JP2023025278A - 発光素子 - Google Patents
発光素子 Download PDFInfo
- Publication number
- JP2023025278A JP2023025278A JP2022200323A JP2022200323A JP2023025278A JP 2023025278 A JP2023025278 A JP 2023025278A JP 2022200323 A JP2022200323 A JP 2022200323A JP 2022200323 A JP2022200323 A JP 2022200323A JP 2023025278 A JP2023025278 A JP 2023025278A
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- layer
- semiconductor layer
- conductive semiconductor
- light emitting
- electrode
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Images
Classifications
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
- H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
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- G—PHYSICS
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/14—Digital output to display device ; Cooperation and interconnection of the display device with other functional units
- G06F3/147—Digital output to display device ; Cooperation and interconnection of the display device with other functional units using display panels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H—ELECTRICITY
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Abstract
Description
発光積層パターンの表面に対応しない外側面を含んでもよい。ここで、上記第1領域における上記第1導電性半導体層の外周面は上記絶縁被膜の内側面に一致し、上記第2領域における上記第1導電性半導体層の外周面は上記絶縁被膜の外側面に一致してもよい。
い。
の発光素子を下から見た斜視図であり、図1cは図1aの発光素子を上から見た概略的な平面図であり、図1dは図1aのI~I’線に沿った断面図である。
バーされない第1導電性半導体層11の外周面11_2の一部を「第2外周面」と称し、図面符号の混乱を防ぐために上記第2外周面に他の図面符号「11_2b」を付した。
周長C2と同一であってもよい。即ち、第1導電性半導体層11の第1外周面11_2aの周長は、絶縁被膜14の内側面14_3aに取り囲まれた発光積層パターン10の表面の周長C1または境界面11_3の周長C1に該当し、上記第1導電性半導体層11の第2外周面11_2bの周長は上記第1導電性半導体層11の下部面11_1の周長C2に該当することができる。
板1が適用される製品に応じてサイズと直径が異なっていてもよく、エピタキシャル成長による積層構造による反りを低減することができる形態で製造されることができる。基板1の形状は円形に限定されず、長方形などの多角形であってもよい。
層12は400nm~900nmの波長を有する光を放出することができる。活性層12は二重ヘテロ構造(double heterostructure)を使用することができる。実施例に応じて、活性層12の上部面12_2及び/または下部面12_1には、導電性ドーパントがドープされたクラッド層(不図示)がさらに形成されてもよい。
方性(isotropic)エッチングが行われ、全ての方向にエッチングが行われるが、これとは異なり、ドライエッチング法は、溝部HMを形成するための深さ方向が主にエッチングされるエッチングが可能であり、溝部HMのサイズ及び間隔などを所望するパターンに形成することができる。
。絶縁被膜14によりカバーされる第1導電性半導体層11の外周面11_2の残りの部分は絶縁被膜14の内側面14_3aに一致し、上記絶縁被膜14の内側面14_3aと接触することができる。これにより、絶縁被膜14によりカバーされない第1導電性半導体層11の外周面11_2の一部と上記絶縁被膜14によりカバーされる第1導電性半導体層11の外周面11_2の残りの部分は、互いに異なる周長外周を有することができる。例えば、外部に露出された第1導電性半導体層11の外周面11_2の一部の周長外周が絶縁被膜14によりカバーされる第1導電性半導体層11の外周面11_2の残りの周長外周より大きくてもよい。第1導電性半導体層11の外周面11_2の一部の外周周長は上記第1導電性半導体層11の下部面11_1の周長外周C2に該当し、上記第1導電性半導体層11の外周面11_2の残りの周長外周は絶縁被膜14によりカバーされる発光積層パターン10の表面周長外周C1に該当することができる。
、重複する説明を避けるために上述した実施例と異なる点を中心として説明する。本実施例において特に説明しない部分は上述した一実施例に従い、同じ番号は同じ構成要素を、類似する番号は類似する構成要素を示す。
