TWI762832B - 聲表面波器件 - Google Patents

聲表面波器件 Download PDF

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Publication number
TWI762832B
TWI762832B TW108141644A TW108141644A TWI762832B TW I762832 B TWI762832 B TW I762832B TW 108141644 A TW108141644 A TW 108141644A TW 108141644 A TW108141644 A TW 108141644A TW I762832 B TWI762832 B TW I762832B
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TW
Taiwan
Prior art keywords
surface acoustic
acoustic wave
region
electrode fingers
bus bar
Prior art date
Application number
TW108141644A
Other languages
English (en)
Chinese (zh)
Other versions
TW202021271A (zh
Inventor
松岡直人
中村麻樹子
吉元進
Original Assignee
日商Ｎｄｋ聲表濾波器股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 日商Ｎｄｋ聲表濾波器股份有限公司 filed Critical 日商Ｎｄｋ聲表濾波器股份有限公司
Publication of TW202021271A publication Critical patent/TW202021271A/zh
Application granted granted Critical
Publication of TWI762832B publication Critical patent/TWI762832B/zh

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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/1452—Means for weighting by finger overlap length, apodisation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517—Means for weighting
    • H03H9/14529—Distributed tap
    • H03H9/14532—Series weighting; Transverse weighting
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14552—Transducers of particular shape or position comprising split fingers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/1457—Transducers having different finger widths
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
TW108141644A 2018-11-16 2019-11-15 聲表面波器件 TWI762832B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018215986A JP7178881B2 (ja) 2018-11-16 2018-11-16 弾性表面波素子
JP2018-215986 2018-11-16

Publications (2)

Publication Number Publication Date
TW202021271A TW202021271A (zh) 2020-06-01
TWI762832B true TWI762832B (zh) 2022-05-01

Family

ID=70726931

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108141644A TWI762832B (zh) 2018-11-16 2019-11-15 聲表面波器件

Country Status (4)

Country Link
US (1) US11683019B2 (https=)
JP (2) JP7178881B2 (https=)
CN (1) CN111200415B (https=)
TW (1) TWI762832B (https=)

