JP2022537312A - 不揮発性メモリ・セル、不揮発性メモリ・セル・アレイ、及びこれらの製造方法 - Google Patents
不揮発性メモリ・セル、不揮発性メモリ・セル・アレイ、及びこれらの製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title description 3
- 239000004020 conductor Substances 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 51
- 239000002184 metal Substances 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 28
- 229910044991 metal oxide Inorganic materials 0.000 claims description 16
- 150000004706 metal oxides Chemical class 0.000 claims description 16
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 8
- 229910052718 tin Inorganic materials 0.000 claims description 8
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910004166 TaN Inorganic materials 0.000 claims description 3
- 229910052741 iridium Inorganic materials 0.000 claims description 3
- 229910052707 ruthenium Inorganic materials 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
- 230000001590 oxidative effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 40
- 229920002120 photoresistant polymer Polymers 0.000 description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 7
- 229910052760 oxygen Inorganic materials 0.000 description 7
- 239000001301 oxygen Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 238000003491 array Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- -1 Ta2O5 Chemical class 0.000 description 3
- 229910003070 TaOx Inorganic materials 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910003087 TiOx Inorganic materials 0.000 description 1
- 229910003134 ZrOx Inorganic materials 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007334 memory performance Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- HLLICFJUWSZHRJ-UHFFFAOYSA-N tioxidazole Chemical compound CCCOC1=CC=C2N=C(NC(=O)OC)SC2=C1 HLLICFJUWSZHRJ-UHFFFAOYSA-N 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/253—Multistable switching devices, e.g. memristors having three or more electrodes, e.g. transistor-like devices
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/0002—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using resistive RAM [RRAM] elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
- H10B63/30—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices comprising selection components having three or more electrodes, e.g. transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/061—Shaping switching materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
- H10N70/8265—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices on sidewalls of dielectric structures, e.g. mesa-shaped or cup-shaped devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C2213/00—Indexing scheme relating to G11C13/00 for features not covered by this group
- G11C2213/30—Resistive cell, memory material aspects
- G11C2213/32—Material having simple binary metal oxide structure
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- Semiconductor Memories (AREA)
Abstract
Description
本出願は、2019年10月30日に出願された米国特許出願第16/669,391号「NON-VOLATILE MEMORY CELL, NON-VOLATILE MEMORY CELL ARRAY, AND METHOD OF MANUFACTURING THE SAME」、及び2019年6月17日に出願された米国特許仮出願第62/862,307号「NON-VOLATILE MEMORY CELL, NON-VOLATILE MEMORY CELL ARRAY, AND METHOD OF MANUFACTURING THE SAME」に対する優先権を主張する。米国特許出願第16/669,391号は、米国特許仮出願第62/862,307号に対する優先権及びその恩恵を主張する。上記の出願は、参照によってそれらの全体が本明細書に組み込まれている。
