JP2022126852A5 - - Google Patents
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- Publication number
- JP2022126852A5 JP2022126852A5 JP2022104962A JP2022104962A JP2022126852A5 JP 2022126852 A5 JP2022126852 A5 JP 2022126852A5 JP 2022104962 A JP2022104962 A JP 2022104962A JP 2022104962 A JP2022104962 A JP 2022104962A JP 2022126852 A5 JP2022126852 A5 JP 2022126852A5
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- region
- acoustic wave
- busbar
- propagation speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 57
- 239000002184 metal Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 230000000644 propagated effect Effects 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- 229910003327 LiNbO3 Inorganic materials 0.000 claims 1
- 229910012463 LiTaO3 Inorganic materials 0.000 claims 1
- 239000013013 elastic material Substances 0.000 claims 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022104962A JP7377920B2 (ja) | 2018-11-16 | 2022-06-29 | 弾性表面波素子 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018215986A JP7178881B2 (ja) | 2018-11-16 | 2018-11-16 | 弾性表面波素子 |
| JP2022104962A JP7377920B2 (ja) | 2018-11-16 | 2022-06-29 | 弾性表面波素子 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018215986A Division JP7178881B2 (ja) | 2018-11-16 | 2018-11-16 | 弾性表面波素子 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2022126852A JP2022126852A (ja) | 2022-08-30 |
| JP2022126852A5 true JP2022126852A5 (https=) | 2023-01-31 |
| JP7377920B2 JP7377920B2 (ja) | 2023-11-10 |
Family
ID=70726931
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018215986A Active JP7178881B2 (ja) | 2018-11-16 | 2018-11-16 | 弾性表面波素子 |
| JP2022104962A Active JP7377920B2 (ja) | 2018-11-16 | 2022-06-29 | 弾性表面波素子 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018215986A Active JP7178881B2 (ja) | 2018-11-16 | 2018-11-16 | 弾性表面波素子 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US11683019B2 (https=) |
| JP (2) | JP7178881B2 (https=) |
| CN (1) | CN111200415B (https=) |
| TW (1) | TWI762832B (https=) |
Families Citing this family (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11323096B2 (en) | 2018-06-15 | 2022-05-03 | Resonant Inc. | Transversely-excited film bulk acoustic resonator with periodic etched holes |
| US12170516B2 (en) | 2018-06-15 | 2024-12-17 | Murata Manufacturing Co., Ltd. | Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers |
| US12375056B2 (en) | 2018-06-15 | 2025-07-29 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators |
| US12095446B2 (en) | 2018-06-15 | 2024-09-17 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch |
| US12095441B2 (en) | 2018-06-15 | 2024-09-17 | Murata Manufacturing Co., Ltd. | Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers |
| US12244295B2 (en) | 2018-06-15 | 2025-03-04 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer |
| US11916539B2 (en) | 2020-02-28 | 2024-02-27 | Murata Manufacturing Co., Ltd. | Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators |
| US12218650B2 (en) | 2018-06-15 | 2025-02-04 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator |
| US11349452B2 (en) | 2018-06-15 | 2022-05-31 | Resonant Inc. | Transversely-excited film bulk acoustic filters with symmetric layout |
| WO2020092414A2 (en) | 2018-10-31 | 2020-05-07 | Resonant Inc. | Solidly-mounted transversely-excited film bulk acoustic resonator |
