JP7400939B2 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
JP7400939B2
JP7400939B2 JP2022503197A JP2022503197A JP7400939B2 JP 7400939 B2 JP7400939 B2 JP 7400939B2 JP 2022503197 A JP2022503197 A JP 2022503197A JP 2022503197 A JP2022503197 A JP 2022503197A JP 7400939 B2 JP7400939 B2 JP 7400939B2
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JP
Japan
Prior art keywords
main surface
main plate
main
control device
fluid control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022503197A
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English (en)
Japanese (ja)
Other versions
JPWO2021171917A5 (https=
JPWO2021171917A1 (https=
Inventor
友徳 川端
伸拓 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2021171917A1 publication Critical patent/JPWO2021171917A1/ja
Publication of JPWO2021171917A5 publication Critical patent/JPWO2021171917A5/ja
Application granted granted Critical
Publication of JP7400939B2 publication Critical patent/JP7400939B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezoelectric benders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0015—Diaphragm or membrane valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Reciprocating Pumps (AREA)
JP2022503197A 2020-02-26 2021-02-01 流体制御装置 Active JP7400939B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020030019 2020-02-26
JP2020030019 2020-02-26
PCT/JP2021/003549 WO2021171917A1 (ja) 2020-02-26 2021-02-01 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2021171917A1 JPWO2021171917A1 (https=) 2021-09-02
JPWO2021171917A5 JPWO2021171917A5 (https=) 2022-09-29
JP7400939B2 true JP7400939B2 (ja) 2023-12-19

Family

ID=77490134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022503197A Active JP7400939B2 (ja) 2020-02-26 2021-02-01 流体制御装置

Country Status (5)

Country Link
US (2) US12259057B2 (https=)
JP (1) JP7400939B2 (https=)
CN (2) CN115210469B (https=)
DE (1) DE112021000365B4 (https=)
WO (1) WO2021171917A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2599820B (en) * 2019-07-03 2023-04-26 Murata Manufacturing Co Fluid control apparatus
JP7435785B2 (ja) * 2020-07-17 2024-02-21 株式会社村田製作所 流体制御装置
TWI797853B (zh) * 2021-11-29 2023-04-01 研能科技股份有限公司 氣體傳輸裝置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003214349A (ja) 2002-01-24 2003-07-30 Matsushita Electric Ind Co Ltd マイクロポンプおよびその製作方法
JP2004308465A (ja) 2003-04-03 2004-11-04 Star Micronics Co Ltd 定量搬送ポンプ
WO2016133024A1 (ja) 2015-02-17 2016-08-25 大研医器株式会社 ポンプユニット及びその製造方法
WO2019230159A1 (ja) 2018-05-31 2019-12-05 株式会社村田製作所 ポンプ

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3888015B2 (ja) * 1999-12-22 2007-02-28 松下電工株式会社 圧電ダイヤフラムポンプの密封方法
CN200978996Y (zh) * 2006-11-10 2007-11-21 王家骐 一种低阻力旋启式止回阀
CN100497992C (zh) * 2007-07-23 2009-06-10 南阳淅减汽车减振器有限公司 泵式位移相关变阻尼减振器
CN102884352B (zh) * 2010-03-05 2014-06-18 弗兰霍菲尔运输应用研究公司 弯曲换能器、微型泵和微型阀的制造方法以及微型泵和微型阀
JP2012159935A (ja) 2011-01-31 2012-08-23 Murata Mfg Co Ltd 電子部品モジュール、電子部品モジュールの製造方法、多機能カード
JP5766513B2 (ja) * 2011-05-31 2015-08-19 山下ゴム株式会社 液封防振装置
CN104235439A (zh) * 2013-06-13 2014-12-24 上海熊猫机械(集团)有限公司 一种防倒流阀
KR101983142B1 (ko) 2013-06-28 2019-08-28 삼성전기주식회사 반도체 패키지
JP6130759B2 (ja) * 2013-09-09 2017-05-17 株式会社Ｓｏｋｅｎ 圧縮機
DE102016112553B4 (de) * 2016-07-08 2020-07-02 Koge Micro Tech Co., Ltd. Piezoelektrische pumpe und betriebsverfahren derselben
JP6463323B2 (ja) 2016-12-01 2019-01-30 太陽誘電株式会社 無線モジュール、およびその製造方法
CN206513532U (zh) * 2017-02-24 2017-09-22 研能科技股份有限公司 流体输送装置
CN110537397B (zh) 2017-04-19 2021-05-14 株式会社村田制作所 模块
CN207145684U (zh) * 2017-07-07 2018-03-27 温州市海格阀门有限公司 密封止回阀
CN110513280A (zh) * 2018-05-21 2019-11-29 研能科技股份有限公司 微型输送装置
JP7063390B2 (ja) 2018-09-28 2022-05-09 株式会社村田製作所 電子部品モジュール

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003214349A (ja) 2002-01-24 2003-07-30 Matsushita Electric Ind Co Ltd マイクロポンプおよびその製作方法
JP2004308465A (ja) 2003-04-03 2004-11-04 Star Micronics Co Ltd 定量搬送ポンプ
WO2016133024A1 (ja) 2015-02-17 2016-08-25 大研医器株式会社 ポンプユニット及びその製造方法
WO2019230159A1 (ja) 2018-05-31 2019-12-05 株式会社村田製作所 ポンプ

Also Published As

Publication number Publication date
JPWO2021171917A1 (https=) 2021-09-02
DE112021000365B4 (de) 2025-05-08
CN119957476A (zh) 2025-05-09
US12259057B2 (en) 2025-03-25
CN115210469A (zh) 2022-10-18
CN115210469B (zh) 2025-03-04
US20250172217A1 (en) 2025-05-29
WO2021171917A1 (ja) 2021-09-02
DE112021000365T5 (de) 2022-10-20
US20220381361A1 (en) 2022-12-01

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