JP2020507771A5 - - Google Patents

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Publication number
JP2020507771A5
JP2020507771A5 JP2019543287A JP2019543287A JP2020507771A5 JP 2020507771 A5 JP2020507771 A5 JP 2020507771A5 JP 2019543287 A JP2019543287 A JP 2019543287A JP 2019543287 A JP2019543287 A JP 2019543287A JP 2020507771 A5 JP2020507771 A5 JP 2020507771A5
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JP
Japan
Prior art keywords
contact
probe card
flexible film
tips
contact elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2019543287A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020507771A (ja
JP7306993B2 (ja
Filing date
Publication date
Priority claimed from IT102017000017037A external-priority patent/IT201700017037A1/it
Application filed filed Critical
Publication of JP2020507771A publication Critical patent/JP2020507771A/ja
Publication of JP2020507771A5 publication Critical patent/JP2020507771A5/ja
Priority to JP2023059695A priority Critical patent/JP2023085418A/ja
Application granted granted Critical
Publication of JP7306993B2 publication Critical patent/JP7306993B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2019543287A 2017-02-15 2018-02-14 高周波用途用のプローブカード Active JP7306993B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023059695A JP2023085418A (ja) 2017-02-15 2023-04-03 高周波用途用のプローブカード

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
IT102017000017037 2017-02-15
IT102017000017037A IT201700017037A1 (it) 2017-02-15 2017-02-15 Scheda di misura per applicazioni ad alta frequenza
PCT/EP2018/053615 WO2018149847A1 (en) 2017-02-15 2018-02-14 Probe card for high-frequency applications

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023059695A Division JP2023085418A (ja) 2017-02-15 2023-04-03 高周波用途用のプローブカード

Publications (3)

Publication Number Publication Date
JP2020507771A JP2020507771A (ja) 2020-03-12
JP2020507771A5 true JP2020507771A5 (cg-RX-API-DMAC7.html) 2022-02-28
JP7306993B2 JP7306993B2 (ja) 2023-07-11

Family

ID=59579801

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2019543287A Active JP7306993B2 (ja) 2017-02-15 2018-02-14 高周波用途用のプローブカード
JP2023059695A Pending JP2023085418A (ja) 2017-02-15 2023-04-03 高周波用途用のプローブカード

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023059695A Pending JP2023085418A (ja) 2017-02-15 2023-04-03 高周波用途用のプローブカード

Country Status (11)

Country Link
US (1) US11112431B2 (cg-RX-API-DMAC7.html)
EP (1) EP3583431A1 (cg-RX-API-DMAC7.html)
JP (2) JP7306993B2 (cg-RX-API-DMAC7.html)
KR (1) KR102522524B1 (cg-RX-API-DMAC7.html)
CN (1) CN110291407B (cg-RX-API-DMAC7.html)
IT (1) IT201700017037A1 (cg-RX-API-DMAC7.html)
MY (1) MY195983A (cg-RX-API-DMAC7.html)
PH (1) PH12019501889A1 (cg-RX-API-DMAC7.html)
SG (1) SG11201907121WA (cg-RX-API-DMAC7.html)
TW (1) TWI703329B (cg-RX-API-DMAC7.html)
WO (1) WO2018149847A1 (cg-RX-API-DMAC7.html)

