SG11201909342TA - Probe card for a testing apparatus of electronic devices - Google Patents
Probe card for a testing apparatus of electronic devicesInfo
- Publication number
- SG11201909342TA SG11201909342TA SG11201909342TA SG11201909342TA SG 11201909342T A SG11201909342T A SG 11201909342TA SG 11201909342T A SG11201909342T A SG 11201909342TA SG 11201909342T A SG11201909342T A SG 11201909342TA
- Authority
- SG
- Singapore
- Prior art keywords
- international
- probe
- main support
- electronic devices
- testing apparatus
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
- G01R1/07378—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Tests Of Electronic Circuits (AREA)
Abstract
22 F3 20 F4 ZhfiriMMY Ze 30C 29 A3 30A 25 27 26 21 ZA > X 22A AC FIG. 2A (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 01 November 2018 (01.11.2018) WIPO I PCT omit VIII °nolo VIII VIII Imo oimIE (10) International Publication Number WO 2018/197598 Al (51) International Patent Classification: (72) Inventor: LIBERINI, Riccardo; c/o Technoprobe S.p.A., G01R 1/073 (2006.01) Via Cavalieri di Vittorio Veneto, 2, 23870 Cernusco Lom- (21) International Application Number: bardone (Lecco) (IT). PCT/EP2018/060672 (74) Agent: FERRARI, Barbara et al.; BOTTI & FERRARI S.r.1., Via Cappellini, 11, 20124 Milano (IT). 26 April 2018 (26.04.2018) (81) Designated States (unless otherwise indicated, for every (25) Filing Language: English kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, (26) Publication Language: English CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, (30) Priority Data: DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, 102017000046645 28 April 2017 (28.04.2017) IT HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, (71) Applicant: TECHNOPROBE S.P.A. [IT/IT]; Via Cava- MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, lien di Vittorio Veneto, 2, 23870 Cernusco Lombardone OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, (Lecco) (IT). SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (22) International Filing Date: (54) Title: PROBE CARD FOR A TESTING APPARATUS OF ELECTRONIC DEVICES (57) : It is described a probe card for a testing apparatus of electronic devices comprising at least one probe head (21) housing GO a plurality of contact probes (22), each contact probe (22) having at least one contact tip adapted to abut onto contact pads of a device C:N in under test (23), as well as a main support (27) and an intermediate support (24) connected to the main support (27) and adapted to N realize a spatial transformation of distances between contact pads on its opposite faces as a space transformer (24). Suitably, the probe CN card (20) comprises at least one connecting element (30) adapted to link the space transformer (24) and the main support (27), this ---, connecting element (30) having a substantially rod-like body (30C) and being equipped with a first end portion (30A) comprising at least one terminal section (30A1) adapted to be engaged in a corresponding housing realized in the space transformer (24) and with a secondterminal portion (30B) adapted to abut onto an abutment element (28) linked to the main support (27). O [Continued on next page] WO 2018/197598 Al MIDEDIMOMOIDEIREEMOMOHMONIMOIMEN (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: — of inventorship (Rule 4.17(iv)) Published: — with international search report (Art. 21(3))
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT102017000046645A IT201700046645A1 (en) | 2017-04-28 | 2017-04-28 | Measurement board for a test device of electronic devices |
PCT/EP2018/060672 WO2018197598A1 (en) | 2017-04-28 | 2018-04-26 | Probe card for a testing apparatus of electronic devices |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201909342TA true SG11201909342TA (en) | 2019-11-28 |
Family