Families Citing this family (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11323096B2 (en) 2018-06-15 2022-05-03 Resonant Inc. Transversely-excited film bulk acoustic resonator with periodic etched holes
US12170516B2 (en) 2018-06-15 2024-12-17 Murata Manufacturing Co., Ltd. Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers
US12375056B2 (en) 2018-06-15 2025-07-29 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators
US12095446B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with optimized electrode thickness, mark, and pitch
US12095441B2 (en) 2018-06-15 2024-09-17 Murata Manufacturing Co., Ltd. Transversely excited film bulk acoustic resonator with recessed interdigital transducer fingers
US12244295B2 (en) 2018-06-15 2025-03-04 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with two-layer electrodes having a narrower top layer
US11916539B2 (en) 2020-02-28 2024-02-27 Murata Manufacturing Co., Ltd. Split-ladder band N77 filter using transversely-excited film bulk acoustic resonators
US12218650B2 (en) 2018-06-15 2025-02-04 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator
US11349452B2 (en) 2018-06-15 2022-05-31 Resonant Inc. Transversely-excited film bulk acoustic filters with symmetric layout
WO2020092414A2 (en) 2018-10-31 2020-05-07 Resonant Inc. Solidly-mounted transversely-excited film bulk acoustic resonator
JP2020145567A (ja) * 2019-03-06 2020-09-10 株式会社村田製作所 弾性波装置
CN118353412A (zh) 2019-04-05 2024-07-16 株式会社村田制作所 横向激励薄膜体声波谐振器封装和方法
CN113940000B (zh) * 2019-06-14 2026-01-23 株式会社村田制作所 弹性波装置
US11652466B2 (en) * 2019-08-29 2023-05-16 Skyworks Solutions, Inc. Suppression of transverse mode spurious signals in surface acoustic wave devices utilizing a dense film above gap region of interdigital transducer electrodes
US11705883B2 (en) * 2019-10-24 2023-07-18 Skyworks Solutions, Inc. Acoustic wave resonator with mass loading strip for suppression of transverse mode
US11936367B2 (en) 2019-10-31 2024-03-19 Skyworks Solutions, Inc. Acoustic wave device with velocity reduction cover
US20210344322A1 (en) * 2020-04-30 2021-11-04 RF360 Europe GmbH Surface acoustic wave electroacoustic device for reduced transversal modes
US10992282B1 (en) 2020-06-18 2021-04-27 Resonant Inc. Transversely-excited film bulk acoustic resonators with electrodes having a second layer of variable width
JP7499624B2 (ja) * 2020-06-30 2024-06-14 ＮＤＫ ＳＡＷ ｄｅｖｉｃｅｓ株式会社 弾性表面波素子
US11742828B2 (en) 2020-06-30 2023-08-29 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with symmetric diaphragm
US11405019B2 (en) 2020-10-05 2022-08-02 Resonant Inc. Transversely-excited film bulk acoustic resonator matrix filters
US11405017B2 (en) 2020-10-05 2022-08-02 Resonant Inc. Acoustic matrix filters and radios using acoustic matrix filters
US12166468B2 (en) 2021-01-15 2024-12-10 Murata Manufacturing Co., Ltd. Decoupled transversely-excited film bulk acoustic resonators for high power filters
US11239816B1 (en) 2021-01-15 2022-02-01 Resonant Inc. Decoupled transversely-excited film bulk acoustic resonators
US12368431B2 (en) 2021-02-22 2025-07-22 Skyworks Solutions, Inc. Acoustic wave filter with multiple acoustic wave devices on a subtrate
US12160220B2 (en) 2021-04-30 2024-12-03 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures
US12255607B2 (en) 2021-04-30 2025-03-18 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with buried oxide strip acoustic confinement structures
JP7627611B2 (ja) * 2021-04-30 2025-02-06 太陽誘電株式会社 弾性波共振器、フィルタ、およびマルチプレクサ
US12255630B2 (en) 2021-04-30 2025-03-18 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with oxide strip acoustic confinement structures
US12425000B2 (en) 2021-08-03 2025-09-23 Skyworks Solutions, Inc. Low velocity surface acoustic wave device
CN113839648B (zh) * 2021-09-14 2023-08-29 常州承芯半导体有限公司 声表面波谐振装置及形成方法、滤波装置及射频前端装置
TWI789913B (zh) * 2021-09-16 2023-01-11 台灣嘉碩科技股份有限公司 利用有效反射結構的表面聲波諧振器及濾波器
CN118251837A (zh) * 2021-11-12 2024-06-25 株式会社村田制作所 弹性波装置
US12261591B2 (en) 2021-12-21 2025-03-25 Skyworks Solutions, Inc. Temperature compensated surface acoustic wave devices with multiple buried mass loading strips
US12424999B2 (en) 2021-12-28 2025-09-23 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with gap dielectric stripes in busbar-electrode gaps
US12413196B2 (en) 2022-02-16 2025-09-09 Murata Manufacturing Co., Ltd. Tuning acoustic resonators with back-side coating
US12549151B2 (en) 2022-04-12 2026-02-10 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonator with thick dielectric layer for improved coupling
CN119605084A (zh) * 2022-08-26 2025-03-11 株式会社村田制作所 弹性波装置
CN119605080A (zh) * 2022-08-26 2025-03-11 株式会社村田制作所 弹性波装置
CN115473506B (zh) * 2022-09-16 2023-08-22 南通大学 一种减小声表面波器件体积的方法
US12489415B2 (en) 2022-10-19 2025-12-02 Murata Manufacturing Co., Ltd. Acoustic resonator lid for thermal transport
CN116208115A (zh) * 2023-02-07 2023-06-02 锐石创芯(重庆)科技有限公司 弹性波装置、弹性波装置的制作方法、滤波器及电子设备
CN117097295B (zh) * 2023-10-17 2024-02-06 深圳新声半导体有限公司 声表面波谐振器装置及其制造方法、滤波器
CN118971832A (zh) * 2024-08-01 2024-11-15 无锡芯卓湖光半导体有限公司 电子设备、电子元器件、声表面波谐振器及其基底和制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130049533A1 (en) * 2011-08-31 2013-02-28 Taiyo Yuden Co., Ltd. Acoustic wave device
US9712139B2 (en) * 2013-05-29 2017-07-18 Murata Manufacturing Co., Ltd. Elastic wave filter device
US10009009B2 (en) * 2013-05-29 2018-06-26 Murata Manufacturing Co., Ltd. Elastic wave device including electrode fingers with elongated sections
US20180309426A1 (en) * 2015-10-20 2018-10-25 Soitec Surface acoustic wave device and associated production method