| JP2020145567A (ja) * | 2019-03-06 | 2020-09-10 | 株式会社村田製作所 | 弾性波装置 |
| CN118353412A (zh) | 2019-04-05 | 2024-07-16 | 株式会社村田制作所 | 横向激励薄膜体声波谐振器封装和方法 |
| CN113940000B (zh) * | 2019-06-14 | 2026-01-23 | 株式会社村田制作所 | 弹性波装置 |
| US11652466B2 (en) * | 2019-08-29 | 2023-05-16 | Skyworks Solutions, Inc. | Suppression of transverse mode spurious signals in surface acoustic wave devices utilizing a dense film above gap region of interdigital transducer electrodes |
| US11705883B2 (en) * | 2019-10-24 | 2023-07-18 | Skyworks Solutions, Inc. | Acoustic wave resonator with mass loading strip for suppression of transverse mode |
| US11936367B2 (en) | 2019-10-31 | 2024-03-19 | Skyworks Solutions, Inc. | Acoustic wave device with velocity reduction cover |
| US20210344322A1 (en) * | 2020-04-30 | 2021-11-04 | RF360 Europe GmbH | Surface acoustic wave electroacoustic device for reduced transversal modes |
| US10992282B1 (en) | 2020-06-18 | 2021-04-27 | Resonant Inc. | Transversely-excited film bulk acoustic resonators with electrodes having a second layer of variable width |
| JP7499624B2 (ja) * | 2020-06-30 | 2024-06-14 | ＮＤＫ ＳＡＷ ｄｅｖｉｃｅｓ株式会社 | 弾性表面波素子 |
| US11742828B2 (en) | 2020-06-30 | 2023-08-29 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with symmetric diaphragm |
| US11405019B2 (en) | 2020-10-05 | 2022-08-02 | Resonant Inc. | Transversely-excited film bulk acoustic resonator matrix filters |
| US11405017B2 (en) | 2020-10-05 | 2022-08-02 | Resonant Inc. | Acoustic matrix filters and radios using acoustic matrix filters |
| US12166468B2 (en) | 2021-01-15 | 2024-12-10 | Murata Manufacturing Co., Ltd. | Decoupled transversely-excited film bulk acoustic resonators for high power filters |
| US11239816B1 (en) | 2021-01-15 | 2022-02-01 | Resonant Inc. | Decoupled transversely-excited film bulk acoustic resonators |
| US12368431B2 (en) | 2021-02-22 | 2025-07-22 | Skyworks Solutions, Inc. | Acoustic wave filter with multiple acoustic wave devices on a subtrate |
| US12160220B2 (en) | 2021-04-30 | 2024-12-03 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures |
| US12255607B2 (en) | 2021-04-30 | 2025-03-18 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures |
| JP7627611B2 (ja) * | 2021-04-30 | 2025-02-06 | 太陽誘電株式会社 | 弾性波共振器、フィルタ、およびマルチプレクサ |
| US12255630B2 (en) | 2021-04-30 | 2025-03-18 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures |
| US12425000B2 (en) | 2021-08-03 | 2025-09-23 | Skyworks Solutions, Inc. | Low velocity surface acoustic wave device |
| CN113839648B (zh) * | 2021-09-14 | 2023-08-29 | 常州承芯半导体有限公司 | 声表面波谐振装置及形成方法、滤波装置及射频前端装置 |
| TWI789913B (zh) * | 2021-09-16 | 2023-01-11 | 台灣嘉碩科技股份有限公司 | 利用有效反射結構的表面聲波諧振器及濾波器 |
| CN118251837A (zh) * | 2021-11-12 | 2024-06-25 | 株式会社村田制作所 | 弹性波装置 |
| US12261591B2 (en) | 2021-12-21 | 2025-03-25 | Skyworks Solutions, Inc. | Temperature compensated surface acoustic wave devices with multiple buried mass loading strips |
| US12424999B2 (en) | 2021-12-28 | 2025-09-23 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonators with gap dielectric stripes in busbar-electrode gaps |
| US12413196B2 (en) | 2022-02-16 | 2025-09-09 | Murata Manufacturing Co., Ltd. | Tuning acoustic resonators with back-side coating |
| US12549151B2 (en) | 2022-04-12 | 2026-02-10 | Murata Manufacturing Co., Ltd. | Transversely-excited film bulk acoustic resonator with thick dielectric layer for improved coupling |
