JP2022042992A - ひずみゲージおよびひずみ測定アセンブリ - Google Patents
ひずみゲージおよびひずみ測定アセンブリ Download PDFInfo
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- JP2022042992A JP2022042992A JP2021140802A JP2021140802A JP2022042992A JP 2022042992 A JP2022042992 A JP 2022042992A JP 2021140802 A JP2021140802 A JP 2021140802A JP 2021140802 A JP2021140802 A JP 2021140802A JP 2022042992 A JP2022042992 A JP 2022042992A
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- resistor
- conductive shield
- strain gauge
- insulating element
- silicon substrate
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- 238000005259 measurement Methods 0.000 title claims description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 55
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 53
- 239000010703 silicon Substances 0.000 claims abstract description 53
- 239000002210 silicon-based material Substances 0.000 claims abstract description 6
- 239000000758 substrate Substances 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 14
- 238000002161 passivation Methods 0.000 claims description 11
- 150000002500 ions Chemical class 0.000 abstract description 11
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 238000002955 isolation Methods 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000004020 conductor Substances 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
- G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Pressure Sensors (AREA)
Abstract
Description
Claims (15)
- ドープシリコン材料から形成された抵抗器(250)と、
導電性シールド(260)と、
前記抵抗器(250)と前記導電性シールド(260)との間に配置され、前記抵抗器(250)を前記導電性シールド(260)から電気的に絶縁している絶縁要素(270)と
を備えるひずみゲージ(200)。 - 前記抵抗器(250)および前記絶縁要素(270)は、単一のシリコン基板(240)内に形成されている、請求項1に記載のひずみゲージ(200)。
- 前記抵抗器(250)は、前記シリコン基板(240)のp型ドープ部(242)であり、前記絶縁要素(270)は、前記シリコン基板(240)のn型ドープ部(244)であり、前記p型ドープ部(242)とのp-n接合(246)を形成している、請求項2に記載のひずみゲージ(200)。
- 前記導電性シールド(260)は、前記単一のシリコン基板(240)内に形成され、前記導電性シールド(260)は、前記シリコン基板(240)のn+型高濃度ドープ部(248)である、請求項3に記載のひずみゲージ(200)。
- 前記導電性シールド(260)は金属層(266)であり、前記導電性シールド(260)上に前記シリコン基板(240)が配置されている、請求項3に記載のひずみゲージ(200)。
- 前記絶縁要素(270)は、前記抵抗器(250)の下面(256)および複数の側面(258)を取り囲んでいる、請求項3に記載のひずみゲージ(200)。
- 前記単一のシリコン基板(240)内に形成されたガードリング(280)をさらに備え、前記ガードリング(280)は、前記シリコン基板(240)のn+型高濃度ドープ部(249)であり、高さ方向に沿って前記抵抗器(250)と同じ高さに配置され、前記高さ方向に直交する横方向に前記抵抗器(250)の前記側面(258)から隔置されている、請求項6に記載のひずみゲージ(200)。
- 前記抵抗器(250)はp型ドープシリコン層(252)であり、前記絶縁要素(270)は酸化物であり、前記絶縁要素(270)上に前記p型ドープシリコン層(252)が配置されている、請求項1に記載のひずみゲージ(200)。
- 前記導電性シールド(260)はn+型高濃度ドープシリコン基板(264)であり、前記導電性シールド(260)上に前記酸化物が配置されている、請求項8に記載のひずみゲージ(200)。
- 前記導電性シールド(260)は金属層(266)であり、前記前記導電性シールド(260)上に前記酸化物が配置されている、請求項8に記載のひずみゲージ(200)。
- 前記絶縁要素(270)は、前記抵抗器(250)の下面(256)に配置された第1の絶縁要素(272)と、前記下面(256)とは反対に位置する前記抵抗器(250)の上面(254)に配置された第2の絶縁要素(276)とを含む、請求項1に記載のひずみゲージ(200)。
- 前記導電性シールド(260)は、前記第1の絶縁要素(272)のうち前記抵抗器(250)とは反対の側に配置された第1の導電性シールド(262)と、前記第2の絶縁要素(276)のうち前記抵抗器(250)とは反対の側に配置された第2の導電性シールド(268)とを含む、請求項11に記載のひずみゲージ(200)。
