JP2019529902A5 - - Google Patents
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- JP2019529902A5 JP2019529902A5 JP2019513887A JP2019513887A JP2019529902A5 JP 2019529902 A5 JP2019529902 A5 JP 2019529902A5 JP 2019513887 A JP2019513887 A JP 2019513887A JP 2019513887 A JP2019513887 A JP 2019513887A JP 2019529902 A5 JP2019529902 A5 JP 2019529902A5
- Authority
- JP
- Japan
- Prior art keywords
- complementary
- mounting structure
- rotation
- relative
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| BR102016020900A BR102016020900A2 (pt) | 2016-09-09 | 2016-09-09 | método de controle de grau de liberdade em sistemas mecatrônicos e monocromador de duplo cristal |
| BRBR102016020900-5 | 2016-09-09 | ||
| BRBR102017019178-8 | 2017-09-06 | ||
| BR102017019178-8A BR102017019178B1 (pt) | 2017-09-06 | 2017-09-06 | Instrumento para movimentação e posicionamento de elementos ópticos com resolução e estabilidade mecânica nanométricas em linhas de luz |
| PCT/BR2017/050262 WO2018045441A1 (pt) | 2016-09-09 | 2017-09-06 | Instrumento para movimentação e posicionamento de elementos ópticos com resolução e estabilidade mecânica nanométricas em linhas de luz |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019529902A JP2019529902A (ja) | 2019-10-17 |
| JP2019529902A5 true JP2019529902A5 (enExample) | 2022-08-15 |
| JP7181184B2 JP7181184B2 (ja) | 2022-11-30 |
Family
ID=61561391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019513887A Active JP7181184B2 (ja) | 2016-09-09 | 2017-09-06 | シンクロトロンビームラインにおいて、ナノメートル機械的安定性及び分解能を有する光学素子を移動及び位置決めするための機器 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US20190204590A1 (enExample) |
| JP (1) | JP7181184B2 (enExample) |
| AU (1) | AU2017325120B2 (enExample) |
| CA (1) | CA3036294C (enExample) |
| WO (1) | WO2018045441A1 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20240168395A1 (en) * | 2022-11-18 | 2024-05-23 | Orbotech Ltd. | Vertical motion axis for imaging optical head |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2590418B2 (ja) * | 1992-06-25 | 1997-03-12 | 工業技術院長 | ブタン液送システム |
| US5283682A (en) * | 1992-10-06 | 1994-02-01 | Ball Corporation | Reactionless scanning and positioning system |
| EP1321822A1 (en) * | 2001-12-21 | 2003-06-25 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7126671B2 (en) | 2003-04-04 | 2006-10-24 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US8358039B2 (en) * | 2008-10-17 | 2013-01-22 | Massachusetts Institute Of Technology | High-scan rate positioner for scanned probe microscopy |
| JP6048867B2 (ja) | 2012-04-17 | 2016-12-21 | 国立大学法人大阪大学 | Ｘ線光学システム |
| DE102014204523A1 (de) * | 2014-03-12 | 2015-09-17 | Carl Zeiss Smt Gmbh | Schwingungskompensiertes optisches system, lithographieanlage und verfahren |
-
2017
- 2017-09-06 US US16/331,925 patent/US20190204590A1/en not_active Abandoned
- 2017-09-06 AU AU2017325120A patent/AU2017325120B2/en active Active
- 2017-09-06 WO PCT/BR2017/050262 patent/WO2018045441A1/pt not_active Ceased
- 2017-09-06 JP JP2019513887A patent/JP7181184B2/ja active Active
- 2017-09-06 CA CA3036294A patent/CA3036294C/en active Active
-
2021
- 2021-10-27 US US17/512,458 patent/US11747612B2/en active Active
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