SG11201909342TA - Probe card for a testing apparatus of electronic devices - Google Patents

Probe card for a testing apparatus of electronic devices

Info

Publication number
SG11201909342TA
SG11201909342TA SG11201909342TA SG11201909342TA SG 11201909342T A SG11201909342T A SG 11201909342TA SG 11201909342T A SG11201909342T A SG 11201909342TA SG 11201909342T A SG11201909342T A SG 11201909342TA
Authority
SG
Singapore
Prior art keywords
international
probe
main support
electronic devices
testing apparatus
Prior art date
Application number
Inventor
Riccardo Liberini
Original Assignee
Technoprobe Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technoprobe Spa filed Critical Technoprobe Spa
Publication of SG11201909342TA publication Critical patent/SG11201909342TA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

22 F3 20 F4 ZhfiriMMY Ze 30C 29 A3 30A 25 27 26 21 ZA > X 22A AC FIG. 2A (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 01 November 2018 (01.11.2018) WIPO I PCT omit VIII °nolo VIII VIII Imo oimIE (10) International Publication Number WO 2018/197598 Al (51) International Patent Classification: (72) Inventor: LIBERINI, Riccardo; c/o Technoprobe S.p.A., G01R 1/073 (2006.01) Via Cavalieri di Vittorio Veneto, 2, 23870 Cernusco Lom- (21) International Application Number: bardone (Lecco) (IT). PCT/EP2018/060672 (74) Agent: FERRARI, Barbara et al.; BOTTI & FERRARI S.r.1., Via Cappellini, 11, 20124 Milano (IT). 26 April 2018 (26.04.2018) (81) Designated States (unless otherwise indicated, for every (25) Filing Language: English kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, (26) Publication Language: English CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, (30) Priority Data: DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, 102017000046645 28 April 2017 (28.04.2017) IT HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, (71) Applicant: TECHNOPROBE S.P.A. [IT/IT]; Via Cava- MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, lien di Vittorio Veneto, 2, 23870 Cernusco Lombardone OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, (Lecco) (IT). SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (22) International Filing Date: (54) Title: PROBE CARD FOR A TESTING APPARATUS OF ELECTRONIC DEVICES (57) : It is described a probe card for a testing apparatus of electronic devices comprising at least one probe head (21) housing GO a plurality of contact probes (22), each contact probe (22) having at least one contact tip adapted to abut onto contact pads of a device C:N in under test (23), as well as a main support (27) and an intermediate support (24) connected to the main support (27) and adapted to N realize a spatial transformation of distances between contact pads on its opposite faces as a space transformer (24). Suitably, the probe CN card (20) comprises at least one connecting element (30) adapted to link the space transformer (24) and the main support (27), this ---, connecting element (30) having a substantially rod-like body (30C) and being equipped with a first end portion (30A) comprising at least one terminal section (30A1) adapted to be engaged in a corresponding housing realized in the space transformer (24) and with a secondterminal portion (30B) adapted to abut onto an abutment element (28) linked to the main support (27). O [Continued on next page] WO 2018/197598 Al MIDEDIMOMOIDEIREEMOMOHMONIMOIMEN (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: — of inventorship (Rule 4.17(iv)) Published: — with international search report (Art. 21(3))
SG11201909342T 2017-04-28 2018-04-26 Probe card for a testing apparatus of electronic devices SG11201909342TA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT102017000046645A IT201700046645A1 (en) 2017-04-28 2017-04-28 Measurement board for a test device of electronic devices
PCT/EP2018/060672 WO2018197598A1 (en) 2017-04-28 2018-04-26 Probe card for a testing apparatus of electronic devices

Publications (1)

Publication Number Publication Date
SG11201909342TA true SG11201909342TA (en) 2019-11-28

Family

ID=60020286

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201909342T SG11201909342TA (en) 2017-04-28 2018-04-26 Probe card for a testing apparatus of electronic devices

Country Status (11)

Country Link
US (2) US11209463B2 (en)
EP (1) EP3615949B1 (en)
JP (1) JP7128837B2 (en)
KR (1) KR102522523B1 (en)
CN (1) CN110573890B (en)
IT (1) IT201700046645A1 (en)
MY (1) MY200160A (en)
PH (1) PH12019502351A1 (en)
SG (1) SG11201909342TA (en)
TW (1) TWI727162B (en)
WO (1) WO2018197598A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201700046645A1 (en) * 2017-04-28 2018-10-28 Technoprobe Spa Measurement board for a test device of electronic devices
TWI750552B (en) 2019-12-16 2021-12-21 旺矽科技股份有限公司 Positionable probe card and manufacturing method thereof
IT202000028838A1 (en) * 2020-11-27 2022-05-27 Technoprobe Spa LARGE MEASUREMENT CARD FOR TESTING ELECTRONIC DEVICES AND RELATED MANUFACTURING METHOD
CN115684681A (en) * 2021-07-26 2023-02-03 迪科特测试科技(苏州)有限公司 Probe card structure
TWI817183B (en) * 2021-08-23 2023-10-01 鴻勁精密股份有限公司 Pressing mechanism, testing apparatus, and handler
IT202200010928A1 (en) * 2022-05-25 2023-11-25 Technoprobe Spa Measurement board with improved temperature control
IT202200010940A1 (en) * 2022-05-25 2023-11-25 Technoprobe Spa Measurement board for an electronic device test equipment and related space transformer

