JP2023549526A5 - - Google Patents
Info
- Publication number
- JP2023549526A5 JP2023549526A5 JP2023528608A JP2023528608A JP2023549526A5 JP 2023549526 A5 JP2023549526 A5 JP 2023549526A5 JP 2023528608 A JP2023528608 A JP 2023528608A JP 2023528608 A JP2023528608 A JP 2023528608A JP 2023549526 A5 JP2023549526 A5 JP 2023549526A5
- Authority
- JP
- Japan
- Prior art keywords
- coupled
- fluid
- rotating
- flange body
- axial extensions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063114009P | 2020-11-16 | 2020-11-16 | |
| US63/114,009 | 2020-11-16 | ||
| PCT/US2021/059582 WO2022104284A1 (en) | 2020-11-16 | 2021-11-16 | Apparatus and method for producing hollow quartz cylinders |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2023549526A JP2023549526A (ja) | 2023-11-27 |
| JP2023549526A5 true JP2023549526A5 (https=) | 2024-11-26 |
Family
ID=78844845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023528608A Pending JP2023549526A (ja) | 2020-11-16 | 2021-11-16 | 中空石英円筒体を製作するための装置および方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12384712B2 (https=) |
| EP (1) | EP4244193A1 (https=) |
| JP (1) | JP2023549526A (https=) |
| KR (1) | KR20230115304A (https=) |
| CN (1) | CN116783149A (https=) |
| WO (1) | WO2022104284A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102860206B1 (ko) * | 2023-12-28 | 2025-09-16 | 주식회사 케이텍 | 저기포 석영 유리 실린더의 제조 방법 |
| KR102896554B1 (ko) * | 2024-03-05 | 2025-12-05 | 주식회사 케이텍 | 석영 실린더의 전기 분해를 통한 금속 불순물 제거방법 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1254492A (en) * | 1968-06-06 | 1971-11-24 | Westinghouse Electric Corp | Method of reducing air lines and water content in the manufacture of silica glass |
| DE2263589C2 (de) | 1972-12-27 | 1974-05-30 | Heraeus Schott Quarzschmelze Gmbh, 6450 Hanau | Verfahren zum Herstellen von Hohlzylindern, insbesondere von Rohren, aus Quarzglas und Vorrichtung zur Durchführung des Verfahrens |
| US4188201A (en) * | 1978-04-17 | 1980-02-12 | Lothar Jung | Apparatus for forming an ingot in a rotating housing |
| US4212661A (en) * | 1979-02-16 | 1980-07-15 | Lothar Jung | Method for the manufacture of hollow fused quartz or fused silica ingots |
| US4414026A (en) * | 1981-07-30 | 1983-11-08 | Nippon Kokan Kabushiki Kaisha | Method for the production of ferrochromium |
| US5312471A (en) * | 1991-12-02 | 1994-05-17 | Lothar Jung | Method and apparatus for the manufacture of large optical grade SiO2 glass preforms |
| DE4334795A1 (de) * | 1993-10-13 | 1995-04-20 | Bayer Ag | Vorrichtung zur Begasung eines Drehrohrofens |
| JP4482567B2 (ja) * | 1998-05-25 | 2010-06-16 | 信越石英株式会社 | シリコン単結晶引き上げ用石英ガラスるつぼの製造方法 |
| US20030226376A1 (en) * | 2002-06-10 | 2003-12-11 | General Electric Company | Fabrication of heavy walled silica tubing |
| DE102004035086B4 (de) * | 2004-07-20 | 2008-07-03 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung eines Hohlzylinders aus Quarzglas mit kleinem Innendurchmesser sowie zur Durchführung des Verfahrens geeignete Vorrichtung |
| DE102010045934B4 (de) * | 2010-09-21 | 2012-04-05 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren für die Herstellung eines Quarzglastiegels mit transparenter Innenschicht aus synthetisch erzeugtem Quarzglas |
| WO2013149882A1 (de) * | 2012-04-05 | 2013-10-10 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur herstellung eines formkörpers aus elektrogeschmolzenem synthetischem quarzglas |
| TW201732221A (zh) * | 2015-12-21 | 2017-09-16 | Sumco股份有限公司 | 氧化矽玻璃坩堝的歪曲測量裝置、單晶矽的製造方法、氧化矽玻璃坩堝的歪曲測量方法、相位差圖、錠及同質外延晶圓 |
| DE102016118826A1 (de) | 2016-10-05 | 2018-04-05 | Qsil Gmbh Quarzschmelze Ilmenau | Hohlzylinder aus keramischem Material, ein Verfahren zu seiner Herstellung und seine Verwendung |
-
2021
- 2021-11-16 US US18/036,791 patent/US12384712B2/en active Active
- 2021-11-16 KR KR1020237020159A patent/KR20230115304A/ko active Pending
- 2021-11-16 JP JP2023528608A patent/JP2023549526A/ja active Pending
- 2021-11-16 EP EP21824196.6A patent/EP4244193A1/en active Pending
- 2021-11-16 CN CN202180090877.2A patent/CN116783149A/zh active Pending
- 2021-11-16 WO PCT/US2021/059582 patent/WO2022104284A1/en not_active Ceased
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