JP2019054169A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2019054169A JP2019054169A JP2017178413A JP2017178413A JP2019054169A JP 2019054169 A JP2019054169 A JP 2019054169A JP 2017178413 A JP2017178413 A JP 2017178413A JP 2017178413 A JP2017178413 A JP 2017178413A JP 2019054169 A JP2019054169 A JP 2019054169A
- Authority
- JP
- Japan
- Prior art keywords
- region
- semiconductor
- type
- semiconductor region
- type impurity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 285
- 239000012535 impurity Substances 0.000 claims abstract description 155
- 230000007423 decrease Effects 0.000 claims description 4
- 230000006872 improvement Effects 0.000 abstract description 11
- 230000001629 suppression Effects 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 7
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 238000009792 diffusion process Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 38
- 230000000052 comparative effect Effects 0.000 description 11
- 239000011229 interlayer Substances 0.000 description 11
- 229910052796 boron Inorganic materials 0.000 description 10
- 238000010586 diagram Methods 0.000 description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 9
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 8
- 229910052698 phosphorus Inorganic materials 0.000 description 8
- 239000011574 phosphorus Substances 0.000 description 8
- 230000015556 catabolic process Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 230000003071 parasitic effect Effects 0.000 description 4
- 238000004645 scanning capacitance microscopy Methods 0.000 description 4
- 238000004088 simulation Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000004570 scanning spreading resistance microscopy Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7827—Vertical transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/063—Reduced surface field [RESURF] pn-junction structures
- H01L29/0634—Multiple reduced surface field (multi-RESURF) structures, e.g. double RESURF, charge compensation, cool, superjunction (SJ), 3D-RESURF, composite buffer (CB) structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0611—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices
- H01L29/0615—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE]
- H01L29/0619—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for increasing or controlling the breakdown voltage of reverse biased devices by the doping profile or the shape or the arrangement of the PN junction, or with supplementary regions, e.g. junction termination extension [JTE] with a supplementary region doped oppositely to or in rectifying contact with the semiconductor containing or contacting region, e.g. guard rings with PN or Schottky junction
- H01L29/0623—Buried supplementary region, e.g. buried guard ring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0684—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape, relative sizes or dispositions of the semiconductor regions or junctions between the regions
- H01L29/0692—Surface layout
- H01L29/0696—Surface layout of cellular field-effect devices, e.g. multicellular DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1095—Body region, i.e. base region, of DMOS transistors or IGBTs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7801—DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
