JP2019211508A - 半導体モジュールおよびその製造方法、並びに、半導体モジュールを用いた通信方法 - Google Patents
半導体モジュールおよびその製造方法、並びに、半導体モジュールを用いた通信方法 Download PDFInfo
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- JP2019211508A JP2019211508A JP2018104842A JP2018104842A JP2019211508A JP 2019211508 A JP2019211508 A JP 2019211508A JP 2018104842 A JP2018104842 A JP 2018104842A JP 2018104842 A JP2018104842 A JP 2018104842A JP 2019211508 A JP2019211508 A JP 2019211508A
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Abstract
Description
図1には、光信号および電気信号の伝搬を行う半導体装置である半導体モジュールMJの平面図が示されており、図2には、半導体モジュールMJの断面図が示されている。半導体モジュールMJは、半導体チップCHP1と、半導体チップCHP1上に搭載された半導体チップCHP2を有する。半導体チップCHP1は、光導波路などの光デバイスを備えたフォトニクスチップである。半導体チップCHP2は、半導体チップCHP1と電気信号の伝搬を行い、且つ、CPU(central processing unit)などの電気回路が形成されているドライバチップである。
本実施の形態では、半導体チップCHP1に含まれる主な構成として、光デバイス(光半導体素子)である光導波路WG1、光変調器OMおよび受光器ORが示されている。
本実施の形態では、半導体チップCHP2に含まれる主な構成として、半導体素子であるMISFET1Q〜3Qとが示されている。
本実施の形態における半導体モジュールMJは、半導体チップCHP1および半導体チップCHP2を有し、半導体チップCHP1の表面TS1および半導体チップCHP2の表面TS2が、互いに接合している。具体的には、半導体チップCHP1の層間絶縁膜IL1の上面が、半導体チップCHP2の層間絶縁膜IL2の上面と接合し、半導体チップCHP1の最上層配線である配線M2aの上面が、半導体チップCHP2の最上層配線である配線M6bの上面と接合している。
以下に、図3〜図6を用いて、本実施の形態の半導体モジュールMJの製造方法を説明する。なお、図3〜図6では、最終的に図2の半導体モジュールMJが形成される領域に着目して説明するが、図3〜図6は、実際には、半導体モジュールMJが形成される領域を複数備えるウェハ状態における製造工程の断面図となっている。
以下に、実施の形態2の半導体モジュールMJを、図7を用いて説明する。なお、以下の説明では、実施の形態1との相違点を主に説明する。
以下に、実施の形態3の半導体モジュールMJおよびその製造方法を、図8〜図13を用いて説明する。なお、以下の説明では、実施の形態1との相違点を主に説明する。
フォトニクスチップである半導体チップCHP1と、レーザダイオードチップLDとの接続において、光導波路WG1を伝搬する光のスポットサイズと、レーザ光LZのような発光素子のスポットサイズと違いが問題なる場合がある。例えば、互いにスポットサイズの異なる光導波路WG1と発光素子とをそのまま光学的に接続すると、接続部分における光損失が大きくなってしまうという問題が生じる。また、光導波路WG1と光ファイバなどとの接続においても、ほぼ同様の問題が生じる。
以下に、図12および図13を用いて、実施の形態3の半導体モジュールMJの一部であるスポットサイズコンバータSSCの製造工程を説明する。図12および図13は、図9のC−C線に沿った断面であり、実施の形態1の図5で説明した、半導体基板SB1の研磨工程から絶縁膜IFの形成工程までの間の工程に対応している。
