JP2021103022A - 基板処理装置および基板処理方法 - Google Patents
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/67034—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- H—ELECTRICITY
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
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- Engineering & Computer Science (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Drying Of Solid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
10 チャンバ
11 カバー部(上側ユニット)
12 底板部(下側ユニット)
15 下部ヒータ(第2加熱部)
20 ホットプレート(加熱部)
32 リフトピン(支持部)
41 矯正ピン(矯正部材)
42 調整ナット(調整機構)
50 排気部(減圧部)
F 塗布膜
S 基板
SP 処理空間
Claims (12)
- 基板を加熱しその周囲空間を減圧して前記基板の主面に形成された塗布膜を乾燥させる基板処理装置において、
前記基板を水平姿勢で収容可能な処理空間を有するチャンバと、
前記処理空間内で、前記基板の下面に当接して前記基板を下方から支持する支持部と、
前記支持部に支持された前記基板の上面に部分的に当接して前記基板の反りを矯正する矯正部材と、
前記処理空間内で、前記支持部に支持された前記基板の下面を加熱する加熱部と、
前記処理空間を減圧する減圧部と
を備える基板処理装置。 - 前記加熱部は、上面が前記基板と同じまたはこれよりも大きな平面サイズを有し所定温度に昇温制御されるホットプレートを有し、
前記支持部は、前記基板を前記ホットプレートの前記上面に対し所定のギャップを隔てて対向させる、
請求項1に記載の基板処理装置。 - 前記支持部により支持された前記基板よりも低い位置に、前記基板の周縁部を加熱する第2加熱部が設けられた請求項1または2に記載の基板処理装置。
- 前記第2加熱部は、前記チャンバの底部を加熱する請求項3に記載の基板処理装置。
- 前記支持部は、前記基板を支持しながら昇降移動する請求項1ないし4のいずれかに記載の基板処理装置。
- 前記チャンバは、前記支持部および前記加熱部が設けられた下側ユニットと、前記矯正部材が設けられた上側ユニットとを有し、
前記上側ユニットと前記下側ユニットとが係合して前記下側ユニットの上部を前記上側ユニットが閉塞することにより前記処理空間を形成し、
前記上側ユニットと前記下側ユニットとが係合すると、前記矯正部材の下端は、前記支持部に支持される前記基板の上面の鉛直方向位置に対応する高さに位置決めされる、
請求項1ないし5のいずれかに記載の基板処理装置。 - 前記上側ユニットと前記下側ユニットとが係合したときの前記矯正部材の下端の鉛直方向を調整する調整機構を備える請求項6に記載の基板処理装置。
- 前記矯正部材は、前記基板の上面周縁部に当接する請求項1ないし7のいずれかに記載の基板処理装置。
- 前記矯正部材は、平面視において、前記基板のうち前記支持部により支持される領域よりも外側で前記基板に当接する請求項8に記載の基板処理装置。
- 基板を加熱しその周囲空間を減圧して前記基板の主面に形成された塗布膜を乾燥させる基板処理方法において、
前記基板を加熱する加熱部が内部の処理空間に配置されたチャンバ内で、前記基板の下面に支持部を当接させて、前記加熱部の上方に、かつ前記加熱部から所定のギャップを隔てて前記基板を支持し、
前記支持部に支持される前記基板の上面に部分的に強制部材を当接させて前記基板の反りを矯正し、
前記処理空間を減圧し、前記加熱部により前記基板を加熱して前記塗布膜を乾燥させる、基板処理方法。 - 前記支持部により支持された前記基板よりも低い位置に設けられた第2加熱部により、前記基板の周縁部を加熱する請求項10に記載の基板処理方法。
- 前記加熱部は、上面が前記基板と同じまたはこれよりも大きな平面サイズを有し所定温度に昇温制御されるホットプレートを有し、前記支持部は、前記基板を前記ホットプレートの前記上面に対し前記ギャップを隔てて対向させる請求項10または11に記載の基板処理方法。
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JP2019233851A JP7244411B2 (ja) | 2019-12-25 | 2019-12-25 | 基板処理装置および基板処理方法 |
TW109144601A TWI826757B (zh) | 2019-12-25 | 2020-12-17 | 基板處理裝置及基板處理方法 |
CN202011539006.8A CN113035741A (zh) | 2019-12-25 | 2020-12-23 | 基板处理装置及基板处理方法 |
KR1020200183115A KR102566766B1 (ko) | 2019-12-25 | 2020-12-24 | 기판 처리 장치 및 기판 처리 방법 |
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Citations (11)
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JP2000307235A (ja) * | 1999-04-21 | 2000-11-02 | Hitachi Ltd | 電子回路基板の反り矯正機構を備えたフローはんだ付け装置及び反り矯正方法 |
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- 2019-12-25 JP JP2019233851A patent/JP7244411B2/ja active Active
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- 2020-12-17 TW TW109144601A patent/TWI826757B/zh active
- 2020-12-23 CN CN202011539006.8A patent/CN113035741A/zh active Pending
- 2020-12-24 KR KR1020200183115A patent/KR102566766B1/ko active IP Right Grant
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JPH11297654A (ja) * | 1998-04-07 | 1999-10-29 | Oki Electric Ind Co Ltd | 半導体ウエハの洗浄装置及びその洗浄方法 |
JP2000307235A (ja) * | 1999-04-21 | 2000-11-02 | Hitachi Ltd | 電子回路基板の反り矯正機構を備えたフローはんだ付け装置及び反り矯正方法 |
JP2003168643A (ja) * | 2001-09-19 | 2003-06-13 | Tokyo Electron Ltd | 減圧乾燥装置及び塗布膜形成方法 |
JP2006339485A (ja) * | 2005-06-03 | 2006-12-14 | Dainippon Screen Mfg Co Ltd | 基板熱処理装置 |
KR20070038476A (ko) * | 2007-02-12 | 2007-04-10 | 주식회사 좋은기술 | 웨이퍼 교정 장치를 갖는 반도체 가열 및 냉각 시스템 |
US20090073415A1 (en) * | 2007-08-29 | 2009-03-19 | Samsung Electronics Co., Ltd. | Apparatus and method for mounting pellicle |
KR20100006009A (ko) * | 2008-07-08 | 2010-01-18 | 주성엔지니어링(주) | 반도체 제조 장치 |
JP2016051877A (ja) * | 2014-09-02 | 2016-04-11 | パナソニックIpマネジメント株式会社 | プラズマ処理装置およびプラズマ処理方法 |
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JP2017083140A (ja) * | 2015-10-30 | 2017-05-18 | 東京応化工業株式会社 | 基板加熱装置及び基板加熱方法 |
JP2018040512A (ja) * | 2016-09-06 | 2018-03-15 | 株式会社Screenホールディングス | 減圧乾燥装置、減圧乾燥システム、減圧乾燥方法 |
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TW202133219A (zh) | 2021-09-01 |
CN113035741A (zh) | 2021-06-25 |
KR102566766B1 (ko) | 2023-08-14 |
JP7244411B2 (ja) | 2023-03-22 |
TWI826757B (zh) | 2023-12-21 |
KR20210082383A (ko) | 2021-07-05 |
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