SG11201907121WA - Probe card for high-frequency applications - Google Patents

Probe card for high-frequency applications

Info

Publication number
SG11201907121WA
SG11201907121WA SG11201907121WA SG11201907121WA SG11201907121WA SG 11201907121W A SG11201907121W A SG 11201907121WA SG 11201907121W A SG11201907121W A SG 11201907121WA SG 11201907121W A SG11201907121W A SG 11201907121WA SG 11201907121W A SG11201907121W A SG 11201907121WA
Authority
SG
Singapore
Prior art keywords
international
probe card
flexible membrane
end portion
support plate
Prior art date
Application number
SG11201907121WA
Inventor
Stefano Felici
Original Assignee
Technoprobe Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technoprobe Spa filed Critical Technoprobe Spa
Publication of SG11201907121WA publication Critical patent/SG11201907121WA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/0735—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card arranged on a flexible frame or film
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06744—Microprobes, i.e. having dimensions as IC details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Reinforced Plastic Materials (AREA)
  • Medicinal Preparation (AREA)

Abstract

H26 21' 24A 20 26 5B 25B 25 28 25A FIG. 2A 21 29 1-1 N cc 00 O O (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 23 August 2018 (23.08.2018) WIPO I PCT onion °nolo olomin mo Holum° oimIE (10) International Publication Number WO 2018/149847 Al (51) International Patent Classification: G01R 1/073 (2006.01) G01R 1/067 (2006.01) GO1R 31/28 (2006.01) (21) International Application Number: PCT/EP2018/053615 (22) International Filing Date: 14 February 2018 (14.02.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 102017000017037 15 February 2017 (15.02.2017) IT (71) Applicant: TECHNOPROBE S.P.A. [IT/IT]; Via Cava- lieri di Vittorio Veneto, 2, 23870 Cernusco Lombardone (Lecco) (IT). (72) Inventor: FELICI, Stefano; c/o TECHNOPROBE S.p.A., Via Cavalieri di Vittorio Veneto, 2, 23870 Cernusco Lom- bardone (Lecco) (IT). (74) Agent: FERRARI, Barbara; BOTTI & FERRARI S.r.1., Via Cappellini, 11, 20124 Milano (IT). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (54) Title: PROBE CARD FOR HIGH-FREQUENCY APPLICATIONS (57) : A probe card (20) of a testing apparatus of electronic devices comprises a testing head (21), which houses a plurality of contact elements (22) extending along a longitudinal axis (H-H) between a first end portion (24A) and a second end portion (24B), a support plate (23), onto which said first end portion (24A) is adapted to abut, and a flexible membrane (25). Suitably, the testing head (21) is arranged between the support plate (23) and a first portion (25A) of the flexible membrane (25), which is connected to the support plate (23) through a second portion (25B) thereof, the probe card (20) further comprising a plurality of contact tips (27) arranged on a first face (F1) of the flexible membrane (25) at the first portion (25A) thereof, the second end portion (24B) of each contact element (22) being apt to abut onto a second face (F2) of the flexible membrane (25), opposite to the first face (F1), the number and distribution of the contact elements (22) being different to the number and distribution of the contact tips (27). [Continued on next page] WO 2018/149847 Al MIDEDIMOMMIDIREEMOMMEHHEMOHMEHOIS (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: — of inventorship (Rule 4.17(iv)) Published: — with international search report (Art. 21(3))
SG11201907121WA 2017-02-15 2018-02-14 Probe card for high-frequency applications SG11201907121WA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT102017000017037A IT201700017037A1 (en) 2017-02-15 2017-02-15 Measurement board for high frequency applications
PCT/EP2018/053615 WO2018149847A1 (en) 2017-02-15 2018-02-14 Probe card for high-frequency applications

Publications (1)

Publication Number Publication Date
SG11201907121WA true SG11201907121WA (en) 2019-09-27

Family

ID=59579801

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201907121WA SG11201907121WA (en) 2017-02-15 2018-02-14 Probe card for high-frequency applications

Country Status (11)

Country Link
US (1) US11112431B2 (en)
EP (1) EP3583431A1 (en)
JP (2) JP7306993B2 (en)
KR (1) KR102522524B1 (en)
CN (1) CN110291407B (en)
IT (1) IT201700017037A1 (en)
MY (1) MY195983A (en)
PH (1) PH12019501889A1 (en)
SG (1) SG11201907121WA (en)
TW (1) TWI703329B (en)
WO (1) WO2018149847A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108241078B (en) * 2017-05-18 2020-06-02 苏州韬盛电子科技有限公司 Vertical probe card
KR102066678B1 (en) * 2019-10-30 2020-01-15 김재길 Bump film type probe card
IT201900024964A1 (en) * 2019-12-20 2021-06-20 Technoprobe Spa Measuring head for low pitch applications
CN113433360B (en) * 2020-03-23 2023-12-01 奥特斯(中国)有限公司 Test adapter, test apparatus and method of testing a component carrier
KR102307942B1 (en) * 2020-07-13 2021-10-01 양진석 Apparatus for testing a semiconductor device
CN112305395B (en) * 2020-11-06 2021-05-28 法特迪精密科技（苏州）有限公司 Probe structure and installation method, closed circuit method and anti-interference method thereof
TWI784439B (en) * 2021-03-12 2022-11-21 冠銓科技實業股份有限公司 Test needle seat structure for high frequency measurement
US11714105B2 (en) * 2021-03-30 2023-08-01 Enplas Corporation Socket and inspection socket
KR102309675B1 (en) * 2021-07-30 2021-10-07 김재길 Probe card in film type
JP2023047464A (en) * 2021-09-27 2023-04-06 株式会社ヨコオ Contact unit and inspection jig
KR102450658B1 (en) * 2022-09-01 2022-10-06 윌테크놀러지(주) Needle block for easy adjustment of length of needle unit tip
KR20240055555A (en) * 2022-10-20 2024-04-29 주식회사 에이엠에스티 Manufacturing method for probe card