以下に、変形例1の半導体モジュールMJおよびその製造方法を、図14〜図18を用いて説明する。なお、以下の説明では、実施の形態3との相違点を主に説明する。
以下に、図17および図18を用いて、変形例1の半導体モジュールMJの一部であるスポットサイズコンバータSSCの製造工程を説明する。図17および図18は、図9のC−C線に沿った断面であり、実施の形態3の図12および図13で説明した工程に対応している。
以下に、実施の形態4の半導体モジュールMJおよびその製造方法を、図19〜図21を用いて説明する。なお、以下の説明では、実施の形態1との相違点を主に説明する。
グレーティングカプラGCは、光導波路WG1の1種であり、光導波路WG1を伝搬する光に半導体モジュールMJ外部の光通信機器から入射するレーザ光を結合する、または、光導波路WG1を伝搬する光を半導体モジュールMJ外部の光通信機器へ出射する光デバイスである。
以下に、図20および図21を用いて、変形例1の半導体モジュールMJの一部であるグレーティングカプラGCの製造工程を説明する。図20および図21は、グレーティングカプラGCの形成領域を拡大した要部断面図を示しており、実施の形態1の図5で説明した、半導体基板SB1の研磨工程から絶縁膜IFの形成工程までの間の工程に対応している。
以下に、変形例2の半導体モジュールMJを、図22を用いて説明する。なお、以下の説明では、実施の形態4との相違点を主に説明する。
光デバイス、前記光デバイスの上方に形成され、且つ、前記光デバイスに電気的に接続された第1配線、および、前記第1配線と同層に形成され、且つ、前記光デバイスに電気的に接続されていない第1ダミー配線を備える第1半導体チップと、
電気回路の一部を構成する半導体素子、前記半導体素子の上方に形成され、且つ、前記半導体素子に電気的に接続された第2配線、および、前記第2配線と同層に形成され、且つ、前記半導体素子に電気的に接続されていない第2ダミー配線を備える第2半導体チップと、
を有し、
前記第2半導体チップは、前記第1半導体チップ上に搭載され、
前記第1配線と前記第2配線とが直接接し、且つ、前記第1ダミー配線と前記第2ダミー配線とが直接接するように、前記第1半導体チップの表面は、前記第2半導体チップの表面と接合している、半導体モジュール。
光デバイス、および、前記光デバイスの上方に形成され、且つ、前記光デバイスに電気的に接続された第1配線を備える第1半導体チップと、
電気回路の一部を構成する半導体素子、および、前記半導体素子の上方に形成され、且つ、前記半導体素子に電気的に接続された第2配線を備える第2半導体チップと、
を有し、
前記第2半導体チップは、前記第1半導体チップ上に搭載され、
前記第1配線と前記第2配線とが直接接するように、前記第1半導体チップの表面は、前記第2半導体チップの表面と接合し、
前記光デバイスは、半導体層からなる第1光導波路と、少なくとも前記第1光導波路の下方に形成され、且つ、絶縁膜からなる第2光導波路とを有する、半導体モジュール。
光デバイス、および、前記光デバイスの上方に形成され、且つ、前記光デバイスに電気的に接続された第1配線を備える第1半導体チップと、
電気回路の一部を構成する半導体素子、および、前記半導体素子の上方に形成され、且つ、前記半導体素子に電気的に接続された第2配線を備える第2半導体チップと、
を有し、
前記第2半導体チップは、前記第1半導体チップ上に搭載され、
前記第1配線と前記第2配線とが直接接するように、前記第1半導体チップの表面は、前記第2半導体チップの表面と接合し、
前記光デバイスは、凹部および凸部を有するグレーティングカプラを含み、
前記グレーティングカプラの前記凹部および前記凸部は、前記第1半導体チップの裏面側に向けて設けられている、半導体モジュール。