ID=60020286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201909342T SG11201909342TA (en) | 2017-04-28 | 2018-04-26 | Probe card for a testing apparatus of electronic devices |
Country Status (11)
Country | Link |
---|---|
US (2) | US11209463B2 (en) |
EP (1) | EP3615949B1 (en) |
JP (1) | JP7128837B2 (en) |
KR (1) | KR102522523B1 (en) |
CN (1) | CN110573890B (en) |
IT (1) | IT201700046645A1 (en) |
MY (1) | MY200160A (en) |
PH (1) | PH12019502351A1 (en) |
SG (1) | SG11201909342TA (en) |
TW (1) | TWI727162B (en) |
WO (1) | WO2018197598A1 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT201700046645A1 (en) * | 2017-04-28 | 2018-10-28 | Technoprobe Spa | Measurement board for a test device of electronic devices |
IT201800010071A1 (en) * | 2018-11-06 | 2020-05-06 | Technoprobe Spa | Vertical probe measuring head with improved contact properties with a test device |
TWI750552B (en) * | 2019-12-16 | 2021-12-21 | 旺矽科技股份有限公司 | Positionable probe card and manufacturing method thereof |
IT202000028838A1 (en) * | 2020-11-27 | 2022-05-27 | Technoprobe Spa | LARGE MEASUREMENT CARD FOR TESTING ELECTRONIC DEVICES AND RELATED MANUFACTURING METHOD |
CN115684681A (en) * | 2021-07-26 | 2023-02-03 | 迪科特测试科技(苏州)有限公司 | Probe card structure |
TWI817183B (en) * | 2021-08-23 | 2023-10-01 | 鴻勁精密股份有限公司 | Pressing mechanism, testing apparatus, and handler |
IT202200010940A1 (en) * | 2022-05-25 | 2023-11-25 | Technoprobe Spa | Measurement board for an electronic device test equipment and related space transformer |
IT202200010928A1 (en) * | 2022-05-25 | 2023-11-25 | Technoprobe Spa | Measurement board with improved temperature control |
WO2024132800A1 (en) * | 2022-12-21 | 2024-06-27 | Technoprobe S.P.A. | Probe card for a testing apparatus of electronic devices with improved thermal management |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
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US6441629B1 (en) * | 2000-05-31 | 2002-08-27 | Advantest Corp | Probe contact system having planarity adjustment mechanism |
AU2002361863A1 (en) * | 2001-12-27 | 2003-07-24 | Formfactor, Inc. | Cooling assembly with direct cooling of active electronic components |
US7071715B2 (en) * | 2004-01-16 | 2006-07-04 | Formfactor, Inc. | Probe card configuration for low mechanical flexural strength electrical routing substrates |
US7230437B2 (en) * | 2004-06-15 | 2007-06-12 | Formfactor, Inc. | Mechanically reconfigurable vertical tester interface for IC probing |
JP2006010629A (en) * | 2004-06-29 | 2006-01-12 | Tokyo Electron Ltd | Probe card having parallel adjustment mechanism |
KR20080012253A (en) | 2004-12-02 | 2008-02-11 | 에스브이 프로브 피티이 엘티디 | Probe card with segmented substrate |
US7245134B2 (en) * | 2005-01-31 | 2007-07-17 | Formfactor, Inc. | Probe card assembly including a programmable device to selectively route signals from channels of a test system controller to probes |
US7279911B2 (en) * | 2005-05-03 | 2007-10-09 | Sv Probe Pte Ltd. | Probe card assembly with dielectric structure |
JP5289771B2 (en) | 2005-12-05 | 2013-09-11 | 日本発條株式会社 | Probe card |
US7365553B2 (en) | 2005-12-22 | 2008-04-29 | Touchdown Technologies, Inc. | Probe card assembly |
US7692433B2 (en) * | 2006-06-16 | 2010-04-06 | Formfactor, Inc. | Sawing tile corners on probe card substrates |
KR101242004B1 (en) * | 2007-03-19 | 2013-03-11 | (주) 미코티엔 | Probe card |
JP5134864B2 (en) * | 2007-05-30 | 2013-01-30 | 株式会社日本マイクロニクス | Semiconductor inspection equipment |
KR101399542B1 (en) * | 2007-10-24 | 2014-05-28 | 주식회사 코리아 인스트루먼트 | Probe card |
CN101487874B (en) * | 2008-01-15 | 2011-07-13 | 旺矽科技股份有限公司 | High-speed test device |
DE102008034918B4 (en) * | 2008-07-26 | 2012-09-27 | Feinmetall Gmbh | Electrical test equipment for testing an electrical device under test and electrical test method |