- H01L29/7802—Vertical DMOS transistors, i.e. VDMOS transistors
Abstract
Description
第1の実施形態の半導体装置は、第1の面と第2の面を有する半導体層と、半導体層の中に設けられた第1導電型の第1の半導体領域と、第1の半導体領域と第1の面との間に設けられた第2導電型の複数の第2の半導体領域と、第1の半導体領域と第1の面との間に設けられ、複数の第2の半導体領域の間に設けられた第1導電型の複数の第3の半導体領域と、第2の半導体領域と第1の面との間に設けられ、少なくとも一部が第1の面に接して設けられ、第2の半導体領域よりも第2導電型不純物濃度が高い第4の半導体領域と、第4の半導体領域と第1の面との間に設けられた第1導電型の第5の半導体領域と、第2の半導体領域と第4の半導体領域との間に設けられ、単位深さ当たりの電気抵抗が、第2の半導体領域の単位深さ当たりの電気抵抗よりも高い第6の半導体領域と、ゲート電極と、第4の半導体領域の少なくとも一部とゲート電極との間に設けられたゲート絶縁膜と、を備える。
第2の実施形態の半導体装置は、第6の半導体領域は第2導電型であり、第6の半導体領域の第2導電型不純物濃度は、第2の半導体領域の第2導電型不純物濃度よりも低い点以外は、第1の実施形態と同様である。以下、第1の実施形態と重複する内容については、一部記述を省略する。
第3の実施形態の半導体装置は、第6の半導体領域は第2導電型であり、第6の半導体領域の幅は、第2の半導体領域の幅よりも狭い点以外は、第1の実施形態と同様である。以下、第1の実施形態と重複する内容については、一部記述を省略する。
第4の実施形態の半導体装置は、第2の半導体領域の第2導電型不純物濃度が、第1の面の側の端部から第2の面の側の端部に向かって単調に低下する点以外は、第1の実施形態と同様である。以下、第1の実施形態と重複する内容については、一部記述を省略する。
第5の実施形態の半導体装置は、nピラー領域18とn型のJFET領域26との間に、n+型の中間領域を、更に備える点以外は、第1の実施形態と同様である。以下、第1の実施形態と重複する内容については、一部記述を省略する。
第6の実施形態の半導体装置は、第6の半導体領域と第4の半導体領域との間に設けられ、第4の半導体領域よりも第2導電型不純物濃度が低い第7の半導体領域を更に備え、第6の半導体領域の単位深さ当たりの電気抵抗が、第7の半導体領域の単位深さ当たりの電気抵抗よりも高い点で、第1の実施形態と異なっている。以下、第1の実施形態と重複する内容については、一部記述を省略する。
第7の実施形態の半導体装置は、第6の半導体領域は第2導電型であり、第6の半導体領域の第2導電型不純物濃度は、第7の半導体領域の第2導電型不純物濃度よりも低い点以外は、第6の実施形態と同様である。以下、第6の実施形態と重複する内容については、一部記述を省略する。
第8の実施形態の半導体装置は、第6の半導体領域は第2導電型であり、第6の半導体領域の幅は、第2の半導体領域の幅及び第7の半導体領域の幅よりも狭い点以外は、第6の実施形態と同様である。以下、第6の実施形態と重複する内容については、一部記述を省略する。
12 ドレイン領域(第1の半導体領域)
16 pピラー領域(第2の半導体領域)
16a 下部pピラー領域(第2の半導体領域)
16b 上部pピラー領域(第7の半導体領域)
18 nピラー領域(第3の半導体領域)
20 ベース領域(第4の半導体領域)
22 ソース領域(第5の半導体領域)
30 高抵抗領域(第6の半導体領域)
32 ゲート電極
34 ゲート絶縁膜
100 MOSFET(半導体装置)
200 MOSFET(半導体装置)
300 MOSFET(半導体装置)
400 MOSFET(半導体装置)
500 MOSFET(半導体装置)
600 MOSFET(半導体装置)
700 MOSFET(半導体装置)
800 MOSFET(半導体装置)
Claims (12)
- 第1の面と第2の面を有する半導体層と、
前記半導体層の中に設けられた第1導電型の第1の半導体領域と、
前記第1の半導体領域と前記第1の面との間に設けられた第2導電型の複数の第2の半導体領域と、
前記第1の半導体領域と前記第1の面との間に設けられ、複数の前記第2の半導体領域の間に設けられた第1導電型の複数の第3の半導体領域と、
前記第2の半導体領域と前記第1の面との間に設けられ、少なくとも一部が前記第1の面に接して設けられ、前記第2の半導体領域よりも第2導電型不純物濃度が高い第4の半導体領域と、
前記第4の半導体領域と前記第1の面との間に設けられた第1導電型の第5の半導体領域と、
前記第2の半導体領域と前記第4の半導体領域との間に設けられ、単位深さ当たりの電気抵抗が、前記第2の半導体領域の単位深さ当たりの電気抵抗よりも高い第6の半導体領域と、
ゲート電極と、
前記第4の半導体領域の前記少なくとも一部と前記ゲート電極との間に設けられたゲート絶縁膜と、
を備える半導体装置。 - 前記第6の半導体領域は第1導電型であり、前記第6の半導体領域の第1導電型不純物濃度は、前記第3の半導体領域の第1導電型不純物濃度よりも低い請求項1記載の半導体装置。
- 前記第6の半導体領域は第2導電型であり、前記第6の半導体領域の第2導電型不純物濃度は、前記第2の半導体領域の第2導電型不純物濃度よりも低い請求項1記載の半導体装置。
- 前記第6の半導体領域は第2導電型であり、前記第6の半導体領域の幅は、前記第2の半導体領域の幅よりも狭い請求項1記載の半導体装置。
- 前記第2の半導体領域の前記第1の面の側の端部から前記第2の半導体領域の前記第2の面の側の端部までの距離が20μm以上である請求項1乃至請求項4いずれか一項記載の半導体装置。
- 前記第2の半導体領域の深さ方向の第2導電型不純物濃度は略一定である請求項1乃至請求項5いずれか一項記載の半導体装置。
- 前記第2の半導体領域の第2導電型不純物濃度は、前記第1の面の側の端部から前記第2の面の側の端部に向かって単調に低下する請求項1乃至請求項5いずれか一項記載の半導体装置。
- 前記第6の半導体領域と前記第4の半導体領域との間に設けられ、前記第4の半導体領域よりも第2導電型不純物濃度が低い第7の半導体領域を更に備え、
前記第6の半導体領域の単位深さ当たりの電気抵抗が、前記第7の半導体領域の単位深さ当たりの電気抵抗よりも高い請求項1記載の半導体装置。 - 前記第6の半導体領域は第1導電型であり、前記第6の半導体領域の第1導電型不純物濃度は、前記第3の半導体領域の第1導電型不純物濃度よりも低い請求項8記載の半導体装置。
- 前記第6の半導体領域は第2導電型であり、前記第6の半導体領域の第2導電型不純物濃度は、前記第7の半導体領域の第2導電型不純物濃度よりも低い請求項8記載の半導体装置。
- 前記第6の半導体領域は第2導電型であり、前記第6の半導体領域の幅は、前記第2の半導体領域の幅及び前記第7の半導体領域の幅よりも狭い請求項8記載の半導体装置。
