JP2019203191A - 基材処理装置および方法 - Google Patents
基材処理装置および方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 90
- 239000000758 substrate Substances 0.000 title claims abstract description 67
- 238000012545 processing Methods 0.000 title claims abstract description 31
- 230000008569 process Effects 0.000 claims abstract description 80
- 238000006243 chemical reaction Methods 0.000 claims abstract description 57
- 239000002245 particle Substances 0.000 claims description 11
- 238000003672 processing method Methods 0.000 claims description 7
- 230000007423 decrease Effects 0.000 claims description 3
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- 238000000151 deposition Methods 0.000 description 15
- 230000008021 deposition Effects 0.000 description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 8
- 229910010271 silicon carbide Inorganic materials 0.000 description 7
- 238000009825 accumulation Methods 0.000 description 6
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- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 238000009529 body temperature measurement Methods 0.000 description 4
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- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000004047 hole gas Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
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- 229910001873 dinitrogen Inorganic materials 0.000 description 1
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45502—Flow conditions in reaction chamber
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H—ELECTRICITY
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- H—ELECTRICITY
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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Abstract
Description
反応チャンバー内の基材ホルダー上に基材を供給することと、
プロセスガスの流れを第一のガスインジェクターを用いて供給管から反応チャンバーの内部に供給することと、
供給管から第二のインジェクターへの同じプロセスガスの反応チャンバー内部への流れを制限すること、を含む基材処理方法が提供される。
Claims (20)
- 基材処理装置であって、
反応チャンバーと、
前記反応チャンバー内に少なくとも一つの基材を保持するように構築および配置される基材ホルダーと、
プロセスガスを前記反応チャンバーの内部に供給するように構築および配置され、供給管からのプロセスガスの流れを制御するように構築および配置されるガス制御システムを備えるガスインジェクターシステムであって、前記ガスインジェクターシステムは、前記同じプロセスガスのための第一および第二のインジェクターを備え、前記ガス制御システムは、前記供給管から前記第一および第二のインジェクターのうちの一つに前記プロセスガスの前記流れを供給し、前記第一および第二のインジェクターのうちのもう一つに前記同じプロセスガスの流れを制限するように、構築、配置、および/またはプログラムされる、ガスインジェクターシステムと、を備える、基材処理装置。 - 前記ガス制御システムは、前記第一および第二のインジェクターのうちの前記一つからのプロセスガスの前記流れを、前記第一および第二のインジェクターのうちのもう一つに切り替えるように構築、配置、および/またはプログラムされることができる、請求項1に記載の基材処理装置。
- 前記ガス制御システムは、プロセスガスの前記流れを、前記第一および第二のインジェクターのうちの前記一つから、前記第一および第二のインジェクターのうちのもう一つに切り替えた後、前記供給管から前記第一および第二のインジェクターのうちの前記一つへの前記プロセスガスの前記流れを制限するように構築、配置、および/またはプログラムされる、請求項2に記載の基材処理装置。
- 前記ガス制御システムは、タイマーを備え、所定の時間経過後に切り替えるように、構築、および/またはプログラムされる、請求項2に記載の基材処理装置。
- 前記ガス制御システムは、プロセスガスの流量を測定するためのガス流量測定装置を備え、前記ガス制御システムは、前記プロセスガスの前記流量がある閾値未満になる場合、切り替えるように構築および/またはプログラムされる、請求項2に記載の基材処理装置。
- 前記装置は、前記反応チャンバーの前記壁に沿って、前記反応チャンバーの前記内部に延在するように構築され、および配置されるライナーを備える、請求項1に記載の基材処理装置。
