JP2020507771A5 - - Google Patents
Info
- Publication number
- JP2020507771A5 JP2020507771A5 JP2019543287A JP2019543287A JP2020507771A5 JP 2020507771 A5 JP2020507771 A5 JP 2020507771A5 JP 2019543287 A JP2019543287 A JP 2019543287A JP 2019543287 A JP2019543287 A JP 2019543287A JP 2020507771 A5 JP2020507771 A5 JP 2020507771A5
- Authority
- JP
- Japan
- Prior art keywords
- contact
- probe card
- flexible film
- tips
- contact elements
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2023059695A JP2023085418A (ja) | 2017-02-15 | 2023-04-03 | 高周波用途用のプローブカード |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT102017000017037 | 2017-02-15 | ||
| IT102017000017037A IT201700017037A1 (it) | 2017-02-15 | 2017-02-15 | Scheda di misura per applicazioni ad alta frequenza |
| PCT/EP2018/053615 WO2018149847A1 (en) | 2017-02-15 | 2018-02-14 | Probe card for high-frequency applications |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023059695A Division JP2023085418A (ja) | 2017-02-15 | 2023-04-03 | 高周波用途用のプローブカード |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020507771A JP2020507771A (ja) | 2020-03-12 |
| JP2020507771A5 true JP2020507771A5 (cg-RX-API-DMAC7.html) | 2022-02-28 |
| JP7306993B2 JP7306993B2 (ja) | 2023-07-11 |
Family
ID=59579801
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019543287A Active JP7306993B2 (ja) | 2017-02-15 | 2018-02-14 | 高周波用途用のプローブカード |
| JP2023059695A Pending JP2023085418A (ja) | 2017-02-15 | 2023-04-03 | 高周波用途用のプローブカード |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023059695A Pending JP2023085418A (ja) | 2017-02-15 | 2023-04-03 | 高周波用途用のプローブカード |
Country Status (11)
| Country | Link |
|---|---|
| US (1) | US11112431B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP3583431A1 (cg-RX-API-DMAC7.html) |
| JP (2) | JP7306993B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR102522524B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN110291407B (cg-RX-API-DMAC7.html) |
| IT (1) | IT201700017037A1 (cg-RX-API-DMAC7.html) |
| MY (1) | MY195983A (cg-RX-API-DMAC7.html) |
| PH (1) | PH12019501889A1 (cg-RX-API-DMAC7.html) |
| SG (1) | SG11201907121WA (cg-RX-API-DMAC7.html) |
| TW (1) | TWI703329B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2018149847A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT201700017037A1 (it) * | 2017-02-15 | 2018-08-15 | Technoprobe Spa | Scheda di misura per applicazioni ad alta frequenza |
| CN108241078B (zh) * | 2017-05-18 | 2020-06-02 | 苏州韬盛电子科技有限公司 | 垂直探针卡 |
| KR102066678B1 (ko) * | 2019-10-30 | 2020-01-15 | 김재길 | 범프필름 타입 프로브카드 |
| IT201900024964A1 (it) * | 2019-12-20 | 2021-06-20 | Technoprobe Spa | Testa di misura per applicazioni a ridotto pitch |
| CN113433360B (zh) * | 2020-03-23 | 2023-12-01 | 奥特斯(中国)有限公司 | 测试适配器、测试设备和测试部件承载件的方法 |
| KR102307942B1 (ko) * | 2020-07-13 | 2021-10-01 | 양진석 | 반도체 소자 검사 장치 |
| CN112305395B (zh) * | 2020-11-06 | 2021-05-28 | 法特迪精密科技(苏州)有限公司 | 一种探针结构及其安装方法、闭路方法、抗干扰方法 |
| TWI784439B (zh) * | 2021-03-12 | 2022-11-21 | 冠銓科技實業股份有限公司 | 應用於高頻量測之測試針座構造 |
| JP7766290B2 (ja) * | 2021-03-26 | 2025-11-10 | 石福金属興業株式会社 | プローブピン用合金材料 |
| US11714105B2 (en) * | 2021-03-30 | 2023-08-01 | Enplas Corporation | Socket and inspection socket |
| KR102309675B1 (ko) * | 2021-07-30 | 2021-10-07 | 김재길 | 필름 형태의 프로브카드 |
| JP7795316B2 (ja) * | 2021-09-27 | 2026-01-07 | 株式会社ヨコオ | コンタクトユニット及び検査治具 |
| KR102450658B1 (ko) * | 2022-09-01 | 2022-10-06 | 윌테크놀러지(주) | 니들유닛의 팁 길이조절이 용이한 니들블럭 |
| KR102847367B1 (ko) * | 2022-10-20 | 2025-08-18 | 주식회사 에이엠에스티 | 프로브 카드 제작 방법 |
| IT202400003139A1 (it) * | 2024-02-14 | 2025-08-14 | Technoprobe Spa | Scheda di misura per applicazioni ad elevata frequenza |
| KR102913907B1 (ko) * | 2024-06-10 | 2026-01-19 | (주)위드멤스 | 피검사체의 전기적 특성을 프로빙하는 프로브 카드 어셈블리 |
Family Cites Families (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3046498B2 (ja) * | 1994-06-09 | 2000-05-29 | 日東電工株式会社 | プローブ |
| JPH0936188A (ja) * | 1995-07-14 | 1997-02-07 | Tokyo Electron Ltd | プローブ装置に用いられるプローブカードデバイス |