導体層11の第1外周面11_2aの周長は境界面11_3の周長C1に該当してもよい。
bの上部面15b_1と同じ面上に提供されてもよい。
II~III’線に沿った断面図である。
よい。このような場合、絶縁被膜14の下部面14_1が第1導電性半導体層11の下部面11_1より活性層12に隣接して配置されてもよい。
チング工程により、第2電極層15bの上部面15b_1が外部に露出されてもよい。
た実施例と異なる点を中心として説明する。本実施例において特に説明しない部分は上述した一実施例に従い、同じ番号は同じ構成要素を、類似する番号は類似する構成要素を示す。
層11の下部面11_1の間の間隔d1より大きいか、その逆の場合も可能である。
光積層パターン10のそれぞれの側面、犠牲層3の凹凸側面3_3、及び犠牲層3の凹凸下面3_2の一部を覆い、下部絶縁物質層14cは露出された犠牲層3の一領域B、即ち、犠牲層3の凹凸下面3_2の残りを完全に覆うことができる。
。特に、第1導電性半導体層11の下部面11_1は、絶縁被膜14の下部面14_1より活性層12にさらに隣接して位置してもよい。
井戸構造(Double Hetero Structure)、多重井戸構造、単一量子井戸構造、多重量子井戸(MQW: MultiQuantum Well)構造、量子ドット構造または量子細線構造のうち何れか1つを含んでもよい。
、Au、Ni、ITO、IZO、ITZO及びこれらの酸化物または合金などを単独または混合して使用することができる。本発明の一実施例において、第1電極層15aはBeが拡散(diffusion)されたp型のGaP層で、その厚さは20nm以下であってもよいが、本発明はこれに限定されない。第1電極層15aは、Au、AuBe、Ni、NiZn、NiBe、Pd、PdZn、及びPdBeのうち少なくとも1つを含む層との熱処理工程により形成されてもよい。このような熱処理は、第1電極層15aのコンタクト抵抗を減少させ、透過度を増加させることができる。
。本発明の一実施例において、第1導電性半導体層11の下部面11_1は絶縁被膜14の下部面14_1から下部方向に突出してもよい。このような場合、絶縁被膜14の下部面14_1は、第1導電性半導体層11の下部面11_1より活性層12に隣接して配置されてもよい。
形成されてもよい。
ミック接触する電極層15であってもよい。
外周面11_2の一部と上記絶縁被膜14によりカバーされる第1導電性半導体層11の外周面11_2の残りの部分は、互いに相違する周長を有する。例えば、第1導電性半導体層11の外周面11_2の一部の周長が第1導電性半導体層11の外周面11_2の残りの部分の周長より大きくてもよい。これにより、絶縁被膜14によりカバーされずに外部に露出された第1導電性半導体層11の直径D2を絶縁被膜14によりカバーされる第1導電性半導体層11の直径D1より大きくすることができる。
例に従い、同じ番号は同じ構成要素を、類似する番号は類似する構成要素を示す。
るアクティブマトリクス型表示装置が主流となっているが、本発明はこれに限定されず、画素PXLグループ別に点灯するパッシブマトリックス型表示装置も発光素子LDを駆動するための構成要素(例えば、第1及び第2電極など)を使用することができる。
を介して画素PXLに発光制御信号を供給する発光駆動部と、データ線を介して画素PXLにデータ信号を供給するデータ駆動部と、タイミング制御部と、を含んでもよい。タイミング制御部は、走査駆動部、発光駆動部、及びデータ駆動部を制御することができる。
線Siに接続される。
されてもよい。
部PCL、及び表示素子層DPLが設けられてもよい。
線CNL1、CNL2と、複数の発光素子LDと、第1及び第2コンタクト電極CNE1、CNE2と、を含んでもよい。
もよい。このような場合、絶縁被膜14の上部面14_2と電極層15の上部面15_1は、同じ面上に設けられてもよい。
列される前に、第1電極RELには第1連結配線CNL1を介して第1整列電圧が印加され、第2電極REL2には第2連結配線CNL2を介して第2整列電圧が印加されてもよい。第1整列電圧と第2整列電圧は互いに異なる電圧レベルを有してもよい。第1電極REL1と第2電極REL2のそれぞれに互いに異なる電圧レベルを有する所定の整列電圧が印加されることによって、第1電極REL1と第2電極REL2の間に電界が形成されてもよい。電界により第1電極REL1と第2電極REL2の間の保護層PSV上に発光素子LDが整列されてもよい。
zinc oxide)のような導電性酸化物、PEDOTのような導電性高分子などが含まれてもよい。
出光効率を向上させる反射部材として機能してもよい。
_2の一部が露出される場合、第1導電性半導体層11の露出面積を増加させることができる。第1導電性半導体層11の露出面積が増加すると、各発光素子LDの第1導電性半導体層11と第1コンタクト電極CNE1の有効コンタクト面積をさらに確保することができる。
Claims (1)
- 第1導電性半導体層と、
前記第1導電性半導体層の一面上に配置された活性層と、
前記活性層上に配置された第2導電性半導体層と、
前記第1導電性半導体層、前記活性層、及び前記第2導電性半導体層のそれぞれの外周面を取り囲む絶縁被膜と、
前記第2導電性半導体層上に配置された電極層と、を含み、
前記第1導電性半導体層は、その外周面が前記絶縁被膜によりカバーされる第1領域及び前記絶縁被膜によりカバーされない第2領域を含み、
前記第1導電性半導体層、前記活性層、前記第2導電性半導体層、及び前記電極層は順に積層されて発光積層パターンを構成し、
前記絶縁被膜は、前記発光積層パターンの表面に対応する内側面と前記内側面に対向し前記発光積層パターンの表面に対応しない外側面を含み、
前記第1領域における前記第1導電性半導体層の外周面は前記絶縁被膜の内側面に一致し、前記第2領域における前記第1導電性半導体層の外周面は前記絶縁被膜の外側面に一致し、