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3046498B2 (en) * 1994-06-09 2000-05-29 日東電工株式会社 probe
JPH0936188A (en) * 1995-07-14 1997-02-07 Tokyo Electron Ltd Probe card device for probe device
TW369601B (en) * 1997-06-17 1999-09-11 Advantest Corp Probe card
DE69908638T2 (en) * 1998-12-02 2004-04-29 Formfactor, Inc., Livermore Lithographic Contact Structures
US6965244B2 (en) * 2002-05-08 2005-11-15 Formfactor, Inc. High performance probe system
US6911835B2 (en) * 2002-05-08 2005-06-28 Formfactor, Inc. High performance probe system
US6759861B2 (en) * 2002-07-30 2004-07-06 Intel Corporation Thin film probe card contact drive system
JP2004144742A (en) * 2002-10-02 2004-05-20 Renesas Technology Corp Probe sheet, probe card, semiconductor inspection apparatus, and method for manufacturing semiconductor device
TWI236723B (en) * 2002-10-02 2005-07-21 Renesas Tech Corp Probe sheet, probe card, semiconductor inspection device, and manufacturing method for semiconductor device
TWI255520B (en) * 2003-05-01 2006-05-21 Celerity Res Inc Device probing using a matching device
DE202005021386U1 (en) * 2004-07-07 2007-11-29 Cascade Microtech, Inc., Beaverton Probe with a sensor with membrane suspension
US7129730B2 (en) * 2004-12-15 2006-10-31 Chipmos Technologies (Bermuda) Ltd. Probe card assembly
WO2008033428A2 (en) * 2006-09-12 2008-03-20 Innoconnex, Inc. Compliance partitioning in testing of integrated circuits
JP2008311071A (en) * 2007-06-14 2008-12-25 Alps Electric Co Ltd Socket for electronic component
JP5049694B2 (en) * 2007-08-07 2012-10-17 ルネサスエレクトロニクス株式会社 Probe card, semiconductor inspection apparatus, and semiconductor device manufacturing method
KR20090019384A (en) * 2007-08-21 2009-02-25 주식회사 세지 Probe card of semiconductor wafer inspector
JP2009204393A (en) * 2008-02-27 2009-09-10 Renesas Technology Corp Probe card, method for manufacturing probe card, semiconductor inspection apparatus and method for manufacturing semiconductor device
TWI431278B (en) * 2008-07-01 2014-03-21 Taiwan Semiconductor Mfg Semiconductor test probe card space transformer
JP2010175371A (en) * 2009-01-29 2010-08-12 Yokowo Co Ltd Inspection socket
JP2011038930A (en) * 2009-08-12 2011-02-24 Renesas Electronics Corp Probe card and test method of device to be inspected
JP2011163807A (en) * 2010-02-05 2011-08-25 Advantest Corp Electronic component testing device
JP2011242377A (en) * 2010-05-19 2011-12-01 Kimoto Gunsei Probe
TW201316014A (en) * 2011-10-12 2013-04-16 Advantest Corp Testing apparatus, testing method and apparatus interface thereof
US10359447B2 (en) * 2012-10-31 2019-07-23 Formfactor, Inc. Probes with spring mechanisms for impeding unwanted movement in guide holes
US9588139B2 (en) * 2013-05-06 2017-03-07 Formfactor, Inc. Probe card assembly for testing electronic devices
MY174175A (en) * 2013-07-11 2020-03-12 Johnstech Int Corporation Testing apparatus and method for microcircuit and wafer level ic testing
US9709599B2 (en) * 2014-01-09 2017-07-18 Taiwan Semiconductor Manufacturing Co., Ltd. Membrane probe card
TW201625962A (en) * 2014-12-04 2016-07-16 技術探測股份有限公司 Testing head comprising vertical probes
JP6721302B2 (en) * 2015-08-10 2020-07-15 東京特殊電線株式会社 Double-sided circuit board inspection device
IT201700017061A1 (en) * 2017-02-15 2018-08-15 Technoprobe Spa Improved measurement card for high frequency applications

Also Published As

Publication number Publication date
IT201700017037A1 (en) 2018-08-15
US11112431B2 (en) 2021-09-07
PH12019501889A1 (en) 2020-07-06
WO2018149847A1 (en) 2018-08-23
TWI703329B (en) 2020-09-01
JP2023085418A (en) 2023-06-20
MY195983A (en) 2023-02-27
EP3583431A1 (en) 2019-12-25
TW201831909A (en) 2018-09-01
CN110291407B (en) 2022-06-07
JP7306993B2 (en) 2023-07-11
CN110291407A (en) 2019-09-27
KR20190112155A (en) 2019-10-02
KR102522524B1 (en) 2023-04-14
JP2020507771A (en) 2020-03-12
US20190361050A1 (en) 2019-11-28

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