光デバイス、および、前記光デバイスの上方に形成され、且つ、前記光デバイスに電気的に接続された第1配線を備える第1半導体チップと、
電気回路の一部を構成する半導体素子、および、前記半導体素子の上方に形成され、且つ、前記半導体素子に電気的に接続された第2配線を備える第2半導体チップと、
を有し、
前記第2半導体チップは、前記第1半導体チップ上に搭載され、
前記第1配線と前記第2配線とが直接接するように、前記第1半導体チップの表面が、前記第2半導体チップの表面と接合している、半導体モジュールを用いた通信方法において、
前記半導体モジュール外部の電気機器からの第1電気信号を、前記第1半導体チップで受信する工程、
前記第1半導体チップが受信した前記第1電気信号を、前記第1半導体チップから前記第2半導体チップへ送信する工程、
前記第2半導体チップが受信した前記第1電気信号を、前記半導体素子を用いて、第2電気信号に加工する工程、
前記第2電気信号を、第2半導体チップから前記第1半導体チップへ送信する工程、
前記第1半導体チップが受信した前記第2電気信号を、前記光デバイスを用いて、光信号へ変換する工程、
前記光信号を、前記第1半導体チップから前記半導体モジュール外部の光通信機器へ送信する工程、を有する、通信方法。
光デバイス、および、前記光デバイスの上方に形成され、且つ、前記光デバイスに電気的に接続された第1配線を備える第1半導体チップと、
電気回路の一部を構成する半導体素子、および、前記半導体素子の上方に形成され、且つ、前記半導体素子に電気的に接続された第2配線を備える第2半導体チップと、
を有し、
前記第2半導体チップは、前記第1半導体チップ上に搭載され、
前記第1配線と前記第2配線とが直接接するように、前記第1半導体チップの表面が、前記第2半導体チップの表面と接合している、半導体モジュールを用いた通信方法において、
前記半導体モジュール外部の光通信機器からの光信号を、前記第1半導体チップで受信する工程、
前記第1半導体チップが受信した前記光信号を、前記光デバイスを用いて、第3電気信号へ変換する工程、
前記第3電気信号を、前記第1半導体チップから前記第2半導体チップへ送信する工程、
前記第2半導体チップが受信した前記第3電気信号を、前記半導体素子を用いて、第4電気信号に加工する工程、
第4電気信号を、前記外部接続用端子および前記貫通電極を介して、前記半導体モジュール外部の電気機器へ送信する工程、を有する、通信方法。
光デバイス、および、前記光デバイスの上方に形成され、且つ、前記光デバイスに電気的に接続された第1配線を備える第1半導体チップと、
電気回路の一部を構成する半導体素子、および、前記半導体素子の上方に形成され、且つ、前記半導体素子に電気的に接続された第2配線を備える第2半導体チップと、
を有する半導体モジュールにおいて、
前記第2半導体チップは、前記第1半導体チップ上に搭載され、
前記第1配線と前記第2配線とが直接接するように、前記第1半導体チップの表面が、前記第2半導体チップの表面と接合し、
前記第1半導体チップCHP1の裏面側において、前記半導体モジュール外部の電気機器および光通信機器と、それぞれ電気信号および光信号の伝達が可能である、半導体モジュール。
BE バンプ電極
BS1、BS2 裏面
BX 絶縁膜
CHP1、CHP2 半導体チップ
DW1、DW2 ダミー配線
GC グレーティングカプラ
IF 絶縁膜
IL1、IL2 層間絶縁膜
LD レーザダイオードチップ
LZ レーザ光
M1a、M2a 配線
M1b〜M6b 配線
MJ 半導体モジュール
NW ウェル領域
OM 光変調器
OR 受光器
P1、P2 部分
PAD パッド電極
PW1〜PW3 ウェル領域
RF 反射膜
S1〜S4 辺
SB1、SB2 半導体基板
SL 半導体層
SSC スポットサイズコンバータ
TGV 貫通電極
TS1、TS2 表面
WF1、WF2 ウェハ
WG1、WG2 光導波路
Claims (20)
- 光デバイス、および、前記光デバイスの上方に形成され、且つ、前記光デバイスに電気的に接続された第1配線を備える第1半導体チップと、
