JP2015518659A5 - - Google Patents
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- Publication number
- JP2015518659A5 JP2015518659A5 JP2015506147A JP2015506147A JP2015518659A5 JP 2015518659 A5 JP2015518659 A5 JP 2015518659A5 JP 2015506147 A JP2015506147 A JP 2015506147A JP 2015506147 A JP2015506147 A JP 2015506147A JP 2015518659 A5 JP2015518659 A5 JP 2015518659A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- conductive layer
- layer
- thin film
- holder according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261635754P | 2012-04-19 | 2012-04-19 | |
| US61/635,754 | 2012-04-19 | ||
| PCT/EP2013/055597 WO2013156236A1 (en) | 2012-04-19 | 2013-03-19 | Substrate holder, lithographic apparatus, and device manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2015518659A JP2015518659A (ja) | 2015-07-02 |
| JP2015518659A5 true JP2015518659A5 (https=) | 2016-05-12 |
Family
ID=47988926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015506147A Withdrawn JP2015518659A (ja) | 2012-04-19 | 2013-03-19 | 基板ホルダ、リソグラフィ装置及びデバイス製造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20150124234A1 (https=) |
| EP (1) | EP2839342A1 (https=) |
| JP (1) | JP2015518659A (https=) |
| KR (1) | KR20150016508A (https=) |
| CN (1) | CN104350423A (https=) |
| NL (1) | NL2010472A (https=) |
| TW (1) | TWI507828B (https=) |
| WO (1) | WO2013156236A1 (https=) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2007768A (en) | 2010-12-14 | 2012-06-18 | Asml Netherlands Bv | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder. |
| EP2490073B1 (en) | 2011-02-18 | 2015-09-23 | ASML Netherlands BV | Substrate holder, lithographic apparatus, and method of manufacturing a substrate holder |
| NL2008630A (en) | 2011-04-27 | 2012-10-30 | Asml Netherlands Bv | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder. |
| NL2009487A (en) | 2011-10-14 | 2013-04-16 | Asml Netherlands Bv | Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder. |
| NL2009858A (en) | 2011-12-27 | 2013-07-01 | Asml Netherlands Bv | Substrate holder, lithographic apparatus, and device manufacturing method. |
| EP3683627A1 (en) | 2012-02-03 | 2020-07-22 | ASML Netherlands B.V. | Substrate holder and lithographic apparatus |
| DE102015007216B4 (de) * | 2015-06-03 | 2023-07-20 | Asml Netherlands B.V. | Verfahren zur Herstellung einer Halteplatte, insbesondere für einen Clamp zur Waferhalterung, Verfahren zur Herstellung einer Haltevorrichtung zur Halterung eines Bauteils, Halteplatte und Haltevorrichtung |
| JP6648266B2 (ja) * | 2015-12-15 | 2020-02-14 | エーエスエムエル ネザーランズ ビー．ブイ． | 基板ホルダ、リソグラフィ装置、及びデバイスを製造する方法 |
| US20180374736A1 (en) * | 2017-06-22 | 2018-12-27 | Applied Materials, Inc. | Electrostatic carrier for die bonding applications |
| US11086238B2 (en) | 2017-06-29 | 2021-08-10 | Asml Netherlands B.V. | System, a lithographic apparatus, and a method for reducing oxidation or removing oxide on a substrate support |
| WO2019096554A1 (en) * | 2017-11-20 | 2019-05-23 | Asml Netherlands B.V. | Substrate holder, substrate support and method of clamping a substrate to a clamping system |
| US10722925B2 (en) * | 2017-12-04 | 2020-07-28 | Suss Micro Tec Photomask Equipment Gmbh & Co Kg | Treatment head, treatment system and method for treating a local surface area of a substrate |
| US11650361B2 (en) * | 2018-12-27 | 2023-05-16 | Viavi Solutions Inc. | Optical filter |
| KR102859857B1 (ko) * | 2019-05-24 | 2025-09-12 | 에이에스엠엘 홀딩 엔.브이. | 리소그래피 장치, 기판 테이블 및 방법 |
| US20210035767A1 (en) * | 2019-07-29 | 2021-02-04 | Applied Materials, Inc. | Methods for repairing a recess of a chamber component |
| WO2021170320A1 (en) | 2020-02-24 | 2021-09-02 | Asml Netherlands B.V. | Substrate support and substrate table |
| EP3882700A1 (en) | 2020-03-16 | 2021-09-22 | ASML Netherlands B.V. | Object holder, tool and method of manufacturing an object holder |
