JP2023534485A5 - - Google Patents
Info
- Publication number
- JP2023534485A5 JP2023534485A5 JP2023502968A JP2023502968A JP2023534485A5 JP 2023534485 A5 JP2023534485 A5 JP 2023534485A5 JP 2023502968 A JP2023502968 A JP 2023502968A JP 2023502968 A JP2023502968 A JP 2023502968A JP 2023534485 A5 JP2023534485 A5 JP 2023534485A5
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- opening
- shape
- aspect ratio
- sectional area
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102020118939.7 | 2020-07-17 | ||
| DE102020118939.7A DE102020118939A1 (de) | 2020-07-17 | 2020-07-17 | Glaswafer und Glaselement für Drucksensoren |
| PCT/EP2021/069695 WO2022013334A1 (de) | 2020-07-17 | 2021-07-15 | Glaswafer und glaselement für drucksensoren |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023534485A JP2023534485A (ja) | 2023-08-09 |
| JP2023534485A5 true JP2023534485A5 (https=) | 2025-07-01 |
| JP7852196B2 JP7852196B2 (ja) | 2026-04-28 |
Family
ID=77021345
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023502968A Active JP7852196B2 (ja) | 2020-07-17 | 2021-07-15 | 圧力センサ用のガラスウエハおよびガラスエレメント |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US12596042B2 (https=) |
| EP (1) | EP4162246B1 (https=) |
| JP (1) | JP7852196B2 (https=) |
| KR (1) | KR20230038782A (https=) |
| CN (1) | CN116194403A (https=) |
| DE (1) | DE102020118939A1 (https=) |
| WO (1) | WO2022013334A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102022124863A1 (de) * | 2022-09-27 | 2024-03-28 | Schott Ag | Glaswafer sowie Verfahren zu dessen Herstellung |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57128074A (en) | 1981-02-02 | 1982-08-09 | Hitachi Ltd | Semiconductor pressure sensor |
| US4730496A (en) * | 1986-06-23 | 1988-03-15 | Rosemount Inc. | Capacitance pressure sensor |
| JPH0254137A (ja) * | 1988-08-17 | 1990-02-23 | Toshiba Corp | 半導体圧力センサー |
| JPH09126924A (ja) | 1995-10-31 | 1997-05-16 | Nippon Seiki Co Ltd | 半導体圧力センサ |
| EP1359402B1 (en) * | 2002-05-01 | 2014-10-01 | Infineon Technologies AG | Pressure sensor |
| JP2005221453A (ja) | 2004-02-09 | 2005-08-18 | Denso Corp | 圧力センサ |
| US7028552B2 (en) | 2004-05-17 | 2006-04-18 | Kavlico Corporation | Reliable piezo-resistive pressure sensor |
| JP4556784B2 (ja) | 2005-06-27 | 2010-10-06 | 株式会社デンソー | 圧力センサ |
| US7798010B2 (en) | 2007-10-11 | 2010-09-21 | Honeywell International Inc. | Sensor geometry for improved package stress isolation |
| JP2011013178A (ja) | 2009-07-06 | 2011-01-20 | Yamatake Corp | 圧力センサ及び製造方法 |
| JP5335983B2 (ja) | 2011-10-05 | 2013-11-06 | Hoya株式会社 | 磁気ディスク用ガラス基板および磁気記録媒体 |
| US9470593B2 (en) | 2013-09-12 | 2016-10-18 | Honeywell International Inc. | Media isolated pressure sensor |
| CN104511479B (zh) * | 2013-10-04 | 2017-01-11 | Jx日矿日石金属株式会社 | 轧制铜箔 |
| US20150276533A1 (en) * | 2014-01-08 | 2015-10-01 | Amphenol Thermometrics, Inc. | Low Pressure Sensor and Flow Sensor |
| CN106457475A (zh) | 2014-03-14 | 2017-02-22 | 康宁股份有限公司 | 嵌入玻璃的传感器及其制造过程 |
| KR20170044143A (ko) * | 2014-09-16 | 2017-04-24 | 엘피케이에프 레이저 앤드 일렉트로닉스 악티엔게젤샤프트 | 판 모양의 작업물 안으로 적어도 하나의 컷아웃부 또는 구멍을 도입하기 위한 방법 |
| JP6734202B2 (ja) | 2015-01-13 | 2020-08-05 | ロフィン−シナール テクノロジーズ エルエルシー | 脆性材料をスクライブして化学エッチングする方法およびシステム |
| US10717670B2 (en) | 2015-02-10 | 2020-07-21 | Nippon Sheet Glass Company, Limited | Glass for laser processing and method for producing perforated glass using same |
| CN205384625U (zh) * | 2015-06-05 | 2016-07-13 | 旭硝子株式会社 | 玻璃基板、保护玻璃、以及便携式信息终端 |
| DE102016213878B3 (de) | 2016-07-28 | 2017-11-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Gehäuse für einen Mikrochip mit einem strukturierten Schichtverbund und Herstellungsverfahren dafür |
| JP6528745B2 (ja) * | 2016-09-06 | 2019-06-12 | 株式会社デンソー | 圧力センサ |
| DE102018100299A1 (de) | 2017-01-27 | 2018-08-02 | Schott Ag | Strukturiertes plattenförmiges Glaselement und Verfahren zu dessen Herstellung |
| DE102018110211A1 (de) | 2018-04-27 | 2019-10-31 | Schott Ag | Verfahren zum Erzeugen feiner Strukturen im Volumen eines Substrates aus sprödharten Material |
| CN112512959A (zh) | 2018-08-09 | 2021-03-16 | Lpkf激光电子股份公司 | 用于制造微结构的方法 |
-
2020
- 2020-07-17 DE DE102020118939.7A patent/DE102020118939A1/de active Pending
-
2021
- 2021-07-15 KR KR1020237005574A patent/KR20230038782A/ko active Pending
- 2021-07-15 EP EP21745324.0A patent/EP4162246B1/de active Active
- 2021-07-15 JP JP2023502968A patent/JP7852196B2/ja active Active
- 2021-07-15 WO PCT/EP2021/069695 patent/WO2022013334A1/de not_active Ceased
- 2021-07-15 CN CN202180060955.4A patent/CN116194403A/zh active Pending
-
2023
- 2023-01-17 US US18/155,196 patent/US12596042B2/en active Active
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