前記絶縁被膜の下端と対向する上端は、前記第2導電性半導体層が設けられない前記電極層の一面と同じ面上に位置し、
前記電極層の外周面は、前記絶縁被膜の内側面に一致することを特徴とする発光素子。
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EP (1) | EP3848983A4 (ja) |
JP (3) | JP7197686B2 (ja) |
KR (2) | KR102608987B1 (ja) |
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KR20200063411A (ko) | 2018-11-27 | 2020-06-05 | 삼성디스플레이 주식회사 | 발광 소자, 이의 제조 방법 및 발광 소자를 구비한 표시 장치 |
KR20210035362A (ko) * | 2019-09-23 | 2021-04-01 | 삼성디스플레이 주식회사 | 표시 장치 |
KR20210065239A (ko) * | 2019-11-26 | 2021-06-04 | 삼성디스플레이 주식회사 | 표시 장치 |
JP7424038B2 (ja) * | 2019-12-23 | 2024-01-30 | セイコーエプソン株式会社 | 発光装置、および、プロジェクター |
KR20210102560A (ko) * | 2020-02-11 | 2021-08-20 | 삼성디스플레이 주식회사 | 표시 장치 |
KR20210124564A (ko) * | 2020-04-03 | 2021-10-15 | 삼성디스플레이 주식회사 | 표시 장치 |
US20230223492A1 (en) * | 2020-04-27 | 2023-07-13 | Kookmin University Industry Academy Cooperation Foundation | Micro-nanopin led element and method for producing same |
KR20220014388A (ko) * | 2020-07-24 | 2022-02-07 | 삼성디스플레이 주식회사 | 발광 소자, 이의 제조 방법 및 표시 장치 |
KR20220019902A (ko) * | 2020-08-10 | 2022-02-18 | 삼성디스플레이 주식회사 | 발광 소자 및 이를 이용한 표시 장치와 그의 제조 방법 |
KR20220030425A (ko) * | 2020-08-31 | 2022-03-11 | 삼성디스플레이 주식회사 | 발광 소자, 그의 제조 방법, 및 이를 포함한 표시 장치 |
KR20220030424A (ko) * | 2020-08-31 | 2022-03-11 | 삼성디스플레이 주식회사 | 발광 소자, 그의 제조 방법, 및 이를 포함한 표시 장치 |
KR20220028944A (ko) | 2020-08-31 | 2022-03-08 | 삼성전자주식회사 | 나노 막대 발광 소자 및 그 제조 방법 |
KR20220078016A (ko) * | 2020-12-02 | 2022-06-10 | 삼성디스플레이 주식회사 | 표시 장치 및 발광 소자의 제조 방법 |
KR20220083939A (ko) * | 2020-12-11 | 2022-06-21 | 삼성디스플레이 주식회사 | 발광 소자, 발광 소자의 제조 방법, 및 이를 포함하는 표시 장치 |
KR20220085931A (ko) * | 2020-12-15 | 2022-06-23 | 삼성디스플레이 주식회사 | 발광 다이오드 및 이를 포함한 표시 장치 |
KR102573265B1 (ko) * | 2021-03-25 | 2023-08-31 | 국민대학교산학협력단 | 초박형 led 전극어셈블리 및 이의 제조방법 |
KR20220145435A (ko) * | 2021-04-21 | 2022-10-31 | 삼성디스플레이 주식회사 | 발광 소자, 이를 포함하는 표시 장치, 및 반도체 구조물 |
KR20230092089A (ko) * | 2021-12-16 | 2023-06-26 | 삼성디스플레이 주식회사 | 발광 소자 및 발광 소자의 제조 방법 |
WO2023152873A1 (ja) * | 2022-02-10 | 2023-08-17 | 日本電信電話株式会社 | ナノ構造デバイスの作製方法 |
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KR102608987B1 (ko) | 2023-12-05 |
EP3848983A1 (en) | 2021-07-14 |
JP2021536134A (ja) | 2021-12-23 |
KR20200029100A (ko) | 2020-03-18 |
KR20230167334A (ko) | 2023-12-08 |
JP7197686B2 (ja) | 2022-12-27 |
JP7280430B2 (ja) | 2023-05-23 |
JP7499916B2 (ja) | 2024-06-14 |
CN112655097A (zh) | 2021-04-13 |
EP3848983A4 (en) | 2022-06-15 |
WO2020050468A1 (ko) | 2020-03-12 |
US20210202450A1 (en) | 2021-07-01 |
JP2023106470A (ja) | 2023-08-01 |
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