JP2019220503A5 - - Google Patents

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Publication number
JP2019220503A5
JP2019220503A5 JP2018114381A JP2018114381A JP2019220503A5 JP 2019220503 A5 JP2019220503 A5 JP 2019220503A5 JP 2018114381 A JP2018114381 A JP 2018114381A JP 2018114381 A JP2018114381 A JP 2018114381A JP 2019220503 A5 JP2019220503 A5 JP 2019220503A5
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JP
Japan
Prior art keywords
electrostatic chuck
primer
tubular insulating
chuck according
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2018114381A
Other languages
English (en)
Japanese (ja)
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JP7090481B2 (ja
JP2019220503A (ja
Filing date
Publication date
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Priority to JP2018114381A priority Critical patent/JP7090481B2/ja
Priority claimed from JP2018114381A external-priority patent/JP7090481B2/ja
Priority to US16/430,569 priority patent/US11088006B2/en
Priority to KR1020190066516A priority patent/KR102744643B1/ko
Priority to TW108119861A priority patent/TWI820147B/zh
Publication of JP2019220503A publication Critical patent/JP2019220503A/ja
Publication of JP2019220503A5 publication Critical patent/JP2019220503A5/ja
Application granted granted Critical
Publication of JP7090481B2 publication Critical patent/JP7090481B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2018114381A 2018-06-15 2018-06-15 静電チャック及びその製造方法 Active JP7090481B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2018114381A JP7090481B2 (ja) 2018-06-15 2018-06-15 静電チャック及びその製造方法
US16/430,569 US11088006B2 (en) 2018-06-15 2019-06-04 Electrostatic chuck
KR1020190066516A KR102744643B1 (ko) 2018-06-15 2019-06-05 정전 척 및 그 제조 방법
TW108119861A TWI820147B (zh) 2018-06-15 2019-06-10 靜電夾盤及其製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018114381A JP7090481B2 (ja) 2018-06-15 2018-06-15 静電チャック及びその製造方法

Publications (3)

Publication Number Publication Date
JP2019220503A JP2019220503A (ja) 2019-12-26
JP2019220503A5 true JP2019220503A5 (https=) 2021-04-22
JP7090481B2 JP7090481B2 (ja) 2022-06-24

Family

ID=68840316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018114381A Active JP7090481B2 (ja) 2018-06-15 2018-06-15 静電チャック及びその製造方法

Country Status (4)

Country Link
US (1) US11088006B2 (https=)
JP (1) JP7090481B2 (https=)
KR (1) KR102744643B1 (https=)
TW (1) TWI820147B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019146796A1 (ja) * 2018-01-29 2019-08-01 京セラ株式会社 試料保持具
WO2021192935A1 (ja) * 2020-03-26 2021-09-30 株式会社巴川製紙所 静電チャック装置、静電チャック装置用スリーブ
KR20220103046A (ko) 2021-01-14 2022-07-21 신꼬오덴기 고교 가부시키가이샤 기판 고정 장치
US20260090330A1 (en) * 2022-09-14 2026-03-26 Kyocera Corporation Adsorption substrate

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6071630A (en) * 1996-03-04 2000-06-06 Shin-Etsu Chemical Co., Ltd. Electrostatic chuck
US6151203A (en) * 1998-12-14 2000-11-21 Applied Materials, Inc. Connectors for an electrostatic chuck and combination thereof
US20050042881A1 (en) * 2003-05-12 2005-02-24 Tokyo Electron Limited Processing apparatus
JP5053696B2 (ja) * 2007-04-26 2012-10-17 信越化学工業株式会社 静電チャック
JP5567494B2 (ja) * 2007-12-19 2014-08-06 ラム リサーチ コーポレーション 半導体真空処理装置用のコンポーネント・アセンブリ、アセンブリを結合する方法、及び、半導体基板を処理する方法
US9520314B2 (en) * 2008-12-19 2016-12-13 Applied Materials, Inc. High temperature electrostatic chuck bonding adhesive
JP5936361B2 (ja) * 2012-01-12 2016-06-22 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP6006972B2 (ja) 2012-04-26 2016-10-12 新光電気工業株式会社 静電チャック
JP6162428B2 (ja) 2013-02-27 2017-07-12 日本特殊陶業株式会社 支持装置
JP6493518B2 (ja) * 2016-01-19 2019-04-03 住友大阪セメント株式会社 静電チャック装置
WO2019131115A1 (ja) * 2017-12-28 2019-07-04 住友大阪セメント株式会社 静電チャック装置

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