- 前記抵抗器(250)に電気的に接続され、前記第2の絶縁要素(276)を通って延びているコンタクトパッド(220)をさらに備える、請求項11に記載のひずみゲージ(200)。
- 前記第2の導電性シールド(268)を覆うように位置決めされたパシベーション層(290)をさらに備える、請求項12に記載のひずみゲージ(200)。
- 力応答部材(100)と、
ドープシリコン材料から形成された抵抗器(250)、導電性シールド(260)、および前記抵抗器(250)と前記導電性シールド(260)との間に配置され、前記抵抗器(250)を前記導電性シールド(260)から電気的に絶縁している絶縁要素(270)を含むひずみゲージ(200)と、
前記ひずみゲージ(200)を前記力応答部材(100)に取り付けている取付け材(300)と
を備えるひずみ測定アセンブリ(10)。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17/011352 | 2020-09-03 | ||
US17/011,352 US11933683B2 (en) | 2020-09-03 | 2020-09-03 | Strain gauge and strain measurement assembly |
Publications (2)
Publication Number | Publication Date |
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JP2022042992A true JP2022042992A (ja) | 2022-03-15 |
JP7267359B2 JP7267359B2 (ja) | 2023-05-01 |
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Application Number | Title | Priority Date | Filing Date |
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JP2021140802A Active JP7267359B2 (ja) | 2020-09-03 | 2021-08-31 | ひずみゲージおよびひずみ測定アセンブリ |
Country Status (6)
Country | Link |
---|---|
US (1) | US11933683B2 (ja) |
EP (1) | EP3964789A1 (ja) |
JP (1) | JP7267359B2 (ja) |
KR (1) | KR102560056B1 (ja) |
CN (1) | CN114136202B (ja) |
CA (1) | CA3129761A1 (ja) |
Families Citing this family (1)
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CN116222838B (zh) * | 2023-05-09 | 2023-07-14 | 苏州亿波达光电子科技有限公司 | 感测元件及压力传感器 |
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US4658279A (en) * | 1983-09-08 | 1987-04-14 | Wisconsin Alumini Research Foundation | Velocity saturated strain sensitive semiconductor devices |
JPH05206482A (ja) * | 1991-08-26 | 1993-08-13 | Span Instr Inc | ピエゾ抵抗半導体センサ・ゲージ及びこれを作る方法 |
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JPH0972805A (ja) * | 1995-09-06 | 1997-03-18 | Hitachi Ltd | 半導体センサ |
JPH10160610A (ja) * | 1996-12-02 | 1998-06-19 | Hitachi Ltd | 歪検出センサ |
JP2002162303A (ja) * | 2000-11-27 | 2002-06-07 | Yokogawa Electric Corp | 圧力センサ |
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-
2021
- 2021-08-31 JP JP2021140802A patent/JP7267359B2/ja active Active
- 2021-08-31 CA CA3129761A patent/CA3129761A1/en active Pending
- 2021-08-31 CN CN202111009509.9A patent/CN114136202B/zh active Active
- 2021-08-31 KR KR1020210115418A patent/KR102560056B1/ko active IP Right Grant
- 2021-09-03 EP EP21194823.7A patent/EP3964789A1/en active Pending
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JPH05206482A (ja) * | 1991-08-26 | 1993-08-13 | Span Instr Inc | ピエゾ抵抗半導体センサ・ゲージ及びこれを作る方法 |
JPH07162018A (ja) * | 1993-12-13 | 1995-06-23 | Nagano Keiki Seisakusho Ltd | 半導体圧力センサ |
JPH0972805A (ja) * | 1995-09-06 | 1997-03-18 | Hitachi Ltd | 半導体センサ |
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