| TW369601B (en) * | 1997-06-17 | 1999-09-11 | Advantest Corp | Probe card |
| CN1276259C (zh) * | 1998-12-02 | 2006-09-20 | 佛姆法克特股份有限公司 | 光刻接触元件 |
| US6911835B2 (en) * | 2002-05-08 | 2005-06-28 | Formfactor, Inc. | High performance probe system |
| US6965244B2 (en) * | 2002-05-08 | 2005-11-15 | Formfactor, Inc. | High performance probe system |
| US6759861B2 (en) * | 2002-07-30 | 2004-07-06 | Intel Corporation | Thin film probe card contact drive system |
| JP2004144742A (ja) * | 2002-10-02 | 2004-05-20 | Renesas Technology Corp | プローブシート、プローブカード、半導体検査装置および半導体装置の製造方法 |
| TWI236723B (en) * | 2002-10-02 | 2005-07-21 | Renesas Tech Corp | Probe sheet, probe card, semiconductor inspection device, and manufacturing method for semiconductor device |
| TWI255520B (en) * | 2003-05-01 | 2006-05-21 | Celerity Res Inc | Device probing using a matching device |
| US7368927B2 (en) * | 2004-07-07 | 2008-05-06 | Cascade Microtech, Inc. | Probe head having a membrane suspended probe |
| US7129730B2 (en) * | 2004-12-15 | 2006-10-31 | Chipmos Technologies (Bermuda) Ltd. | Probe card assembly |
| WO2008033428A2 (en) * | 2006-09-12 | 2008-03-20 | Innoconnex, Inc. | Compliance partitioning in testing of integrated circuits |
| JP2008311071A (ja) * | 2007-06-14 | 2008-12-25 | Alps Electric Co Ltd | 電子部品用ソケット |
| JP5049694B2 (ja) * | 2007-08-07 | 2012-10-17 | ルネサスエレクトロニクス株式会社 | プローブカード、半導体検査装置および半導体装置の製造方法 |
| KR20090019384A (ko) * | 2007-08-21 | 2009-02-25 | 주식회사 세지 | 반도체 웨이퍼 검사용 프로브카드 |
| JP2009204393A (ja) * | 2008-02-27 | 2009-09-10 | Renesas Technology Corp | プローブカード、プローブカードの製造方法、半導体検査装置および半導体装置の製造方法 |
| TWI431278B (zh) * | 2008-07-01 | 2014-03-21 | Taiwan Semiconductor Mfg | 半導體測試探針卡空間變換器的製造方法 |
| JP2010175371A (ja) * | 2009-01-29 | 2010-08-12 | Yokowo Co Ltd | 検査ソケット |
| JP2011038930A (ja) * | 2009-08-12 | 2011-02-24 | Renesas Electronics Corp | プローブカード及び被検査装置のテスト方法 |
| JP2011163807A (ja) * | 2010-02-05 | 2011-08-25 | Advantest Corp | 電子部品試験装置 |
| JP2011242377A (ja) * | 2010-05-19 | 2011-12-01 | Kimoto Gunsei | プローブ |
| TW201316014A (zh) * | 2011-10-12 | 2013-04-16 | Advantest Corp | 測試裝置、測試方法以及裝置介面 |
| US10359447B2 (en) * | 2012-10-31 | 2019-07-23 | Formfactor, Inc. | Probes with spring mechanisms for impeding unwanted movement in guide holes |
| CN105531593B (zh) * | 2013-05-06 | 2019-05-03 | 佛姆法克特股份有限公司 | 用于测试电子器件的探针卡组件 |
| EP3019879A4 (en) * | 2013-07-11 | 2017-08-16 | JohnsTech International Corporation | Testing apparatus and method for microcircuit and wafer level ic testing |
| US9709599B2 (en) * | 2014-01-09 | 2017-07-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Membrane probe card |
| JP2018503805A (ja) * | 2014-12-04 | 2018-02-08 | テクノプローベ エス.ピー.エー. | 垂直プローブを含むテストヘッド |
| JP6721302B2 (ja) * | 2015-08-10 | 2020-07-15 | 東京特殊電線株式会社 | 両面回路基板の検査装置 |
| IT201700017037A1 (it) * | 2017-02-15 | 2018-08-15 | Technoprobe Spa | Scheda di misura per applicazioni ad alta frequenza |
| IT201700017061A1 (it) * | 2017-02-15 | 2018-08-15 | Technoprobe Spa | Scheda di misura perfezionata per applicazioni ad alta frequenza |
-
2017
- 2017-02-15 IT IT102017000017037A patent/IT201700017037A1/it unknown
-
2018
- 2018-02-14 KR KR1020197026853A patent/KR102522524B1/ko active Active
- 2018-02-14 JP JP2019543287A patent/JP7306993B2/ja active Active
- 2018-02-14 CN CN201880011726.1A patent/CN110291407B/zh active Active
- 2018-02-14 TW TW107105487A patent/TWI703329B/zh active
- 2018-02-14 MY MYPI2019004499A patent/MY195983A/en unknown
- 2018-02-14 EP EP18708599.8A patent/EP3583431A1/en not_active Withdrawn
- 2018-02-14 WO PCT/EP2018/053615 patent/WO2018149847A1/en not_active Ceased
- 2018-02-14 SG SG11201907121WA patent/SG11201907121WA/en unknown
-
2019
- 2019-08-12 US US16/537,727 patent/US11112431B2/en not_active Expired - Fee Related
- 2019-08-14 PH PH12019501889A patent/PH12019501889A1/en unknown
-
2023
- 2023-04-03 JP JP2023059695A patent/JP2023085418A/ja active Pending
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