| CN119605084A (zh) * | 2022-08-26 | 2025-03-11 | 株式会社村田制作所 | 弹性波装置 |
| CN119605080A (zh) * | 2022-08-26 | 2025-03-11 | 株式会社村田制作所 | 弹性波装置 |
| CN115473506B (zh) * | 2022-09-16 | 2023-08-22 | 南通大学 | 一种减小声表面波器件体积的方法 |
| US12489415B2 (en) | 2022-10-19 | 2025-12-02 | Murata Manufacturing Co., Ltd. | Acoustic resonator lid for thermal transport |
| CN116208115A (zh) * | 2023-02-07 | 2023-06-02 | 锐石创芯(重庆)科技有限公司 | 弹性波装置、弹性波装置的制作方法、滤波器及电子设备 |
| CN117097295B (zh) * | 2023-10-17 | 2024-02-06 | 深圳新声半导体有限公司 | 声表面波谐振器装置及其制造方法、滤波器 |
| CN118971832A (zh) * | 2024-08-01 | 2024-11-15 | 无锡芯卓湖光半导体有限公司 | 电子设备、电子元器件、声表面波谐振器及其基底和制备方法 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5221616U (https=) | 1975-08-04 | 1977-02-16 | ||
| JPS553020U (https=) | 1978-06-22 | 1980-01-10 | ||
| JP3412611B2 (ja) | 2000-09-25 | 2003-06-03 | 株式会社村田製作所 | 弾性表面波装置 |
| JP3498215B2 (ja) * | 2001-04-09 | 2004-02-16 | 株式会社村田製作所 | 弾性表面波フィルタ、弾性表面波装置および通信装置 |
| JP4821079B2 (ja) | 2001-07-04 | 2011-11-24 | 株式会社村田製作所 | 弾性表面波用のくし型電極部、弾性表面波装置、通信装置 |
| JP3929415B2 (ja) | 2003-04-23 | 2007-06-13 | 富士通メディアデバイス株式会社 | 弾性表面波デバイス |
| JP4465625B2 (ja) * | 2006-09-29 | 2010-05-19 | Ｔｄｋ株式会社 | 弾性表面波フィルタおよび弾性表面波共振器 |
| JP2009077209A (ja) * | 2007-09-21 | 2009-04-09 | Seiko Epson Corp | 弾性表面波共振子 |
| US7576471B1 (en) * | 2007-09-28 | 2009-08-18 | Triquint Semiconductor, Inc. | SAW filter operable in a piston mode |
| JP5115184B2 (ja) | 2007-12-25 | 2013-01-09 | パナソニック株式会社 | 弾性境界波デバイス、及びそれを用いたフィルタ、アンテナ共用器 |
| US8384495B2 (en) | 2008-06-06 | 2013-02-26 | Panasonic Corporation | Acoustic wave duplexer |
| US7939989B2 (en) | 2009-09-22 | 2011-05-10 | Triquint Semiconductor, Inc. | Piston mode acoustic wave device and method providing a high coupling factor |
| DE102010005596B4 (de) | 2010-01-25 | 2015-11-05 | Epcos Ag | Elektroakustischer Wandler mit verringerten Verlusten durch transversale Emission und verbesserter Performance durch Unterdrückung transversaler Moden |
| JP5697751B2 (ja) * | 2011-03-25 | 2015-04-08 | スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 | 高次横モード波を抑制した弾性波デバイス |
| JP2012227626A (ja) * | 2011-04-15 | 2012-11-15 | Panasonic Corp | 弾性表面波素子 |
| JP5797979B2 (ja) | 2011-08-31 | 2015-10-21 | 太陽誘電株式会社 | 弾性波デバイス |
| WO2014192755A1 (ja) | 2013-05-29 | 2014-12-04 | 株式会社村田製作所 | 弾性波フィルタ装置 |
| WO2014192756A1 (ja) * | 2013-05-29 | 2014-12-04 | 株式会社村田製作所 | 弾性波装置 |
| JP6494447B2 (ja) | 2015-01-20 | 2019-04-03 | 太陽誘電株式会社 | 弾性波デバイス |
| FR3042648B1 (fr) * | 2015-10-20 | 2018-09-07 | Soitec Silicon On Insulator | Dispositif a ondes acoustiques de surface et procede de fabrication associe |
| JP6483073B2 (ja) | 2015-12-14 | 2019-03-13 | 太陽誘電株式会社 | 弾性波共振器、フィルタおよびデュプレクサ |
| JP6415469B2 (ja) | 2016-03-22 | 2018-10-31 | 太陽誘電株式会社 | 弾性波共振器、フィルタおよびマルチプレクサ並びに弾性波共振器の製造方法 |
| JP6465065B2 (ja) * | 2016-04-25 | 2019-02-06 | 株式会社村田製作所 | 弾性波装置 |
| WO2018003282A1 (ja) | 2016-06-28 | 2018-01-04 | 株式会社村田製作所 | 弾性波装置 |
| JP6954799B2 (ja) * | 2017-10-20 | 2021-10-27 | 株式会社村田製作所 | 弾性波装置 |
-
2018
- 2018-11-16 JP JP2018215986A patent/JP7178881B2/ja active Active
-
2019
- 2019-11-13 CN CN201911104936.8A patent/CN111200415B/zh active Active
- 2019-11-15 TW TW108141644A patent/TWI762832B/zh active
- 2019-11-15 US US16/684,607 patent/US11683019B2/en active Active
-
2022
- 2022-06-29 JP JP2022104962A patent/JP7377920B2/ja active Active
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