JP2019160990A - 位置付け方法 - Google Patents
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Abstract
Description
11 保持テーブル
12 切削ブレード(加工手段)
13 θテーブル
15 撮像手段
20 ウェーハ(被加工物)
21 ストリート
22 デバイス
23 ノッチ
25 ターゲット
25A 第1のターゲット
25B 第2のターゲット
25C 第1のターゲット
25D 第2のターゲット
30 操作パネル
31 画像表示領域
32 基準マーク
33 矢印キー
34 矢印キー
35 モード選択ボタン
36 モード選択ボタン
40 制御手段
50 フレーム
51 ダイシングテープ
52 切欠き
53 位置決めピン
CH1 第1チャンネル
CH2 第2チャンネル
D1 第1の方向
D2 第2の方向
EA 第1領域
EB 第2領域
EC 第1領域
ED 第2領域
G ストリートの中心線
T1 第1直線
T2 第2直線
Claims (4)
- 表面にX軸方向及びY軸方向に交差して配列されたストリートにより区画された領域に複数のデバイスが形成された被加工物を、回転可能な保持テーブルに保持して該ストリートに沿って加工手段によりX軸方向に加工送りして加工を行うのに先駆けて、該加工手段を該ストリートに位置付ける位置付け方法であって、
操作者が選択した該被加工物上のターゲット又はストリートを含む領域を撮像手段で撮像する撮像ステップと、
該領域内の該デバイス上面及び/又は該ストリート上に形成された所定の全ての直線の座標位置を画像処理で検出し記憶する直線記憶ステップと、
該直線記憶ステップを実施した後に、該全ての直線の中から操作者が該ターゲット内又は該ストリート上の特定の直線を指定登録する直線登録ステップと、
該直線登録ステップで指定登録された該直線の座標データに基づいて、該ストリートに該加工手段を位置付ける位置付けステップと、から構成されることを特徴とする位置付け方法。 - 該撮像ステップ、該直線記憶ステップ及び該直線登録ステップは、
該撮像手段で操作者が選択した第1のターゲットを含む第1領域を撮像する第1領域撮像ステップと、
該第1領域内の該デバイス上面及び/又は該ストリート上に形成されたX軸との角度差が許容値内の全ての直線の座標位置を画像処理で検出し記憶する第1領域直線記憶ステップと、
該第1領域直線記憶ステップを実施した後に、該全ての直線の中から操作者が該第1のターゲット内の直線を第1直線として指定登録する第1直線登録ステップと、
該第1直線登録ステップを実施した後に、該第1の領域から該加工送り方向に所定距離L(mm)該撮像手段を移動して該第1のターゲットと同一の該第2のターゲットを含む第2領域を撮像する第2領域撮像ステップと、
該第2領域内の該デバイス上面及び/又は該ストリート上に形成されたX軸との角度差が許容値内の全ての直線の座標位置を画像処理で検出し記憶する第2領域直線記憶ステップと、
該第2領域直線記憶ステップを実施した後に、該全ての直線の中から操作者が該第2のターゲット内の直線を第2直線として指定登録する第2直線登録ステップと、
を有し、
該第2直線登録ステップを実施した後に、該第1直線のY軸方向位置と該第2直線のY軸方向位置との差ΔYと該所定距離Lとから、該ストリートと該加工送り方向との角度差θ=arctan(ΔY/L)を算出し、該θ度保持テーブルを回転させて該ストリートの向きと該加工送り方向とを平行に調整する向き調整ステップを行い、
該向き調整ステップを実施した後に該位置付けステップを行うことを特徴とする、請求項1記載の位置付け方法。 - 該第1直線登録ステップ及び該第2直線登録ステップは、該全ての直線の中の該操作者が指定した直線の該座標位置が、相対的に該撮像手段の基準位置に位置付けられること、を特徴とする、請求項2記載の位置付け方法。
- 該撮像ステップで、X軸方向に延びる該ストリートのY軸方向の幅全体を含む領域を撮像し、
該直線記憶ステップで、該撮像ステップで撮像された該領域内でX軸方向に延びる全ての直線を検出して登録し、
該直線登録ステップで、該全ての直線の中から操作者が該ストリートのY軸方向の両縁を示す二つの直線を指定登録し、
該位置付けステップで、該直線登録ステップで指定登録した該二つの直線のY軸方向の中間位置に該加工手段を位置付けること、を特徴とする、請求項1記載の位置付け方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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JP2018045290A JP7022624B2 (ja) | 2018-03-13 | 2018-03-13 | 位置付け方法 |
KR1020190024711A KR102668027B1 (ko) | 2018-03-13 | 2019-03-04 | 포지셔닝 방법 |
SG10201901936V SG10201901936VA (en) | 2018-03-13 | 2019-03-05 | Positioning method |
CN201910166413.XA CN110280893B (zh) | 2018-03-13 | 2019-03-06 | 定位方法 |