電気回路の一部を構成する半導体素子、および、前記半導体素子の上方に形成され、且つ、前記半導体素子に電気的に接続された第2配線を備える第2半導体チップと、
を有し、
前記第2半導体チップは、前記第1半導体チップ上に搭載され、
前記第1配線と前記第2配線とが直接接するように、前記第1半導体チップの表面は、前記第2半導体チップの表面と接合している、半導体モジュール。 - 請求項1記載の半導体モジュールにおいて、
平面視において、前記第1半導体チップの外周は、前記第2半導体チップの外周と5μm以内の範囲で一致している、半導体モジュール。 - 請求項1記載の半導体モジュールにおいて、
平面視において、前記第1半導体チップおよび前記第2半導体チップは、それぞれ、第1方向に沿った第1辺および第2辺と、前記第1方向と交差する第2方向に沿った第3辺および第4辺とを有し、
前記第1半導体チップの第1辺および前記第2半導体チップの第1辺は、5μm以内の範囲で一致し、
前記第1半導体チップの第2辺および前記第2半導体チップの第2辺は、5μm以内の範囲で一致し、
前記第1半導体チップの第3辺および前記第2半導体チップの第3辺は、5μm以内の範囲で一致し、
前記第1半導体チップの第4辺および前記第2半導体チップの第4辺は、5μm以内の範囲で一致している、半導体モジュール。 - 請求項1記載の半導体モジュールにおいて、
前記第2半導体チップにおいて、前記半導体素子の下方には半導体基板が設けられ、
前記第1半導体チップにおいて、前記光デバイスの下方には半導体基板が設けられていない、半導体モジュール。 - 請求項1記載の半導体モジュールにおいて、
前記第1半導体チップは、
前記光デバイスの上方に形成され、且つ、前記第1配線を含む第1多層配線と、
前記光デバイスの下方に形成され、且つ、前記第1半導体チップの裏面側に形成された第1絶縁膜と、
前記第1絶縁膜の下面に形成されたパッド電極と、
前記第1絶縁膜を貫通し、且つ、前記パッド電極および前記第1配線に電気的に接続された貫通電極と、
前記パッド電極の下面に形成された外部接続用端子と、
を有し、
前記第2半導体チップは、
表面および裏面を有する半導体基板と、
前記半導体基板の前記表面の上方に形成され、且つ、前記第2配線を含む第2多層配線と、
を有し、
前記半導体素子は、前記半導体基板の前記表面に形成されている、半導体モジュール。 - 請求項1記載の半導体モジュールにおいて、
前記第1半導体チップは、前記第1配線と同層に形成され、且つ、前記光デバイスに電気的に接続されていない第1ダミー配線を含み、
前記第2半導体チップは、前記第2配線と同層に形成され、且つ、前記半導体素子に電気的に接続されていない第2ダミー配線を含み、
前記第1ダミー配線は、前記第2ダミー配線に直接接している、半導体モジュール。 - 請求項1記載の半導体モジュールにおいて、
前記第1半導体チップは、
前記光デバイスの下方に形成された第3絶縁膜と、
前記第3絶縁膜の下面に形成された第4絶縁膜と、
を有し、
前記光デバイスは、
前記第1絶縁膜上に形成された第1光導波路と、
前記第3絶縁膜と前記第4絶縁膜との間に形成された第2光導波路と、
を有する、半導体モジュール。 - 請求項1記載の半導体モジュールにおいて、
前記光デバイスは、
半導体層からなる第1光導波路と、
前記第1光導波路の下面に直接接し、且つ、絶縁膜からなる第2光導波路と、
を有する、半導体モジュール。 - 請求項8記載の半導体モジュールにおいて、
前記第2光導波路は、前記第1光導波路の前記下面および側面を覆っている、半導体モジュール。 - 請求項1記載の半導体モジュールにおいて、
前記光デバイスは、凹部および凸部を有するグレーティングカプラを含み、
前記グレーティングカプラの前記凹部および前記凸部は、前記第1半導体チップの裏面側に向けて設けられ、
前記グレーティングカプラの下方には、第5絶縁膜が形成され、
前記第1半導体チップの裏面において、前記第5絶縁膜が露出されている、
