JP2020002436A5 - - Google Patents
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- Publication number
- JP2020002436A5 JP2020002436A5 JP2018123555A JP2018123555A JP2020002436A5 JP 2020002436 A5 JP2020002436 A5 JP 2020002436A5 JP 2018123555 A JP2018123555 A JP 2018123555A JP 2018123555 A JP2018123555 A JP 2018123555A JP 2020002436 A5 JP2020002436 A5 JP 2020002436A5
- Authority
- JP
- Japan
- Prior art keywords
- heating device
- crucible
- heater
- reflector
- treatment unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 15
- 238000004381 surface treatment Methods 0.000 claims 5
- 230000008020 evaporation Effects 0.000 claims 3
- 238000001704 evaporation Methods 0.000 claims 3
- 238000005422 blasting Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000007751 thermal spraying Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018123555A JP7092577B2 (ja) | 2018-06-28 | 2018-06-28 | 蒸発源及び蒸着装置 |
| KR1020180125582A KR20200001956A (ko) | 2018-06-28 | 2018-10-19 | 가열 장치, 증발원 및 증착 장치 |
| CN201811362786.6A CN110656309B (zh) | 2018-06-28 | 2018-11-16 | 蒸发源及蒸镀装置 |
| JP2022097249A JP2022113863A (ja) | 2018-06-28 | 2022-06-16 | 蒸発源及び蒸着装置 |
| KR1020240032014A KR102661888B1 (ko) | 2018-06-28 | 2024-03-06 | 가열 장치, 증발원 및 증착 장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018123555A JP7092577B2 (ja) | 2018-06-28 | 2018-06-28 | 蒸発源及び蒸着装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022097249A Division JP2022113863A (ja) | 2018-06-28 | 2022-06-16 | 蒸発源及び蒸着装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020002436A JP2020002436A (ja) | 2020-01-09 |
| JP2020002436A5 true JP2020002436A5 (enrdf_load_stackoverflow) | 2021-07-26 |
| JP7092577B2 JP7092577B2 (ja) | 2022-06-28 |
Family
ID=69028562
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018123555A Active JP7092577B2 (ja) | 2018-06-28 | 2018-06-28 | 蒸発源及び蒸着装置 |
| JP2022097249A Pending JP2022113863A (ja) | 2018-06-28 | 2022-06-16 | 蒸発源及び蒸着装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022097249A Pending JP2022113863A (ja) | 2018-06-28 | 2022-06-16 | 蒸発源及び蒸着装置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (2) | JP7092577B2 (enrdf_load_stackoverflow) |
| KR (2) | KR20200001956A (enrdf_load_stackoverflow) |
| CN (1) | CN110656309B (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7092577B2 (ja) * | 2018-06-28 | 2022-06-28 | キヤノントッキ株式会社 | 蒸発源及び蒸着装置 |
| JP7520515B2 (ja) | 2020-01-09 | 2024-07-23 | キヤノン株式会社 | 通信装置、制御方法、及びプログラム |
| JP2022107982A (ja) * | 2021-01-12 | 2022-07-25 | キヤノントッキ株式会社 | 蒸発源装置、成膜装置、成膜方法及び電子デバイスの製造方法 |
| JP7394242B1 (ja) | 2023-01-13 | 2023-12-07 | 日本碍子株式会社 | 乾燥装置 |
| CN117403186A (zh) * | 2023-11-09 | 2024-01-16 | 苏州迈为科技股份有限公司 | 一种真空镀膜设备的加热装置、方法及镀膜设备 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5943871A (ja) * | 1982-09-04 | 1984-03-12 | Konishiroku Photo Ind Co Ltd | 蒸発材料収容器 |
| JPS6467518A (en) * | 1987-09-07 | 1989-03-14 | Matsushita Electric Ind Co Ltd | Catalytic combustion equipment |
| JPH0626926A (ja) * | 1992-05-12 | 1994-02-04 | Fujitsu Ltd | 赤外線検知器 |
| JPH06108236A (ja) * | 1992-09-25 | 1994-04-19 | Mitsubishi Electric Corp | 薄膜形成装置 |
| WO2006075755A1 (ja) | 2005-01-17 | 2006-07-20 | Youtec Co., Ltd. | 蒸発源及び蒸着装置 |
| JP2006274336A (ja) * | 2005-03-29 | 2006-10-12 | Jfe Steel Kk | 直火式の連続加熱炉による鋼板の加熱方法 |
| JP2009093933A (ja) * | 2007-10-10 | 2009-04-30 | Negishi Seisakusho:Kk | 赤外線ヒーター装置およびこれを備える加熱装置 |
| JP2011162867A (ja) * | 2010-02-15 | 2011-08-25 | Mitsubishi Heavy Ind Ltd | 真空蒸発装置 |
| JP2012234909A (ja) * | 2011-04-28 | 2012-11-29 | Nissan Motor Co Ltd | ヒートシンク、ヒートシンクの製造方法及び灯具 |
| KR102124588B1 (ko) * | 2012-10-22 | 2020-06-22 | 삼성디스플레이 주식회사 | 선형 증착원 및 이를 포함하는 진공 증착 장치 |
| JP2015067850A (ja) * | 2013-09-27 | 2015-04-13 | 株式会社日立ハイテクファインシステムズ | 真空蒸着装置 |
| JP3203978U (ja) * | 2016-02-18 | 2016-04-28 | 根岸 敏夫 | 有機材料蒸発源 |
| KR20160094347A (ko) * | 2016-03-30 | 2016-08-09 | 한국표준과학연구원 | 유도 가열 선형 증발 증착 장치 |
| JP7092577B2 (ja) * | 2018-06-28 | 2022-06-28 | キヤノントッキ株式会社 | 蒸発源及び蒸着装置 |
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2018
- 2018-06-28 JP JP2018123555A patent/JP7092577B2/ja active Active
- 2018-10-19 KR KR1020180125582A patent/KR20200001956A/ko not_active Ceased
- 2018-11-16 CN CN201811362786.6A patent/CN110656309B/zh active Active
-
2022
- 2022-06-16 JP JP2022097249A patent/JP2022113863A/ja active Pending
-
2024
- 2024-03-06 KR KR1020240032014A patent/KR102661888B1/ko active Active