JP2020193368A5 - - Google Patents
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- JP2020193368A5 JP2020193368A5 JP2019099567A JP2019099567A JP2020193368A5 JP 2020193368 A5 JP2020193368 A5 JP 2020193368A5 JP 2019099567 A JP2019099567 A JP 2019099567A JP 2019099567 A JP2019099567 A JP 2019099567A JP 2020193368 A5 JP2020193368 A5 JP 2020193368A5
- Authority
- JP
- Japan
- Prior art keywords
- heater
- region
- container
- heating device
- control unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000010438 heat treatment Methods 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 19
- 239000010408 film Substances 0.000 claims description 14
- 238000001704 evaporation Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 238000007740 vapor deposition Methods 0.000 claims description 9
- 238000000427 thin-film deposition Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 6
- 239000011364 vaporized material Substances 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims 6
- 230000007423 decrease Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019099567A JP7241604B2 (ja) | 2019-05-28 | 2019-05-28 | 加熱装置、蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法 |
| CN201911297341.9A CN112011760A (zh) | 2019-05-28 | 2019-12-17 | 加热装置、蒸发源装置、成膜装置、成膜方法及电子器件的制造方法 |
| CN202510873651.XA CN120575129A (zh) | 2019-05-28 | 2019-12-17 | 加热装置、蒸发源装置、成膜装置、成膜方法及电子器件的制造方法 |
| KR1020190170668A KR20200136803A (ko) | 2019-05-28 | 2019-12-19 | 가열 장치, 증발원 장치, 성막 장치, 성막 방법, 및 전자 디바이스의 제조 방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019099567A JP7241604B2 (ja) | 2019-05-28 | 2019-05-28 | 加熱装置、蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020193368A JP2020193368A (ja) | 2020-12-03 |
| JP2020193368A5 true JP2020193368A5 (enrdf_load_stackoverflow) | 2022-03-09 |
| JP7241604B2 JP7241604B2 (ja) | 2023-03-17 |
Family
ID=73506198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019099567A Active JP7241604B2 (ja) | 2019-05-28 | 2019-05-28 | 加熱装置、蒸発源装置、成膜装置、成膜方法および電子デバイスの製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7241604B2 (enrdf_load_stackoverflow) |
| KR (1) | KR20200136803A (enrdf_load_stackoverflow) |
| CN (2) | CN112011760A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102319130B1 (ko) * | 2020-03-11 | 2021-10-29 | 티오에스주식회사 | 가변 온도조절 장치를 구비한 금속-산화물 전자빔 증발원 |
| JP7604240B2 (ja) * | 2021-01-15 | 2024-12-23 | 株式会社ジャパンディスプレイ | 表示装置及び表示装置の製造方法 |
| CN114182208B (zh) * | 2021-12-10 | 2024-01-23 | 深圳市华星光电半导体显示技术有限公司 | 蒸镀源及蒸镀设备 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011162846A (ja) * | 2010-02-10 | 2011-08-25 | Mitsubishi Heavy Ind Ltd | 真空蒸発源 |
| CN102268642A (zh) * | 2011-07-22 | 2011-12-07 | 上海奕瑞光电子科技有限公司 | 电阻加热式蒸发源 |
| JP5557817B2 (ja) * | 2011-09-30 | 2014-07-23 | 株式会社日立ハイテクノロジーズ | 蒸発源および成膜装置 |
| JP2014070227A (ja) * | 2012-09-27 | 2014-04-21 | Hitachi High-Technologies Corp | 成膜装置とその蒸発源の温度制御方法及び温度制御装置 |
| JP2014072005A (ja) * | 2012-09-28 | 2014-04-21 | Hitachi High-Technologies Corp | 蒸発源、真空蒸着装置及び有機ｅｌ表示装置製造方法 |
| JP6223675B2 (ja) * | 2012-11-29 | 2017-11-01 | 株式会社オプトラン | 真空蒸着源及びそれを用いた真空蒸着方法 |
| CN103757590B (zh) * | 2013-12-31 | 2016-04-20 | 深圳市华星光电技术有限公司 | 一种镀膜机坩埚设备 |
| JP6488928B2 (ja) * | 2015-07-15 | 2019-03-27 | アイシン精機株式会社 | 蒸着装置 |
| JP6436544B1 (ja) * | 2017-08-07 | 2018-12-12 | キヤノントッキ株式会社 | 蒸発源装置およびその制御方法 |
-
2019
- 2019-05-28 JP JP2019099567A patent/JP7241604B2/ja active Active
- 2019-12-17 CN CN201911297341.9A patent/CN112011760A/zh active Pending
- 2019-12-17 CN CN202510873651.XA patent/CN120575129A/zh active Pending
- 2019-12-19 KR KR1020190170668A patent/KR20200136803A/ko active Pending
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