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EP1461628B1 (en) * 2001-12-27 2008-04-09 FormFactor, Inc. Cooling assembly with direct cooling of active electronic components
US7071715B2 (en) * 2004-01-16 2006-07-04 Formfactor, Inc. Probe card configuration for low mechanical flexural strength electrical routing substrates
US7230437B2 (en) * 2004-06-15 2007-06-12 Formfactor, Inc. Mechanically reconfigurable vertical tester interface for IC probing
JP2006010629A (en) * 2004-06-29 2006-01-12 Tokyo Electron Ltd Probe card having parallel adjustment mechanism
US8058889B2 (en) * 2004-12-02 2011-11-15 Sv Probe Pte. Ltd. Probe card with segmented substrate
US7245134B2 (en) * 2005-01-31 2007-07-17 Formfactor, Inc. Probe card assembly including a programmable device to selectively route signals from channels of a test system controller to probes
US7279911B2 (en) * 2005-05-03 2007-10-09 Sv Probe Pte Ltd. Probe card assembly with dielectric structure
MY147876A (en) * 2005-12-05 2013-01-31 Nhk Spring Co Ltd Probe card
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US7692433B2 (en) * 2006-06-16 2010-04-06 Formfactor, Inc. Sawing tile corners on probe card substrates
KR101242004B1 (en) * 2007-03-19 2013-03-11 (주) 미코티엔 Probe card
JP5134864B2 (en) * 2007-05-30 2013-01-30 株式会社日本マイクロニクス Semiconductor inspection equipment
KR101399542B1 (en) * 2007-10-24 2014-05-28 주식회사 코리아 인스트루먼트 Probe card
CN101487874B (en) * 2008-01-15 2011-07-13 旺矽科技股份有限公司 High-speed test device
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TWI453425B (en) * 2012-09-07 2014-09-21 Mjc Probe Inc Apparatus for probing die electricity and method for forming the same
KR101339493B1 (en) * 2012-05-14 2013-12-10 삼성전기주식회사 Space Transformer for Probe Card and Manufacturing Method Thereof
JP2013250146A (en) * 2012-05-31 2013-12-12 Japan Electronic Materials Corp Probe card
ITMI20120996A1 (en) * 2012-06-08 2013-12-09 Technoprobe Spa MEASUREMENT CARD FOR A TEST DEVICE OF ELECTRONIC DEVICES
KR101442354B1 (en) * 2012-12-21 2014-09-17 삼성전기주식회사 Pre space transformer and space transformer manufactured by the pre space transformer, and apparatus for inspecting semiconductor device with the space transformer
ITMI20130561A1 (en) * 2013-04-09 2014-10-10 Technoprobe Spa HEAD OF MEASUREMENT OF ELECTRONIC DEVICES
JP2015012013A (en) * 2013-06-26 2015-01-19 京セラ株式会社 Multilayer wiring board and probe card including the same
US20150061719A1 (en) * 2013-09-05 2015-03-05 Soulbrain Eng Co., Ltd. Vertical probe card for micro-bump probing
CN104793026B (en) * 2014-01-20 2018-09-28 旺矽科技股份有限公司 Supporting structure applied to probe testing device and manufacturing method thereof
CN106104280B (en) * 2014-03-06 2019-08-06 泰克诺探头公司 The high flatness probe card of test device for electronic device
JP6505420B2 (en) * 2014-11-17 2019-04-24 日本電子材料株式会社 Probe and probe card
IT201700046645A1 (en) * 2017-04-28 2018-10-28 Technoprobe Spa Measurement board for a test device of electronic devices

Also Published As

Publication number Publication date
KR20200003049A (en) 2020-01-08
EP3615949A1 (en) 2020-03-04
EP3615949B1 (en) 2022-06-01
JP2020517914A (en) 2020-06-18
CN110573890A (en) 2019-12-13
TWI727162B (en) 2021-05-11
CN110573890B (en) 2022-01-28
PH12019502351A1 (en) 2020-12-07
WO2018197598A1 (en) 2018-11-01
US20200057095A1 (en) 2020-02-20
KR102522523B1 (en) 2023-04-14
JP7128837B2 (en) 2022-08-31
IT201700046645A1 (en) 2018-10-28
US11209463B2 (en) 2021-12-28
US11782075B2 (en) 2023-10-10
TW201839408A (en) 2018-11-01
MY200160A (en) 2023-12-09
US20220099703A1 (en) 2022-03-31

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