JP2022085834A5 - - Google Patents

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Publication number
JP2022085834A5
JP2022085834A5 JP2021132598A JP2021132598A JP2022085834A5 JP 2022085834 A5 JP2022085834 A5 JP 2022085834A5 JP 2021132598 A JP2021132598 A JP 2021132598A JP 2021132598 A JP2021132598 A JP 2021132598A JP 2022085834 A5 JP2022085834 A5 JP 2022085834A5
Authority
JP
Japan
Prior art keywords
elastic modulus
base
vibration
low elastic
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2021132598A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022085834A (ja
Filing date
Publication date
Application filed filed Critical
Priority to US17/456,237 priority Critical patent/US12009801B2/en
Publication of JP2022085834A publication Critical patent/JP2022085834A/ja
Priority to US18/651,849 priority patent/US12273092B2/en
Publication of JP2022085834A5 publication Critical patent/JP2022085834A5/ja
Pending legal-status Critical Current

Links

JP2021132598A 2020-11-27 2021-08-17 振動デバイス Pending JP2022085834A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US17/456,237 US12009801B2 (en) 2020-11-27 2021-11-23 Resonator device
US18/651,849 US12273092B2 (en) 2020-11-27 2024-05-01 Resonator device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020197300 2020-11-27
JP2020197300 2020-11-27

Publications (2)

Publication Number Publication Date
JP2022085834A JP2022085834A (ja) 2022-06-08
JP2022085834A5 true JP2022085834A5 (enrdf_load_stackoverflow) 2024-07-18

Family

ID=81892256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021132598A Pending JP2022085834A (ja) 2020-11-27 2021-08-17 振動デバイス

Country Status (1)

Country Link
JP (1) JP2022085834A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024108397A (ja) 2023-01-31 2024-08-13 セイコーエプソン株式会社 振動デバイス
JP2024108394A (ja) 2023-01-31 2024-08-13 セイコーエプソン株式会社 振動デバイス

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH118526A (ja) * 1997-04-25 1999-01-12 Murata Mfg Co Ltd 圧電共振子およびそれを用いた電子部品
JP2002064355A (ja) * 2000-06-09 2002-02-28 Murata Mfg Co Ltd 圧電共振部品
JP5466537B2 (ja) * 2009-09-30 2014-04-09 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器及び発振器パッケージ
JP6458621B2 (ja) * 2015-04-20 2019-01-30 株式会社大真空 圧電振動デバイス
JP6834289B2 (ja) * 2016-09-21 2021-02-24 セイコーエプソン株式会社 実装構造体、超音波デバイス、超音波探触子、超音波装置、及び電子機器

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