- 前記ライナーは、下端部のライナー開口部と、上端部の上部封止部とにより画定される実質的に円筒形の壁を備え、前記ライナーはガスのためにライナー開口部の上方で実質的に閉じられている、請求項6に記載の基材処理装置。
- 前記第一および第二のインジェクターは、前記ライナーの前記実質的に円筒形の壁に沿って前記上端部に向かって構築され、および配置される、請求項7に記載の基材処理装置。
- 前記第一および第二のインジェクターは、細長く、および開口部のパターンが設けられている、請求項1に記載の基材処理装置。
- 前記インジェクター内部のガス伝導チャネルの内側断面積は、100〜1500mm2である、請求項9に記載の基材処理装置。
- 前記インジェクター内部の前記ガス伝導チャネルの内側断面は、径方向の寸法よりも大きい、前記実質的に円筒形の反応チャンバーの前記円周に接する方向の寸法を有する形状を有する、請求項10に記載の基材処理装置。
- 少なくとも一つの開口部の面積は、1〜200mm2である、請求項9に記載の基材処理装置。
- 前記インジェクターの下端部から上端部に向かうにつれて、前記開口部間の距離は減少する、請求項9に記載の基材処理装置。
- 前記開口部は、ガスが少なくとも二つの異なる方向に注入されるように構成される、請求項9に記載の基材処理装置。
- 基材処理方法であって、
反応チャンバー内の基材ホルダー上に基材を供給することと、
プロセスガスの流れを第一のガスインジェクターを用いて供給管から前記反応チャンバーの内部に供給することと、
前記供給管から第二のインジェクターへの前記同じプロセスガスの前記反応チャンバー内部への流れを制限すること、を含む、方法。 - 前記方法は、前記プロセスガスの前記流れを、前記第一のインジェクターから前記第二のインジェクターに切り替えることを含む、請求項15に記載の基材処理方法。
- 前記方法は、プロセスガスの前記流れを前記第一のインジェクターから前記第二のインジェクターに切り替えた後に、前記供給管から前記第一のインジェクターへの前記プロセスガスの前記流れを制限することを含む、請求項16に記載の基材処理方法。
- 前記方法は、所定時間経過後に、プロセスガスの前記流れを、前記第一のインジェクターから前記第二のインジェクターに切り替えることを含む、請求項16に記載の基材処理方法。
- 前記方法は、プロセスガスの前記流量がある閾値未満になる、粒子が検出される、またはウェーハ上の堆積物均一性が良くない場合、プロセスガスの前記流れを前記第一のインジェクターから前記第二のインジェクターに切り替えることを含む、請求項16に記載の基材処理方法。
- 前記方法は、前記第一および第二のインジェクターを新しい第一および第二のインジェクターに置き替えることを含む、請求項17に記載の基材処理方法。
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US15/967,146 | 2018-04-30 | ||
US15/967,146 US20190330740A1 (en) | 2018-04-30 | 2018-04-30 | Substrate processing apparatus and method |
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JP (1) | JP2019203191A (ja) |
KR (1) | KR20190125939A (ja) |
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US9394608B2 (en) | 2009-04-06 | 2016-07-19 | Asm America, Inc. | Semiconductor processing reactor and components thereof |
US8802201B2 (en) | 2009-08-14 | 2014-08-12 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
US9312155B2 (en) | 2011-06-06 | 2016-04-12 | Asm Japan K.K. | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules |
US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
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KR20230007952A (ko) * | 2021-07-06 | 2023-01-13 | 에이에스엠 아이피 홀딩 비.브이. | 추출기 챔버가 구비된 복수의 기판 처리용 장치 |
USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
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- 2019-03-12 TW TW108108224A patent/TWI806986B/zh active
- 2019-04-17 CN CN201910310803.XA patent/CN110416050A/zh active Pending
- 2019-04-19 JP JP2019079777A patent/JP2019203191A/ja active Pending
- 2019-04-23 KR KR1020190047410A patent/KR20190125939A/ko not_active Application Discontinuation
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TW202338149A (zh) | 2023-10-01 |
KR20190125939A (ko) | 2019-11-07 |
TWI806986B (zh) | 2023-07-01 |
CN110416050A (zh) | 2019-11-05 |
US20190330740A1 (en) | 2019-10-31 |
TW201945580A (zh) | 2019-12-01 |
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