| EP3923077A1 (en) * | 2020-06-11 | 2021-12-15 | ASML Netherlands B.V. | Object holder, electrostatic sheet and method for making an electrostatic sheet |
| TW202243107A (zh) * | 2021-03-18 | 2022-11-01 | 荷蘭商Ａｓｍｌ荷蘭公司 | 用於經改良疊對之夾具電極修改 |
| CN113571585B (zh) * | 2021-07-07 | 2023-10-13 | 沈阳工业大学 | 低功耗双层阻挡接触式双向异或非门集成电路及制造方法 |
| EP4481491A1 (en) * | 2023-06-20 | 2024-12-25 | ASML Netherlands B.V. | Method of manufacturing an electrode for an object holder |
| WO2025201980A1 (en) * | 2024-03-29 | 2025-10-02 | Asml Netherlands B.V. | Electrostatic clamp |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DD292119A5 (de) * | 1990-02-21 | 1991-07-18 | Carl Zeiss Jena,De | Vorrichtung zum ebnen und elektrostatischen halten von wafern |
| US5962909A (en) * | 1996-09-12 | 1999-10-05 | Institut National D'optique | Microstructure suspended by a microsupport |
| WO1999049504A1 (fr) | 1998-03-26 | 1999-09-30 | Nikon Corporation | Procede et systeme d'exposition par projection |
| SG135052A1 (en) | 2002-11-12 | 2007-09-28 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method |
| EP1500982A1 (en) * | 2003-07-24 | 2005-01-26 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7145269B2 (en) * | 2004-03-10 | 2006-12-05 | Asml Netherlands B.V. | Lithographic apparatus, Lorentz actuator, and device manufacturing method |
| US7524735B1 (en) | 2004-03-25 | 2009-04-28 | Novellus Systems, Inc | Flowable film dielectric gap fill process |
| US7701550B2 (en) | 2004-08-19 | 2010-04-20 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| SG124407A1 (en) * | 2005-02-03 | 2006-08-30 | Asml Netherlands Bv | Method of generating a photolithography patterningdevice, computer program, patterning device, meth od of determining the position of a target image on or proximate a substrate, measurement device, and lithographic apparatus |
| JP2007242644A (ja) * | 2006-03-02 | 2007-09-20 | Fujitsu Ltd | 半導体装置及びその製造方法 |
| US8634053B2 (en) | 2006-12-07 | 2014-01-21 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| JP4389962B2 (ja) * | 2007-04-26 | 2009-12-24 | ソニー株式会社 | 半導体装置、電子機器、および半導体装置の製造方法 |
| NL1036307A1 (nl) * | 2007-12-21 | 2009-06-23 | Asml Netherlands Bv | Lithographic apparatus, method for levelling an object, and lithographic projection method. |
| NL1036715A1 (nl) | 2008-04-16 | 2009-10-19 | Asml Netherlands Bv | Lithographic apparatus. |
| US8421993B2 (en) | 2008-05-08 | 2013-04-16 | Asml Netherlands B.V. | Fluid handling structure, lithographic apparatus and device manufacturing method |
| EP2131241B1 (en) | 2008-05-08 | 2019-07-31 | ASML Netherlands B.V. | Fluid handling structure, lithographic apparatus and device manufacturing method |
| TWI475594B (zh) * | 2008-05-19 | 2015-03-01 | 恩特格林斯公司 | 靜電夾頭 |
| US8861170B2 (en) * | 2009-05-15 | 2014-10-14 | Entegris, Inc. | Electrostatic chuck with photo-patternable soft protrusion contact surface |
| WO2012005294A1 (ja) * | 2010-07-09 | 2012-01-12 | 株式会社クリエイティブ テクノロジー | 静電チャック装置及びその製造方法 |
| NL2006913A (en) | 2010-07-16 | 2012-01-17 | Asml Netherlands Bv | Lithographic apparatus and method. |
| EP2490073B1 (en) * | 2011-02-18 | 2015-09-23 | ASML Netherlands BV | Substrate holder, lithographic apparatus, and method of manufacturing a substrate holder |
-
2013
- 2013-03-19 WO PCT/EP2013/055597 patent/WO2013156236A1/en not_active Ceased
- 2013-03-19 CN CN201380020325.XA patent/CN104350423A/zh active Pending
- 2013-03-19 JP JP2015506147A patent/JP2015518659A/ja not_active Withdrawn
- 2013-03-19 EP EP13711622.4A patent/EP2839342A1/en not_active Withdrawn
- 2013-03-19 US US14/390,973 patent/US20150124234A1/en not_active Abandoned
- 2013-03-19 KR KR1020147032173A patent/KR20150016508A/ko not_active Withdrawn
- 2013-03-19 NL NL2010472A patent/NL2010472A/en not_active Application Discontinuation
- 2013-04-02 TW TW102111961A patent/TWI507828B/zh not_active IP Right Cessation
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