugtem Quarzglas
WO2013149882A1 (de) * 2012-04-05 2013-10-10 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung eines formkörpers aus elektrogeschmolzenem synthetischem quarzglas
TW201732221A (zh) * 2015-12-21 2017-09-16 Ｓｕｍｃｏ股份有限公司 氧化矽玻璃坩堝的歪曲測量裝置、單晶矽的製造方法、氧化矽玻璃坩堝的歪曲測量方法、相位差圖、錠及同質外延晶圓
DE102016118826A1 (de) 2016-10-05 2018-04-05 Qsil Gmbh Quarzschmelze Ilmenau Hohlzylinder aus keramischem Material, ein Verfahren zu seiner Herstellung und seine Verwendung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250103312A (ko) * 2023-12-28 2025-07-07 주식회사 케이텍 저기포 석영 유리 실린더의 제조 방법
KR20250134901A (ko) * 2024-03-05 2025-09-12 주식회사 케이텍 석영 실린더의 전기 분해를 통한 금속 불순물 제거방법

Also Published As

Publication number Publication date
JP2023549526A (ja) 2023-11-27
EP4244193A1 (en) 2023-09-20
CN116783149A (zh) 2023-09-19
US20230416135A1 (en) 2023-12-28
WO2022104284A1 (en) 2022-05-19
US12384712B2 (en) 2025-08-12

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