- 前記第7の半導体領域の前記第1の面の側の端部から前記第2の半導体領域の前記第2の面の側の端部までの距離が20μm以上である請求項8乃至請求項11いずれか一項記載の半導体装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017178413A JP2019054169A (ja) | 2017-09-15 | 2017-09-15 | 半導体装置 |
EP18157871.7A EP3457440A1 (en) | 2017-09-15 | 2018-02-21 | Semiconductor device |
US15/901,930 US20190088738A1 (en) | 2017-09-15 | 2018-02-22 | Semiconductor device |
CN201810181613.8A CN109509783A (zh) | 2017-09-15 | 2018-03-06 | 半导体装置 |
US16/710,544 US20200119142A1 (en) | 2017-09-15 | 2019-12-11 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017178413A JP2019054169A (ja) | 2017-09-15 | 2017-09-15 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019054169A true JP2019054169A (ja) | 2019-04-04 |
JP2019054169A5 JP2019054169A5 (ja) | 2019-09-19 |
Family
ID=61256686
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017178413A Abandoned JP2019054169A (ja) | 2017-09-15 | 2017-09-15 | 半導体装置 |
Country Status (4)
Country | Link |
---|---|
US (2) | US20190088738A1 (ja) |
EP (1) | EP3457440A1 (ja) |
JP (1) | JP2019054169A (ja) |
CN (1) | CN109509783A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024052952A1 (ja) * | 2022-09-05 | 2024-03-14 | 三菱電機株式会社 | 半導体装置、半導体装置の制御方法、および半導体装置の製造方法 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112993007A (zh) * | 2019-12-13 | 2021-06-18 | 南通尚阳通集成电路有限公司 | 超结结构及超结器件 |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003115589A (ja) * | 2001-10-03 | 2003-04-18 | Fuji Electric Co Ltd | 半導体装置及びその製造方法 |
JP2005019528A (ja) * | 2003-06-24 | 2005-01-20 | Toyota Central Res & Dev Lab Inc | 半導体装置とその製造方法 |
JP2006073987A (ja) * | 2004-08-04 | 2006-03-16 | Fuji Electric Device Technology Co Ltd | 半導体素子 |
JP2006179598A (ja) * | 2004-12-21 | 2006-07-06 | Toshiba Corp | 電力用半導体装置 |
JP2007251023A (ja) * | 2006-03-17 | 2007-09-27 | Toyota Motor Corp | スーパージャンクション構造を有する半導体装置とその製造方法 |
JP2007300034A (ja) * | 2006-05-02 | 2007-11-15 | Toshiba Corp | 半導体装置及び半導体装置の製造方法 |
JP2008258442A (ja) * | 2007-04-05 | 2008-10-23 | Toshiba Corp | 電力用半導体素子 |
JP2009272397A (ja) * | 2008-05-02 | 2009-11-19 | Toshiba Corp | 半導体装置 |
WO2011093473A1 (ja) * | 2010-01-29 | 2011-08-04 | 富士電機システムズ株式会社 | 半導体装置 |
JP2015213141A (ja) * | 2014-04-17 | 2015-11-26 | 富士電機株式会社 | 縦型半導体装置およびその製造方法 |
US20160064478A1 (en) * | 2014-09-01 | 2016-03-03 | Silergy Semiconductor Technology (Hangzhou) Ltd. | Super-junction structure and method for manufacturing the same and semiconductor device thereof |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3940518B2 (ja) * | 1999-03-10 | 2007-07-04 | 株式会社東芝 | 高耐圧半導体素子 |
JP3973395B2 (ja) * | 2001-10-16 | 2007-09-12 | 株式会社豊田中央研究所 | 半導体装置とその製造方法 |
JP5484741B2 (ja) * | 2009-01-23 | 2014-05-07 | 株式会社東芝 | 半導体装置 |
DE102016113129B3 (de) * | 2016-07-15 | 2017-11-09 | Infineon Technologies Ag | Halbleitervorrichtung, die eine Superjunction-Struktur in einem SiC-Halbleiterkörper enthält |
-
2017
- 2017-09-15 JP JP2017178413A patent/JP2019054169A/ja not_active Abandoned
-
2018
- 2018-02-21 EP EP18157871.7A patent/EP3457440A1/en not_active Withdrawn
- 2018-02-22 US US15/901,930 patent/US20190088738A1/en not_active Abandoned
- 2018-03-06 CN CN201810181613.8A patent/CN109509783A/zh not_active Withdrawn
-
2019
- 2019-12-11 US US16/710,544 patent/US20200119142A1/en not_active Abandoned
