JP2020086461A - ディスプレイ装置及びその製造方法 - Google Patents
ディスプレイ装置及びその製造方法 Download PDFInfo
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- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 description 2
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Abstract
Description
支持基板と、
前記支持基板上に具備され、前記ピクセル電極に電源を印加する駆動素子を含む駆動層と、
前記駆動層上の、第1半導体層、活性層及び第2半導体層を含む発光層と、を含む。
支持基板と、
前記支持基板上に具備され、駆動素子を含む駆動層と、
前記駆動層に積層された第1半導体層、活性層及び第2半導体層を含み、前記活性層からの光がサブピクセル単位に発光されるように隔離構造を有する発光層と、
前記第1半導体層と、前記サブピクセル単位で電気的に連結されるように設けられる第1電極と、
前記第2半導体層と電気的に連結されるように設けられる第2電極と、を含む。
前記第1半導体層上に活性層を形成する段階と、
前記活性層上に第2半導体層を形成する段階と、
前記活性層をサブピクセル単位に隔離させる段階と、
前記第2半導体層に、サブピクセル単位で第1電極を形成する段階と、
前記第1電極に電気的に連結される駆動素子を含む駆動層を形成する段階と、
前記駆動層を支持基板に結合する段階と、
前記エピ基板を除去する段階と、
前記第1半導体層に第2電極を形成する段階と、を含む。
120,220,455 結合層
130,230 駆動層
135,235 駆動素子
140,240 発光層
141,241 第1電極
142,242 第1半導体層
143,243 活性層
145,245 第2半導体層
146,246,246B,346 第2電極
147,247,430 隔離構造
248,465 微細パターン構造
149,249 ウィンドウ領域
150,250 隔壁
151,152,153,251,252,253,351,352,353,481,482,483 色変換層
Claims (39)
- サブピクセル単位で電源を印加するように構成されたピクセル電極と、共通電極とを含み、サブピクセル別に光を発光するディスプレイ装置であって、
支持基板と、
前記支持基板上に具備され、前記ピクセル電極に電源を印加する駆動素子を含む駆動層と、
前記駆動層上の、第1半導体層、活性層及び第2半導体層を含む発光層と、を含むディスプレイ装置。 - 前記支持基板と前記駆動層との間に、結合層がさらに具備されたことを特徴とする請求項1に記載のディスプレイ装置。
- 前記ピクセル電極が前記駆動層と前記発光層との間に具備されたことを特徴とする請求項1に記載のディスプレイ装置。
- 前記共通電極が前記発光層上に具備されたことを特徴とする請求項1に記載のディスプレイ装置。
- 前記支持基板は、シリコン基板、ガラス基板、サファイア基板、またはSiO2がコーティングされたシリコン基板を含むことを特徴とする請求項1に記載のディスプレイ装置。
- 前記駆動素子は、トランジスタ、薄膜トランジスタまたは高電子移動度トランジスタ(HEMT)を含むことを特徴とする請求項1に記載のディスプレイ装置。
- 前記ピクセル電極が、前記活性層から発光した光を反射させるように構成されたことを特徴とする請求項1に記載のディスプレイ装置。
- 前記ピクセル電極が、Ag、Au、Al、CrまたはNi、またはそれらの合金を含むことを特徴とする請求項7に記載のディスプレイ装置。
- 前記発光層がサブピクセル単位で発光構造を隔離させる隔離構造を含むことを特徴とする請求項1に記載のディスプレイ装置。
- 前記駆動層の前記隔離構造に対応する領域に、電流遮断層がさらに具備されたことを特徴とする請求項9に記載のディスプレイ装置。
- 前記共通電極が透明電極によって構成されたことを特徴とする請求項1に記載のディスプレイ装置。
- 前記共通電極が隣接するサブピクセル間に具備されたトレンチ構造を含むことを特徴とする請求項1に記載のディスプレイ装置。
- 前記トレンチ構造は、その底面が、前記活性層の前記第2半導体層に対向する面の延長線より上部に位置することを特徴とする請求項12に記載のディスプレイ装置。
- 前記第2半導体層に、微細パターン構造を具備したことを特徴とする請求項1に記載のディスプレイ装置。
- 前記発光層から発光した光を、互いに異なるカラー光に変換する複数の色変換層をさらに含むことを特徴とする請求項1に記載のディスプレイ装置。
- 前記複数の色変換層間に、反射膜が具備された隔壁をさらに含むことを特徴とする請求項15に記載のディスプレイ装置。
- 支持基板と、
前記支持基板上に具備され、駆動素子を含む駆動層と、
前記駆動層に積層された第1半導体層、活性層及び第2半導体層を含み、前記活性層からの光がサブピクセル単位に発光されるように隔離構造を有する発光層と、