US16/298,092 US10811295B2 (en) | 2018-03-13 | 2019-03-11 | Positioning method |
TW108108180A TWI787476B (zh) | 2018-03-13 | 2019-03-12 | 定位方法 |
DE102019203404.7A DE102019203404A1 (de) | 2018-03-13 | 2019-03-13 | Positionierungsverfahren |
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JP2018045290A JP7022624B2 (ja) | 2018-03-13 | 2018-03-13 | 位置付け方法 |
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JP2019160990A true JP2019160990A (ja) | 2019-09-19 |
JP7022624B2 JP7022624B2 (ja) | 2022-02-18 |
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US (1) | US10811295B2 (ja) |
JP (1) | JP7022624B2 (ja) |
CN (1) | CN110280893B (ja) |
DE (1) | DE102019203404A1 (ja) |
SG (1) | SG10201901936VA (ja) |
TW (1) | TWI787476B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021098253A (ja) * | 2019-12-20 | 2021-07-01 | 株式会社ディスコ | 加工装置 |
CN116995030A (zh) * | 2023-09-27 | 2023-11-03 | 武汉华工激光工程有限责任公司 | 一种晶圆残片全自动切割方法及装置 |
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JP7382833B2 (ja) * | 2020-01-06 | 2023-11-17 | 株式会社ディスコ | 加工装置 |
US20220005721A1 (en) * | 2020-07-02 | 2022-01-06 | Mpi Corporation | Method of aligning wafer |
JP2022081254A (ja) | 2020-11-19 | 2022-05-31 | 株式会社ディスコ | 加工装置 |
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JP2007088028A (ja) * | 2005-09-20 | 2007-04-05 | Disco Abrasive Syst Ltd | 分割装置及びウェーハのアライメント方法 |
JP2010010539A (ja) * | 2008-06-30 | 2010-01-14 | Disco Abrasive Syst Ltd | アライメント手段を備えた加工装置 |
JP2017120820A (ja) * | 2015-12-28 | 2017-07-06 | 株式会社ディスコ | ウェーハの加工方法 |
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JP2021098253A (ja) * | 2019-12-20 | 2021-07-01 | 株式会社ディスコ | 加工装置 |
JP7408235B2 (ja) | 2019-12-20 | 2024-01-05 | 株式会社ディスコ | 加工装置 |
CN116995030A (zh) * | 2023-09-27 | 2023-11-03 | 武汉华工激光工程有限责任公司 | 一种晶圆残片全自动切割方法及装置 |
CN116995030B (zh) * | 2023-09-27 | 2023-12-29 | 武汉华工激光工程有限责任公司 | 一种晶圆残片全自动切割方法及装置 |
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KR20190108051A (ko) | 2019-09-23 |
TW201938305A (zh) | 2019-10-01 |
SG10201901936VA (en) | 2019-10-30 |
US10811295B2 (en) | 2020-10-20 |
TWI787476B (zh) | 2022-12-21 |
CN110280893A (zh) | 2019-09-27 |
DE102019203404A1 (de) | 2019-09-19 |
US20190287836A1 (en) | 2019-09-19 |
CN110280893B (zh) | 2022-09-09 |
JP7022624B2 (ja) | 2022-02-18 |
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