半導体モジュール。 - 請求項10記載の半導体モジュールにおいて、
前記グレーティングカプラの上方に、反射膜が形成されている、半導体モジュール。 - 請求項11記載の半導体モジュールにおいて、
前記反射膜は、前記第1配線と同じ材料で形成されている、半導体モジュール。 - 請求項10記載の半導体モジュールにおいて、
前記グレーティングカプラは、前記第1半導体チップの前記裏面側において、前記半導体モジュール外部の光通信機器と、光通信を行うことが可能である、半導体モジュール。 - 請求項1記載の半導体モジュールにおいて、
前記光デバイスは、受光器を有し、
前記受光器の下方には、第6絶縁膜が形成され、
前記第1半導体チップの裏面において、前記第6絶縁膜が露出されている、
半導体モジュール。 - 請求項13記載の半導体モジュールにおいて、
前記受光器の上方に、反射膜が形成されている、半導体モジュール。 - 請求項11記載の半導体モジュールにおいて、
前記反射膜は、前記第1配線と同じ材料で形成されている、半導体モジュール。 - 請求項14記載の半導体モジュールにおいて、
前記受光器は、前記第1半導体チップの前記裏面側において、前記半導体モジュール外部の光通信機器からの光を受光可能である、半導体モジュール。 - 請求項5記載の半導体モジュールを用いた通信方法において、
前記半導体モジュール外部の電気機器からの第1電気信号を、前記外部接続用端子および前記貫通電極を介して、前記第1半導体チップで受信する工程、
前記第1半導体チップが受信した前記第1電気信号を、前記第1半導体チップから前記第2半導体チップへ送信する工程、
前記第2半導体チップが受信した前記第1電気信号を、前記半導体素子を用いて、第2電気信号に加工する工程、
前記第2電気信号を、第2半導体チップから前記第1半導体チップへ送信する工程、
前記第1半導体チップが受信した前記第2電気信号を、前記光デバイスを用いて、光信号へ変換する工程、
前記光信号を、前記第1半導体チップから前記半導体モジュール外部の光通信機器へ送信する工程、
を有する、通信方法。 - 請求項5記載の半導体モジュールを用いた通信方法において、
前記半導体モジュール外部の光通信機器からの光信号を、前記第1半導体チップで受信する工程、
前記第1半導体チップが受信した前記光信号を、前記光デバイスを用いて、第3電気信号へ変換する工程、
前記第3電気信号を、前記第1半導体チップから前記第2半導体チップへ送信する工程、
前記第2半導体チップが受信した前記第3電気信号を、前記半導体素子を用いて、第4電気信号に加工する工程、
前記第4電気信号を、前記外部接続用端子および前記貫通電極を介して、前記半導体モジュール外部の電気機器へ送信する工程、
を有する、通信方法。 - (a)第1半導体基板、前記第1半導体基板上に形成された光デバイス、および、前記光デバイスの上方に形成され、且つ、前記光デバイスに電気的に接続された第1配線を備える第1半導体チップとなる領域を複数有する第1ウェハを準備する工程、
(b)第2半導体基板、前記第2半導体基板上に形成され、且つ、電気回路の一部を構成する半導体素子、および、前記半導体素子の上方に形成され、且つ、前記半導体素子に電気的に接続された第2配線を備える第2半導体チップとなる領域を複数有する第2ウェハを準備する工程、
(c)前記(a)工程および前記(b)工程後に、前記第1配線と前記第2配線とが直接接するように、前記第1ウェハの表面と前記第2ウェハの表面とを接合する工程、
(d)前記(c)工程後、前記第1半導体基板を除去する工程、
(e)前記(d)工程後、互いに接合された前記第1ウェハと前記第2ウェハとを個片化することによって、互いに接合された前記第1半導体チップおよび前記第2半導体チップを有する半導体モジュールを、複数形成する工程、
を有する、半導体モジュールの製造方法。
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