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003115589A (ja) * | 2001-10-03 | 2003-04-18 | Fuji Electric Co Ltd | 半導体装置及びその製造方法 |
JP2005019528A (ja) * | 2003-06-24 | 2005-01-20 | Toyota Central Res & Dev Lab Inc | 半導体装置とその製造方法 |
JP2006073987A (ja) * | 2004-08-04 | 2006-03-16 | Fuji Electric Device Technology Co Ltd | 半導体素子 |
JP2006179598A (ja) * | 2004-12-21 | 2006-07-06 | Toshiba Corp | 電力用半導体装置 |
JP2007251023A (ja) * | 2006-03-17 | 2007-09-27 | Toyota Motor Corp | スーパージャンクション構造を有する半導体装置とその製造方法 |
JP2007300034A (ja) * | 2006-05-02 | 2007-11-15 | Toshiba Corp | 半導体装置及び半導体装置の製造方法 |
JP2008258442A (ja) * | 2007-04-05 | 2008-10-23 | Toshiba Corp | 電力用半導体素子 |
JP2009272397A (ja) * | 2008-05-02 | 2009-11-19 | Toshiba Corp | 半導体装置 |
WO2011093473A1 (ja) * | 2010-01-29 | 2011-08-04 | 富士電機システムズ株式会社 | 半導体装置 |
JP2015213141A (ja) * | 2014-04-17 | 2015-11-26 | 富士電機株式会社 | 縦型半導体装置およびその製造方法 |
US20160064478A1 (en) * | 2014-09-01 | 2016-03-03 | Silergy Semiconductor Technology (Hangzhou) Ltd. | Super-junction structure and method for manufacturing the same and semiconductor device thereof |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2024052952A1 (ja) * | 2022-09-05 | 2024-03-14 | 三菱電機株式会社 | 半導体装置、半導体装置の制御方法、および半導体装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20200119142A1 (en) | 2020-04-16 |
EP3457440A1 (en) | 2019-03-20 |
CN109509783A (zh) | 2019-03-22 |
US20190088738A1 (en) | 2019-03-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6400778B2 (ja) | 絶縁ゲート型炭化珪素半導体装置及びその製造方法 | |
JP6266166B2 (ja) | 炭化珪素半導体装置およびその製造方法 | |
JP6817443B2 (ja) | ゲート・トレンチと、埋め込まれた終端構造とを有するパワー半導体デバイス、及び、関連方法 | |
CN106024857B (zh) | 具有沟道截断环的半导体器件及生产其的方法 | |
JP2013258333A (ja) | 電力用半導体装置 | |
US20160155821A1 (en) | Methods for Producing a Vertical Semiconductor and a Trench Gate Field Effect Semiconductor Device | |
CN104779290B (zh) | 半导体器件 | |
US10763354B2 (en) | Semiconductor device, inverter circuit, driving device, vehicle, and elevator | |
US20140103439A1 (en) | Transistor Device and Method for Producing a Transistor Device | |
US9627470B2 (en) | Power semiconductor device and method of manufacturing the same | |
US20200119142A1 (en) | Semiconductor device | |
US20160079350A1 (en) | Semiconductor device and manufacturing method thereof | |
US20120241850A1 (en) | Semiconductor device | |
TW201803125A (zh) | 垂直碳化矽金屬氧化物半導體場效電晶體 | |
JP4443884B2 (ja) | 半導体装置 | |
JP5400252B2 (ja) | 半導体素子、半導体装置、およびその製造方法 | |
CN107579109B (zh) | 半导体器件及其制造方法 | |
US20190109215A1 (en) | Semiconductor device | |
US20220262906A1 (en) | Sic mosfet with reduced on-resistance | |
JP7471403B2 (ja) | 縦型電界効果トランジスタおよびその形成方法 | |
KR101870824B1 (ko) | 전력 반도체 소자 및 그 제조방법 | |
US9502498B2 (en) | Power semiconductor device | |
JP2023043340A (ja) | 半導体装置 | |
JP2014060345A (ja) | 電力用半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190807 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190807 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200630 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200721 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200828 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20201013 |
|
A762 | Written abandonment of application |
Free format text: JAPANESE INTERMEDIATE CODE: A762 Effective date: 20201102 |