JP6789772B2 - インプリント装置、インプリント方法および物品製造方法 - Google Patents

インプリント装置、インプリント方法および物品製造方法 Download PDF

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Publication number
JP6789772B2
JP6789772B2 JP2016223348A JP2016223348A JP6789772B2 JP 6789772 B2 JP6789772 B2 JP 6789772B2 JP 2016223348 A JP2016223348 A JP 2016223348A JP 2016223348 A JP2016223348 A JP 2016223348A JP 6789772 B2 JP6789772 B2 JP 6789772B2
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JP
Japan
Prior art keywords
mold
substrate
peripheral member
voltage
chuck
Prior art date
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Active
Application number
JP2016223348A
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English (en)
Japanese (ja)
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JP2017157821A5 (https=
JP2017157821A (ja
Inventor
雅見 米川
雅見 米川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to KR1020187026955A priority Critical patent/KR102134212B1/ko
Priority to PCT/JP2017/002097 priority patent/WO2017149992A1/ja
Priority to TW106104125A priority patent/TWI632595B/zh
Publication of JP2017157821A publication Critical patent/JP2017157821A/ja
Publication of JP2017157821A5 publication Critical patent/JP2017157821A5/ja
Application granted granted Critical
Publication of JP6789772B2 publication Critical patent/JP6789772B2/ja
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7042—Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2016223348A 2016-02-29 2016-11-16 インプリント装置、インプリント方法および物品製造方法 Active JP6789772B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020187026955A KR102134212B1 (ko) 2016-02-29 2017-01-23 임프린트 장치, 임프린트 방법 및 물품 제조 방법
PCT/JP2017/002097 WO2017149992A1 (ja) 2016-02-29 2017-01-23 インプリント装置、インプリント方法および物品製造方法
TW106104125A TWI632595B (zh) 2016-02-29 2017-02-08 壓印裝置、壓印方法及物品製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016037999 2016-02-29
JP2016037999 2016-02-29

Publications (3)

Publication Number Publication Date
JP2017157821A JP2017157821A (ja) 2017-09-07
JP2017157821A5 JP2017157821A5 (https=) 2019-12-26
JP6789772B2 true JP6789772B2 (ja) 2020-11-25

Family

ID=59810121

Family Applications (1)

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JP2016223348A Active JP6789772B2 (ja) 2016-02-29 2016-11-16 インプリント装置、インプリント方法および物品製造方法

Country Status (3)

Country Link
JP (1) JP6789772B2 (https=)
KR (1) KR102134212B1 (https=)
TW (1) TWI632595B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6802691B2 (ja) * 2016-11-18 2020-12-16 キヤノン株式会社 インプリント装置および物品製造方法
JP7495814B2 (ja) * 2020-05-13 2024-06-05 キヤノン株式会社 インプリント装置、および物品の製造方法
KR102542639B1 (ko) * 2021-02-10 2023-06-12 성균관대학교산학협력단 미세 패턴 형성 장치 및 방법
KR102528880B1 (ko) * 2021-02-16 2023-05-03 성균관대학교산학협력단 전기수력학 불안정성을 이용한 패턴제작기술의 미세 구조체 사이의 2차 간섭효과에 의한 초미세구조체 제작 및 초소수성표면 형성방법

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002069634A (ja) * 2000-08-29 2002-03-08 Canon Inc 薄膜作製方法および薄膜作製装置
JP2008258490A (ja) * 2007-04-06 2008-10-23 Canon Inc 露光装置及び原版
JP4758406B2 (ja) * 2007-10-02 2011-08-31 日本電信電話株式会社 インプリント方法
JP2011040464A (ja) * 2009-08-07 2011-02-24 Canon Inc 異物除去装置、露光装置及びデバイス製造方法
JP6171412B2 (ja) * 2013-03-06 2017-08-02 大日本印刷株式会社 インプリント方法、インプリント用のモールドおよびインプリント装置
JP6139434B2 (ja) * 2013-12-13 2017-05-31 株式会社東芝 インプリント方法
JP6313591B2 (ja) * 2013-12-20 2018-04-18 キヤノン株式会社 インプリント装置、異物除去方法及び物品の製造方法
JP2015149390A (ja) * 2014-02-06 2015-08-20 キヤノン株式会社 インプリント装置、型、および物品の製造方法
JP6399839B2 (ja) * 2014-07-15 2018-10-03 キヤノン株式会社 インプリント装置、および物品の製造方法

Also Published As

Publication number Publication date
KR20180118684A (ko) 2018-10-31
TWI632595B (zh) 2018-08-11
KR102134212B1 (ko) 2020-07-15
JP2017157821A (ja) 2017-09-07
TW201732881A (zh) 2017-09-16

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