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221616U (https=) 1975-08-04 1977-02-16
JPS553020U (https=) 1978-06-22 1980-01-10
JP3412611B2 (ja) 2000-09-25 2003-06-03 株式会社村田製作所 弾性表面波装置
JP3498215B2 (ja) * 2001-04-09 2004-02-16 株式会社村田製作所 弾性表面波フィルタ、弾性表面波装置および通信装置
JP4821079B2 (ja) 2001-07-04 2011-11-24 株式会社村田製作所 弾性表面波用のくし型電極部、弾性表面波装置、通信装置
JP3929415B2 (ja) 2003-04-23 2007-06-13 富士通メディアデバイス株式会社 弾性表面波デバイス
JP4465625B2 (ja) * 2006-09-29 2010-05-19 Ｔｄｋ株式会社 弾性表面波フィルタおよび弾性表面波共振器
JP2009077209A (ja) * 2007-09-21 2009-04-09 Seiko Epson Corp 弾性表面波共振子
US7576471B1 (en) * 2007-09-28 2009-08-18 Triquint Semiconductor, Inc. SAW filter operable in a piston mode
JP5115184B2 (ja) 2007-12-25 2013-01-09 パナソニック株式会社 弾性境界波デバイス、及びそれを用いたフィルタ、アンテナ共用器
US8384495B2 (en) 2008-06-06 2013-02-26 Panasonic Corporation Acoustic wave duplexer
US7939989B2 (en) 2009-09-22 2011-05-10 Triquint Semiconductor, Inc. Piston mode acoustic wave device and method providing a high coupling factor
DE102010005596B4 (de) 2010-01-25 2015-11-05 Epcos Ag Elektroakustischer Wandler mit verringerten Verlusten durch transversale Emission und verbesserter Performance durch Unterdrückung transversaler Moden
JP5697751B2 (ja) * 2011-03-25 2015-04-08 スカイワークス・パナソニック フィルターソリューションズ ジャパン株式会社 高次横モード波を抑制した弾性波デバイス
JP2012227626A (ja) * 2011-04-15 2012-11-15 Panasonic Corp 弾性表面波素子
JP6494447B2 (ja) 2015-01-20 2019-04-03 太陽誘電株式会社 弾性波デバイス
JP6483073B2 (ja) 2015-12-14 2019-03-13 太陽誘電株式会社 弾性波共振器、フィルタおよびデュプレクサ
JP6415469B2 (ja) 2016-03-22 2018-10-31 太陽誘電株式会社 弾性波共振器、フィルタおよびマルチプレクサ並びに弾性波共振器の製造方法
JP6465065B2 (ja) * 2016-04-25 2019-02-06 株式会社村田製作所 弾性波装置
WO2018003282A1 (ja) 2016-06-28 2018-01-04 株式会社村田製作所 弾性波装置
JP6954799B2 (ja) * 2017-10-20 2021-10-27 株式会社村田製作所 弾性波装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130049533A1 (en) * 2011-08-31 2013-02-28 Taiyo Yuden Co., Ltd. Acoustic wave device
US9712139B2 (en) * 2013-05-29 2017-07-18 Murata Manufacturing Co., Ltd. Elastic wave filter device
US10009009B2 (en) * 2013-05-29 2018-06-26 Murata Manufacturing Co., Ltd. Elastic wave device including electrode fingers with elongated sections
US20180309426A1 (en) * 2015-10-20 2018-10-25 Soitec Surface acoustic wave device and associated production method

Also Published As

Publication number Publication date
US20200162052A1 (en) 2020-05-21
US11683019B2 (en) 2023-06-20
JP7377920B2 (ja) 2023-11-10
JP7178881B2 (ja) 2022-11-28
JP2022126852A (ja) 2022-08-30
JP2020088459A (ja) 2020-06-04
CN111200415A (zh) 2020-05-26
TW202021271A (zh) 2020-06-01
CN111200415B (zh) 2024-05-10

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