JP2023549526A5 - - Google Patents

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Publication number
JP2023549526A5
JP2023549526A5 JP2023528608A JP2023528608A JP2023549526A5 JP 2023549526 A5 JP2023549526 A5 JP 2023549526A5 JP 2023528608 A JP2023528608 A JP 2023528608A JP 2023528608 A JP2023528608 A JP 2023528608A JP 2023549526 A5 JP2023549526 A5 JP 2023549526A5
Authority
JP
Japan
Prior art keywords
coupled
fluid
rotating
flange body
axial extensions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023528608A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023549526A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2021/059582 external-priority patent/WO2022104284A1/en
Publication of JP2023549526A publication Critical patent/JP2023549526A/ja
Publication of JP2023549526A5 publication Critical patent/JP2023549526A5/ja
Pending legal-status Critical Current

Links

JP2023528608A 2020-11-16 2021-11-16 中空石英円筒体を製作するための装置および方法 Pending JP2023549526A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063114009P 2020-11-16 2020-11-16
US63/114,009 2020-11-16
PCT/US2021/059582 WO2022104284A1 (en) 2020-11-16 2021-11-16 Apparatus and method for producing hollow quartz cylinders

Publications (2)

Publication Number Publication Date
JP2023549526A JP2023549526A (ja) 2023-11-27
JP2023549526A5 true JP2023549526A5 (https=) 2024-11-26

Family

ID=78844845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023528608A Pending JP2023549526A (ja) 2020-11-16 2021-11-16 中空石英円筒体を製作するための装置および方法

Country Status (6)

Country Link
US (1) US12384712B2 (https=)
EP (1) EP4244193A1 (https=)
JP (1) JP2023549526A (https=)
KR (1) KR20230115304A (https=)
CN (1) CN116783149A (https=)
WO (1) WO2022104284A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102860206B1 (ko) * 2023-12-28 2025-09-16 주식회사 케이텍 저기포 석영 유리 실린더의 제조 방법
KR102896554B1 (ko) * 2024-03-05 2025-12-05 주식회사 케이텍 석영 실린더의 전기 분해를 통한 금속 불순물 제거방법

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1254492A (en) * 1968-06-06 1971-11-24 Westinghouse Electric Corp Method of reducing air lines and water content in the manufacture of silica glass
DE2263589C2 (de) 1972-12-27 1974-05-30 Heraeus Schott Quarzschmelze Gmbh, 6450 Hanau Verfahren zum Herstellen von Hohlzylindern, insbesondere von Rohren, aus Quarzglas und Vorrichtung zur Durchführung des Verfahrens
US4188201A (en) * 1978-04-17 1980-02-12 Lothar Jung Apparatus for forming an ingot in a rotating housing
US4212661A (en) * 1979-02-16 1980-07-15 Lothar Jung Method for the manufacture of hollow fused quartz or fused silica ingots
US4414026A (en) * 1981-07-30 1983-11-08 Nippon Kokan Kabushiki Kaisha Method for the production of ferrochromium
US5312471A (en) * 1991-12-02 1994-05-17 Lothar Jung Method and apparatus for the manufacture of large optical grade SiO2 glass preforms
DE4334795A1 (de) * 1993-10-13 1995-04-20 Bayer Ag Vorrichtung zur Begasung eines Drehrohrofens
JP4482567B2 (ja) * 1998-05-25 2010-06-16 信越石英株式会社 シリコン単結晶引き上げ用石英ガラスるつぼの製造方法
US20030226376A1 (en) * 2002-06-10 2003-12-11 General Electric Company Fabrication of heavy walled silica tubing
DE102004035086B4 (de) * 2004-07-20 2008-07-03 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur Herstellung eines Hohlzylinders aus Quarzglas mit kleinem Innendurchmesser sowie zur Durchführung des Verfahrens geeignete Vorrichtung
DE102010045934B4 (de) * 2010-09-21 2012-04-05 Heraeus Quarzglas Gmbh & Co. Kg Verfahren für die Herstellung eines Quarzglastiegels mit transparenter Innenschicht aus synthetisch erzeugtem Quarzglas
WO2013149882A1 (de) * 2012-04-05 2013-10-10 Heraeus Quarzglas Gmbh & Co. Kg Verfahren zur herstellung eines formkörpers aus elektrogeschmolzenem synthetischem quarzglas
TW201732221A (zh) * 2015-12-21 2017-09-16 Sumco股份有限公司 氧化矽玻璃坩堝的歪曲測量裝置、單晶矽的製造方法、氧化矽玻璃坩堝的歪曲測量方法、相位差圖、錠及同質外延晶圓
DE102016118826A1 (de) 2016-10-05 2018-04-05 Qsil Gmbh Quarzschmelze Ilmenau Hohlzylinder aus keramischem Material, ein Verfahren zu seiner Herstellung und seine Verwendung

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