WO2010096707A2 (en) * | 2009-02-19 | 2010-08-26 | Touchdown Technologies, Inc. | Microelectronic contactor assembly, structures thereof, and methods of constructing same |
CN101930016A (en) * | 2009-06-19 | 2010-12-29 | 旺矽科技股份有限公司 | Replaceable probe device and probe card using same |
CN102062794B (en) * | 2009-11-13 | 2014-05-14 | 旺矽科技股份有限公司 | Vertical probe card |
KR101141380B1 (en) * | 2009-12-30 | 2012-05-03 | 삼성전기주식회사 | Probe card |
CN102478590B (en) * | 2010-11-22 | 2014-03-05 | 旺矽科技股份有限公司 | Direct probe-testing type probe testing device |
US20120038383A1 (en) * | 2010-08-13 | 2012-02-16 | Chien-Chou Wu | Direct-docking probing device |
CN102478593B (en) * | 2010-11-30 | 2014-04-16 | 励威电子股份有限公司 | Probe card structure |
US9651578B2 (en) * | 2011-04-21 | 2017-05-16 | Mpi Corporation | Assembly method of direct-docking probing device |
TWI453425B (en) * | 2012-09-07 | 2014-09-21 | Mjc Probe Inc | Apparatus for probing die electricity and method for forming the same |
KR101339493B1 (en) * | 2012-05-14 | 2013-12-10 | 삼성전기주식회사 | Space Transformer for Probe Card and Manufacturing Method Thereof |
JP2013250146A (en) | 2012-05-31 | 2013-12-12 | Japan Electronic Materials Corp | Probe card |
ITMI20120996A1 (en) * | 2012-06-08 | 2013-12-09 | Technoprobe Spa | MEASUREMENT CARD FOR A TEST DEVICE OF ELECTRONIC DEVICES |
KR101442354B1 (en) * | 2012-12-21 | 2014-09-17 | 삼성전기주식회사 | Pre space transformer and space transformer manufactured by the pre space transformer, and apparatus for inspecting semiconductor device with the space transformer |
ITMI20130561A1 (en) * | 2013-04-09 | 2014-10-10 | Technoprobe Spa | HEAD OF MEASUREMENT OF ELECTRONIC DEVICES |
JP2015012013A (en) * | 2013-06-26 | 2015-01-19 | 京セラ株式会社 | Multilayer wiring board and probe card including the same |
US20150061719A1 (en) * | 2013-09-05 | 2015-03-05 | Soulbrain Eng Co., Ltd. | Vertical probe card for micro-bump probing |
CN104793026B (en) * | 2014-01-20 | 2018-09-28 | 旺矽科技股份有限公司 | Supporting structure applied to probe testing device and manufacturing method thereof |
CN106104280B (en) * | 2014-03-06 | 2019-08-06 | 泰克诺探头公司 | The high flatness probe card of test device for electronic device |
JP6505420B2 (en) * | 2014-11-17 | 2019-04-24 | 日本電子材料株式会社 | Probe and probe card |
IT201700046645A1 (en) * | 2017-04-28 | 2018-10-28 | Technoprobe Spa | Measurement board for a test device of electronic devices |
-
2017
- 2017-04-28 IT IT102017000046645A patent/IT201700046645A1/en unknown
-
2018
- 2018-04-20 TW TW107113470A patent/TWI727162B/en active
- 2018-04-26 MY MYPI2019005690A patent/MY200160A/en unknown
- 2018-04-26 SG SG11201909342T patent/SG11201909342TA/en unknown
- 2018-04-26 WO PCT/EP2018/060672 patent/WO2018197598A1/en active Application Filing
- 2018-04-26 EP EP18719185.3A patent/EP3615949B1/en active Active
- 2018-04-26 JP JP2019554796A patent/JP7128837B2/en active Active
- 2018-04-26 CN CN201880027831.4A patent/CN110573890B/en active Active
- 2018-04-26 KR KR1020197035062A patent/KR102522523B1/en active IP Right Grant
-
2019
- 2019-10-16 PH PH12019502351A patent/PH12019502351A1/en unknown
- 2019-10-25 US US16/664,669 patent/US11209463B2/en active Active
-
2021
- 2021-12-08 US US17/545,851 patent/US11782075B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
PH12019502351A1 (en) | 2020-12-07 |
US20220099703A1 (en) | 2022-03-31 |
EP3615949A1 (en) | 2020-03-04 |
EP3615949B1 (en) | 2022-06-01 |
JP7128837B2 (en) | 2022-08-31 |
WO2018197598A1 (en) | 2018-11-01 |
CN110573890B (en) | 2022-01-28 |
JP2020517914A (en) | 2020-06-18 |
US20200057095A1 (en) | 2020-02-20 |
MY200160A (en) | 2023-12-09 |
TWI727162B (en) | 2021-05-11 |
US11209463B2 (en) | 2021-12-28 |
US11782075B2 (en) | 2023-10-10 |
KR102522523B1 (en) | 2023-04-14 |
TW201839408A (en) | 2018-11-01 |
KR20200003049A (en) | 2020-01-08 |
IT201700046645A1 (en) | 2018-10-28 |
CN110573890A (en) | 2019-12-13 |
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