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IT201700017037A1 (it) * 2017-02-15 2018-08-15 Technoprobe Spa Scheda di misura per applicazioni ad alta frequenza
CN108241078B (zh) * 2017-05-18 2020-06-02 苏州韬盛电子科技有限公司 垂直探针卡
KR102066678B1 (ko) * 2019-10-30 2020-01-15 김재길 범프필름 타입 프로브카드
IT201900024964A1 (it) * 2019-12-20 2021-06-20 Technoprobe Spa Testa di misura per applicazioni a ridotto pitch
CN113433360B (zh) * 2020-03-23 2023-12-01 奥特斯(中国)有限公司 测试适配器、测试设备和测试部件承载件的方法
KR102307942B1 (ko) * 2020-07-13 2021-10-01 양진석 반도체 소자 검사 장치
CN112305395B (zh) * 2020-11-06 2021-05-28 法特迪精密科技(苏州)有限公司 一种探针结构及其安装方法、闭路方法、抗干扰方法
TWI784439B (zh) * 2021-03-12 2022-11-21 冠銓科技實業股份有限公司 應用於高頻量測之測試針座構造
JP7766290B2 (ja) * 2021-03-26 2025-11-10 石福金属興業株式会社 プローブピン用合金材料
US11714105B2 (en) * 2021-03-30 2023-08-01 Enplas Corporation Socket and inspection socket
KR102309675B1 (ko) * 2021-07-30 2021-10-07 김재길 필름 형태의 프로브카드
JP7795316B2 (ja) * 2021-09-27 2026-01-07 株式会社ヨコオ コンタクトユニット及び検査治具
KR102450658B1 (ko) * 2022-09-01 2022-10-06 윌테크놀러지(주) 니들유닛의 팁 길이조절이 용이한 니들블럭
KR102847367B1 (ko) * 2022-10-20 2025-08-18 주식회사 에이엠에스티 프로브 카드 제작 방법
IT202400003139A1 (it) * 2024-02-14 2025-08-14 Technoprobe Spa Scheda di misura per applicazioni ad elevata frequenza
KR102913907B1 (ko) * 2024-06-10 2026-01-19 (주)위드멤스 피검사체의 전기적 특성을 프로빙하는 프로브 카드 어셈블리

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JPH0936188A (ja) * 1995-07-14 1997-02-07 Tokyo Electron Ltd プローブ装置に用いられるプローブカードデバイス
TW369601B (en) * 1997-06-17 1999-09-11 Advantest Corp Probe card
CN1276259C (zh) * 1998-12-02 2006-09-20 佛姆法克特股份有限公司 光刻接触元件
US6911835B2 (en) * 2002-05-08 2005-06-28 Formfactor, Inc. High performance probe system
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US6759861B2 (en) * 2002-07-30 2004-07-06 Intel Corporation Thin film probe card contact drive system
JP2004144742A (ja) * 2002-10-02 2004-05-20 Renesas Technology Corp プローブシート、プローブカード、半導体検査装置および半導体装置の製造方法
TWI236723B (en) * 2002-10-02 2005-07-21 Renesas Tech Corp Probe sheet, probe card, semiconductor inspection device, and manufacturing method for semiconductor device
TWI255520B (en) * 2003-05-01 2006-05-21 Celerity Res Inc Device probing using a matching device
US7368927B2 (en) * 2004-07-07 2008-05-06 Cascade Microtech, Inc. Probe head having a membrane suspended probe
US7129730B2 (en) * 2004-12-15 2006-10-31 Chipmos Technologies (Bermuda) Ltd. Probe card assembly
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TW201316014A (zh) * 2011-10-12 2013-04-16 Advantest Corp 測試裝置、測試方法以及裝置介面
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CN105531593B (zh) * 2013-05-06 2019-05-03 佛姆法克特股份有限公司 用于测试电子器件的探针卡组件
EP3019879A4 (en) * 2013-07-11 2017-08-16 JohnsTech International Corporation Testing apparatus and method for microcircuit and wafer level ic testing
US9709599B2 (en) * 2014-01-09 2017-07-18 Taiwan Semiconductor Manufacturing Co., Ltd. Membrane probe card
JP2018503805A (ja) * 2014-12-04 2018-02-08 テクノプローベ エス.ピー.エー. 垂直プローブを含むテストヘッド
JP6721302B2 (ja) * 2015-08-10 2020-07-15 東京特殊電線株式会社 両面回路基板の検査装置
IT201700017037A1 (it) * 2017-02-15 2018-08-15 Technoprobe Spa Scheda di misura per applicazioni ad alta frequenza
IT201700017061A1 (it) * 2017-02-15 2018-08-15 Technoprobe Spa Scheda di misura perfezionata per applicazioni ad alta frequenza

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