JP2017157821A5 - - Google Patents

Download PDF

Info

Publication number
JP2017157821A5
JP2017157821A5 JP2016223348A JP2016223348A JP2017157821A5 JP 2017157821 A5 JP2017157821 A5 JP 2017157821A5 JP 2016223348 A JP2016223348 A JP 2016223348A JP 2016223348 A JP2016223348 A JP 2016223348A JP 2017157821 A5 JP2017157821 A5 JP 2017157821A5
Authority
JP
Japan
Prior art keywords
substrate
mold
peripheral member
imprint
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016223348A
Other languages
English (en)
Japanese (ja)
Other versions
JP6789772B2 (ja
JP2017157821A (ja
Filing date
Publication date
Application filed filed Critical
Priority to KR1020187026955A priority Critical patent/KR102134212B1/ko
Priority to PCT/JP2017/002097 priority patent/WO2017149992A1/ja
Priority to TW106104125A priority patent/TWI632595B/zh
Publication of JP2017157821A publication Critical patent/JP2017157821A/ja
Publication of JP2017157821A5 publication Critical patent/JP2017157821A5/ja
Application granted granted Critical
Publication of JP6789772B2 publication Critical patent/JP6789772B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2016223348A 2016-02-29 2016-11-16 インプリント装置、インプリント方法および物品製造方法 Active JP6789772B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020187026955A KR102134212B1 (ko) 2016-02-29 2017-01-23 임프린트 장치, 임프린트 방법 및 물품 제조 방법
PCT/JP2017/002097 WO2017149992A1 (ja) 2016-02-29 2017-01-23 インプリント装置、インプリント方法および物品製造方法
TW106104125A TWI632595B (zh) 2016-02-29 2017-02-08 壓印裝置、壓印方法及物品製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016037999 2016-02-29
JP2016037999 2016-02-29

Publications (3)

Publication Number Publication Date
JP2017157821A JP2017157821A (ja) 2017-09-07
JP2017157821A5 true JP2017157821A5 (https=) 2019-12-26
JP6789772B2 JP6789772B2 (ja) 2020-11-25

Family

ID=59810121

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016223348A Active JP6789772B2 (ja) 2016-02-29 2016-11-16 インプリント装置、インプリント方法および物品製造方法

Country Status (3)

Country Link
JP (1) JP6789772B2 (https=)
KR (1) KR102134212B1 (https=)
TW (1) TWI632595B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6802691B2 (ja) * 2016-11-18 2020-12-16 キヤノン株式会社 インプリント装置および物品製造方法
JP7495814B2 (ja) * 2020-05-13 2024-06-05 キヤノン株式会社 インプリント装置、および物品の製造方法
KR102542639B1 (ko) * 2021-02-10 2023-06-12 성균관대학교산학협력단 미세 패턴 형성 장치 및 방법
KR102528880B1 (ko) * 2021-02-16 2023-05-03 성균관대학교산학협력단 전기수력학 불안정성을 이용한 패턴제작기술의 미세 구조체 사이의 2차 간섭효과에 의한 초미세구조체 제작 및 초소수성표면 형성방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002069634A (ja) * 2000-08-29 2002-03-08 Canon Inc 薄膜作製方法および薄膜作製装置
JP2008258490A (ja) * 2007-04-06 2008-10-23 Canon Inc 露光装置及び原版
JP4758406B2 (ja) * 2007-10-02 2011-08-31 日本電信電話株式会社 インプリント方法
JP2011040464A (ja) * 2009-08-07 2011-02-24 Canon Inc 異物除去装置、露光装置及びデバイス製造方法
JP6171412B2 (ja) * 2013-03-06 2017-08-02 大日本印刷株式会社 インプリント方法、インプリント用のモールドおよびインプリント装置
JP6139434B2 (ja) * 2013-12-13 2017-05-31 株式会社東芝 インプリント方法
JP6313591B2 (ja) * 2013-12-20 2018-04-18 キヤノン株式会社 インプリント装置、異物除去方法及び物品の製造方法
JP2015149390A (ja) * 2014-02-06 2015-08-20 キヤノン株式会社 インプリント装置、型、および物品の製造方法
JP6399839B2 (ja) * 2014-07-15 2018-10-03 キヤノン株式会社 インプリント装置、および物品の製造方法

Similar Documents

Publication Publication Date Title
JP2017157821A5 (https=)
SG10201804649VA (en) Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program
SG10201804881QA (en) Plasma processing apparatus and plasma processing method
JP2016213358A5 (https=)
JP2017501572A5 (https=)
SG10201807483QA (en) Dechuck control method and plasma processing apparatus
JP2015095396A5 (https=)
JP2019004027A5 (https=)
JP2018082127A5 (https=)
AR110192A1 (es) Dispositivo de calentamiento inductivo, sistema generador de aerosol que comprende un dispositivo de calentamiento inductivo y método para operarlo
WO2016102972A3 (en) Method and apparatus for manipulating the shape of hair
JP2018107265A5 (https=)
JP2013168645A5 (https=)
JP2009533551A5 (https=)
KR102454532B9 (ko) 전기적 아크 및 발광을 방지하고 프로세스 균일도를 개선하기 위한 피처들을 갖는 정전 척
JP2016092342A5 (https=)
JP2015002209A5 (https=)
JP2016115819A5 (https=)
JP2015149390A5 (https=)
JP2016080826A5 (https=)
JP2017073518A5 (https=)
JP2015511378A5 (https=)
TW201614388A (en) Tooling configuration for electric/magnetic field guided acid profile control in a photoresist layer
GB2572033A (en) Electrolytic treatment for nuclear decontamination
JP2017147343A5 (https=)