JPWO2021171917A5 - - Google Patents

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Publication number
JPWO2021171917A5
JPWO2021171917A5 JP2022503197A JP2022503197A JPWO2021171917A5 JP WO2021171917 A5 JPWO2021171917 A5 JP WO2021171917A5 JP 2022503197 A JP2022503197 A JP 2022503197A JP 2022503197 A JP2022503197 A JP 2022503197A JP WO2021171917 A5 JPWO2021171917 A5 JP WO2021171917A5
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JP
Japan
Prior art keywords
valve membrane
fixing member
inner end
fixed
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022503197A
Other languages
English (en)
Japanese (ja)
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JP7400939B2 (ja
JPWO2021171917A1 (https=
Filing date
Publication date
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Priority claimed from PCT/JP2021/003549 external-priority patent/WO2021171917A1/ja
Publication of JPWO2021171917A1 publication Critical patent/JPWO2021171917A1/ja
Publication of JPWO2021171917A5 publication Critical patent/JPWO2021171917A5/ja
Application granted granted Critical
Publication of JP7400939B2 publication Critical patent/JP7400939B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022503197A 2020-02-26 2021-02-01 流体制御装置 Active JP7400939B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020030019 2020-02-26
JP2020030019 2020-02-26
PCT/JP2021/003549 WO2021171917A1 (ja) 2020-02-26 2021-02-01 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2021171917A1 JPWO2021171917A1 (https=) 2021-09-02
JPWO2021171917A5 true JPWO2021171917A5 (https=) 2022-09-29
JP7400939B2 JP7400939B2 (ja) 2023-12-19

Family

ID=77490134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022503197A Active JP7400939B2 (ja) 2020-02-26 2021-02-01 流体制御装置

Country Status (5)

Country Link
US (2) US12259057B2 (https=)
JP (1) JP7400939B2 (https=)
CN (2) CN115210469B (https=)
DE (1) DE112021000365B4 (https=)
WO (1) WO2021171917A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2599820B (en) * 2019-07-03 2023-04-26 Murata Manufacturing Co Fluid control apparatus
JP7435785B2 (ja) * 2020-07-17 2024-02-21 株式会社村田製作所 流体制御装置
TWI797853B (zh) * 2021-11-29 2023-04-01 研能科技股份有限公司 氣體傳輸裝置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3888015B2 (ja) * 1999-12-22 2007-02-28 松下電工株式会社 圧電ダイヤフラムポンプの密封方法
JP2003214349A (ja) * 2002-01-24 2003-07-30 Matsushita Electric Ind Co Ltd マイクロポンプおよびその製作方法
JP2004308465A (ja) 2003-04-03 2004-11-04 Star Micronics Co Ltd 定量搬送ポンプ
CN200978996Y (zh) * 2006-11-10 2007-11-21 王家骐 一种低阻力旋启式止回阀
CN100497992C (zh) * 2007-07-23 2009-06-10 南阳淅减汽车减振器有限公司 泵式位移相关变阻尼减振器
CN102884352B (zh) * 2010-03-05 2014-06-18 弗兰霍菲尔运输应用研究公司 弯曲换能器、微型泵和微型阀的制造方法以及微型泵和微型阀
JP2012159935A (ja) 2011-01-31 2012-08-23 Murata Mfg Co Ltd 電子部品モジュール、電子部品モジュールの製造方法、多機能カード
JP5766513B2 (ja) * 2011-05-31 2015-08-19 山下ゴム株式会社 液封防振装置
CN104235439A (zh) * 2013-06-13 2014-12-24 上海熊猫机械(集团)有限公司 一种防倒流阀
KR101983142B1 (ko) 2013-06-28 2019-08-28 삼성전기주식회사 반도체 패키지
JP6130759B2 (ja) * 2013-09-09 2017-05-17 株式会社Ｓｏｋｅｎ 圧縮機
JP6726166B2 (ja) 2015-02-17 2020-07-22 大研医器株式会社 ポンプユニット及びその製造方法
DE102016112553B4 (de) * 2016-07-08 2020-07-02 Koge Micro Tech Co., Ltd. Piezoelektrische pumpe und betriebsverfahren derselben
JP6463323B2 (ja) 2016-12-01 2019-01-30 太陽誘電株式会社 無線モジュール、およびその製造方法
CN206513532U (zh) * 2017-02-24 2017-09-22 研能科技股份有限公司 流体输送装置
CN110537397B (zh) 2017-04-19 2021-05-14 株式会社村田制作所 模块
CN207145684U (zh) * 2017-07-07 2018-03-27 温州市海格阀门有限公司 密封止回阀
CN110513280A (zh) * 2018-05-21 2019-11-29 研能科技股份有限公司 微型输送装置
CN112166251B (zh) * 2018-05-31 2024-04-02 株式会社村田制作所 流体控制装置
JP7063390B2 (ja) 2018-09-28 2022-05-09 株式会社村田製作所 電子部品モジュール

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