前記第1半導体層と、前記サブピクセル単位で電気的に連結されるように設けられる第1電極と、
前記第2半導体層と電気的に連結されるように設けられる第2電極と、を含むディスプレイ装置。 - 前記支持基板と前記駆動層との間に、接着層またはダイレクトボンディング層がさらに具備されたことを特徴とする請求項17に記載のディスプレイ装置。
- 前記第2電極が共通電極によって構成されたことを特徴とする請求項17に記載のディスプレイ装置。
- 前記第2電極が透明電極によって構成され、第2半導体層を覆うように配置されたことを特徴とする請求項17に記載のディスプレイ装置。
- 前記第2電極が不透明電極によって構成され、第2電極に、前記活性層から出た光が透過されるようにウィンドウ領域が具備されたことを特徴とする請求項17に記載のディスプレイ装置。
- 前記第2電極が、隣接するサブピクセル間に具備されたトレンチ構造を含むことを特徴とする請求項17に記載のディスプレイ装置。
- 前記第2電極の前記トレンチ構造が、前記活性層で側方に発光した光を反射させるように構成されたことを特徴とする請求項22に記載のディスプレイ装置。
- 前記第2電極の前記トレンチ構造は、その底が、前記活性層の前記第2半導体層に対向する面の延長線より上部に位置することを特徴とする請求項22に記載のディスプレイ装置。
- 前記隔離構造がイオン注入領域を含むことを特徴とする請求項17に記載のディスプレイ装置。
- 前記発光層から発光した光を、互いに異なるカラー光に変換する複数の色変換層をさらに含むことを特徴とする請求項17に記載のディスプレイ装置。
- エピ基板上に第1半導体層を形成する段階と、
前記第1半導体層上に活性層を形成する段階と、
前記活性層上に第2半導体層を形成する段階と、
前記活性層をサブピクセル単位に隔離させる段階と、
前記第2半導体層にサブピクセル単位で第1電極を形成する段階と、
前記第1電極に電気的に連結される駆動素子を含む駆動層を形成する段階と、
前記駆動層を支持基板に結合する段階と、
前記エピ基板を除去する段階と、
前記第1半導体層に第2電極を形成する段階と、を含むディスプレイ装置製造方法。 - 前記活性層をサブピクセル単位に隔離させる段階は、イオン注入領域を形成する段階を含むことを特徴とする請求項27に記載のディスプレイ装置製造方法。
- 前記第1電極が光を反射させる反射材料によって形成されることを特徴とする請求項27に記載のディスプレイ装置製造方法。
- 前記支持基板に、前記駆動層をフュージョンボンディングまたはダイレクトボンディングを行うことを特徴とする請求項27に記載のディスプレイ装置製造方法。
- 前記第2電極が共通電極として形成されることを特徴とする請求項27に記載のディスプレイ装置製造方法。
- 前記第2電極が透明電極であり、前記第1半導体層を覆うように形成されることを特徴とする請求項27に記載のディスプレイ装置製造方法。
- 前記第2電極が不透明電極として形成され、前記第2電極に、前記活性層から出た光が透過されるように、ウィンドウ領域が形成されることを特徴とする請求項27に記載のディスプレイ装置製造方法。
- 前記第2電極が隣接するサブピクセル間に形成されたトレンチ構造を含むことを特徴とする請求項27に記載のディスプレイ装置製造方法。
- 前記第2電極の前記トレンチ構造が、前記活性層で側方に発光した光を反射させるように形成されることを特徴とする請求項34に記載のディスプレイ装置製造方法。
- 前記第2電極の前記トレンチ構造は、その底が、前記活性層の前記第1半導体層に対向する面の延長線より上部に位置するように形成されることを特徴とする請求項34に記載のディスプレイ装置製造方法。
- 前記活性層から発光した光を互いに異なるカラー光に変換する複数の色変換層を、前記サブピクセル単位に対応するように形成する段階をさらに含むことを特徴とする請求項27に記載のディスプレイ装置製造方法。
- 前記第1電極が前記活性層に対向するように形成されることを特徴とする請求項27に記載のディスプレイ装置製造方法。
- 前記第1半導体層に、前記活性層に対応する位置に微細パターン構造を形成する段階をさらに含むことを特徴とする請求項27に記載のディスプレイ装置製造方法。
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US20210375983A1 (en) | 2021-12-02 |
US11121171B2 (en) | 2021-09-14 |
EP3660900A1 (en) | 2020-06-03 |
JP7402023B2 (ja) | 2023-12-20 |
CN111223885A (zh) | 2020-06-02 |
US20200168663A1 (en) | 2020-05-28 |
US11705479B2 (en) | 2023-07-18 |
EP3660900B1 (en) | 2022-08-31 |
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