Claims (20)
- 下部電極と、
導電材料を含んでいる上部電極と、
前記下部電極と前記上部電極の間に挿入された抵抗層と、
前記上部電極及び前記抵抗層の側面を覆う側部であって、前記導電材料の酸化物を含んでいる、側部と、
前記上部電極の上に配置された接触ワイヤと、を備えている不揮発性メモリ・セルであって、
前記接触ワイヤの幅が、前記側部の外側面間の幅より小さい、不揮発性メモリ・セル。 - 前記側部の上に配置された絶縁層と、
前記側部及び前記絶縁層の外面を覆う側壁と、をさらに備え、
前記接触ワイヤの側面が、前記絶縁層及び前記側壁と接触する、請求項1に記載の不揮発性メモリ・セル。 - 前記接触ワイヤの底面の一部及び前記接触ワイヤの側面の一部が前記側部と接触する、請求項1に記載の不揮発性メモリ・セル。
- 前記接触ワイヤの前記幅が前記上部電極の幅より大きい、請求項1に記載の不揮発性メモリ・セル。
- 前記下部電極が、TiN、TaN、又はWのうちの少なくとも一つを含む、請求項1に記載の不揮発性メモリ・セル。
- 前記上部電極が、TiN、TaN、Ru、Pt、Ir、又はWのうちの少なくとも一つを含む、請求項1に記載の不揮発性メモリ・セル。
- 前記抵抗層が金属酸化物を含む、請求項1に記載の不揮発性メモリ・セル。
- 前記抵抗層が、第1の膜及び前記第1の膜の上に配置された第2の膜を含み、前記第2の膜が第1の膜と異なっている、請求項1に記載の不揮発性メモリ・セル。
- 前記第1の膜が第1の金属酸化物を含み、
前記第2の膜が第2の金属酸化物を含む、請求項8に記載の不揮発性メモリ・セル。 - 前記側部が前記抵抗層の酸化物をさらに含む、請求項1に記載の不揮発性メモリ・セル。
- 前記下部電極がビア・ホール内に配置され、金属線に接続される、請求項1に記載の不揮発性メモリ・セル。
- 不揮発性メモリ・セルを形成するための方法であって、
第1の誘電体層を第1の金属線の上に形成することと、
第1のビア・ホールをエッチングして、前記第1の金属線に達することと、
前記第1のビア・ホール内に下部電極を形成することと、
抵抗層、上部電極、及び第2の誘電体層を、前記下部電極及び前記第1の誘電体層の上に形成することと、
前記抵抗層及び前記上部電極を酸化して、前記上部電極及び前記抵抗層の側面を覆う側部を形成することと、
前記第2の誘電体層及び前記側部を覆う側壁層を形成することと、
前記上部電極に達するために、前記側壁層及び前記第2の誘電体層を貫通する第2のビア・ホールを形成することと、
接触ワイヤの幅が前記側部の外側面間の幅より小さくなるように、前記接触ワイヤを前記第2のビア・ホール内に形成することと、を含む、方法。 - 前記接触ワイヤの前記幅が前記上部電極の幅より大きい、請求項12に記載の方法。
- 前記接触ワイヤの側面が前記側壁層及び前記第2の誘電体層と接触する、請求項12に記載の方法。
- 前記接触ワイヤの底面の一部及び前記接触ワイヤの側面の一部が前記側部と接触する、請求項12に記載の方法。
- 前記下部電極が、TiN、TaN、又はWのうちの少なくとも一つを含む、請求項12に記載の方法。
- 前記上部電極が、TiN、TaN、Ru、Pt、Ir、又はWのうちの少なくとも一つを含む、請求項12に記載の方法。
- 前記抵抗層が金属酸化物を含む、請求項12に記載の方法。
- 前記抵抗層が、第1の膜及び前記第1の膜の上に配置された第2の膜を含み、前記第2の膜が前記第1の膜と異なっている、請求項12に記載の方法。
- 前記第1の膜が第1の金属酸化物を含み、
前記第2の膜が第2の金属酸化物を含む、請求項19に記載の方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962862307P | 2019-06-17 | 2019-06-17 | |
US62/862,307 | 2019-06-17 | ||
US16/669,391 US11227994B2 (en) | 2019-06-17 | 2019-10-30 | Non-volatile memory cell, non-volatile memory cell array, and method of manufacturing the same |
US16/669,391 | 2019-10-30 | ||
PCT/US2020/036832 WO2020257005A1 (en) | 2019-06-17 | 2020-06-09 | Non-volatile memory cell, non-volatile memory cell array, and method of manufacturing the same |
Publications (2)
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JP2022537312A true JP2022537312A (ja) | 2022-08-25 |
JP7383735B2 JP7383735B2 (ja) | 2023-11-20 |
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US (2) | US11227994B2 (ja) |
JP (1) | JP7383735B2 (ja) |
CN (2) | CN113424318B (ja) |
WO (1) | WO2020257005A1 (ja) |
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US11844291B2 (en) * | 2021-06-21 | 2023-12-12 | United Microelectronics Corp. | Semiconductor memory device and fabrication method thereof |
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- 2020-06-09 CN CN202211085415.4A patent/CN115440883A/zh active Pending
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JP7383735B2 (ja) | 2023-11-20 |
US11227994B2 (en) | 2022-01-18 |
US20220093856A1 (en) | 2022-03-24 |
CN113424318A (zh) | 2021-09-21 |
CN115440883A (zh) | 2022-12-06 |
US11950519B2 (en) | 2024-04-02 |
CN113424318B (zh) | 2022-09-27 |
WO2020257005A1 (en) | 2020-12-24 |
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