JP2013258333A - 電力用半導体装置 - Google Patents
電力用半導体装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 174
- 230000005669 field effect Effects 0.000 claims abstract description 8
- 239000012535 impurity Substances 0.000 claims description 22
- 230000000149 penetrating effect Effects 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 230000003071 parasitic effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 208000032365 Electromagnetic interference Diseases 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
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Abstract
【解決手段】実施形態に係る電力用半導体装置は、第1導電形の第1半導体層と、前記第1半導体層上に設けられた第2導電形の第2半導体層と、前記第2半導体層上に設けられた第1導電形の第3半導体層と、ゲート電極と、前記ゲート電極と前記第1半導体層、前記第2半導体層及び前記第3半導体層との間に設けられたゲート絶縁膜と、を備える。前記第1半導体層、前記第2半導体層、前記第3半導体層、前記ゲート電極及び前記ゲート絶縁膜により、電界効果型のトランジスタが形成されており、第1領域における前記トランジスタの閾値は、第2領域における前記トランジスタの閾値よりも高い。
【選択図】図1
Description
先ず、第1の実施形態について説明する。
図1(a)は、本実施形態に係る電力用半導体装置を例示する平面図であり、(b)は(a)に示すA−A’線による断面図であり、(c)は(a)に示すB−B’線による断面図である。
図1(a)〜(c)に示すように、本実施形態に係る電力用半導体装置1においては、ドレイン層11、ドリフト層12、ベース層13、ソース層14、コンタクト層15、トレンチゲート電極21及びゲート絶縁膜22により、縦型のnチャネル形電界効果型トランジスタ(UMOS)T1が形成される。このトランジスタT1においては、ベース層13におけるゲート絶縁膜22に接した領域をチャネル領域として、ソース層14からドリフト層12に向けて電子電流が流れる。
図3(a)及び(b)は、横軸に時間をとり、縦軸にゲート・ソース間電圧及びソース・ドレイン間電流をとって、電力用半導体装置の動作を例示するグラフ図であり、(a)は本実施形態を示し、(b)は比較例を示す。
このため、図3(b)に示すように、電力用半導体装置のスイッチング速度を高速化すると、電流Idsの時間変化(di/dt)も急峻となり、外部負荷の寄生インダクタンスに起因するスイッチングノイズが大きくなる。
図4(a)は、本実施形態に係る電力用半導体装置を例示する平面図であり、(b)は(a)に示すC−C’線による断面図であり、(c)は(a)に示すD−D’線による断面図である。
図4(a)及び(b)に示すように、本実施形態に係る電力用半導体装置2においては、ソース層14がトレンチゲート電極21に対向する領域RAにおいて、ドレイン層11、ドリフト層12、ベース層13、ソース層14、コンタクト層15、トレンチゲート電極21及びゲート絶縁膜22により、縦型のnチャネル形電界効果型トランジスタ(UMOS)T1が形成される。このトランジスタT1においては、ベース層13におけるゲート絶縁膜22に接した領域をチャネル領域として、ソース層14からドリフト層12に向けて電子電流が流れる。
図5(a)は、本実施形態に係る電力用半導体装置を例示する平面図であり、(b)は(a)に示すE−E’線による断面図であり、(c)は(a)に示すF−F’線による断面図である。
図5(a)〜(c)に示すように、本実施形態に係る電力用半導体装置3においては、ドレイン層11、ドリフト層12、ジャンクション層16、ベース層13、ソース層14、コンタクト層15、プレナーゲート電極26及びゲート絶縁膜27により、横型のnチャネル形電界効果型トランジスタT2が形成される。このトランジスタT2においては、ベース層13におけるゲート絶縁膜27に接した領域をチャネル領域として、ソース層14からジャンクション層16に向けて電子電流が流れる。
図6は、本変形例に係る電力用半導体装置を例示する平面図である。
図6に示すように、本変形例に係る電力用半導体装置3aにおいては、プレナーゲート電極26の開口部26bの形状が、上方から見て、八角形である。これによっても、トランジスタT2のチャネル長を連続的に異ならせることができる。本変形例における上記以外の構成、動作及び効果は、前述の第3の実施形態と同様である。
Claims (8)
- 第1導電形の第1半導体層と、
前記第1半導体層上に設けられた第2導電形の第2半導体層と、
前記第2半導体層上に設けられた第1導電形の第3半導体層と、
第1導電形であり、前記第1半導体層に接し、前記第2半導体層内に進入し、前記第2半導体層によって前記第3半導体層から離隔された第4半導体層と、
前記第4半導体層上に設けられ、前記第3半導体層及び前記第4半導体層に接し、実効的な不純物濃度が前記第2半導体層の実効的な不純物濃度とは異なる第5半導体層と、
前記第3半導体層及び前記第2半導体層を貫き、前記第1半導体層内に到達した第1ゲート電極と、
前記第1ゲート電極と前記第1半導体層、前記第2半導体層及び前記第3半導体層との間に設けられた第1ゲート絶縁膜と、
少なくとも、前記第5半導体層の直上域に配置された第2ゲート電極と、
前記第2ゲート電極と前記第5半導体層との間に設けられた第2ゲート絶縁膜と、
を備えた電力用半導体装置。 - 第1導電形の第1半導体層と、
前記第1半導体層上に設けられた第2導電形の第2半導体層と、
前記第2半導体層上に設けられた第1導電形の第3半導体層と、
ゲート電極と、
前記ゲート電極と前記第1半導体層、前記第2半導体層及び前記第3半導体層との間に設けられたゲート絶縁膜と、
を備え、
前記第1半導体層、前記第2半導体層、前記第3半導体層、前記ゲート電極及び前記ゲート絶縁膜により、電界効果型のトランジスタが形成されており、
第1領域における前記トランジスタの閾値は、第2領域における前記トランジスタの閾値よりも高い電力用半導体装置。 - 前記第1領域における前記トランジスタのチャネル長は、前記第2領域における前記トランジスタのチャネル長よりも長い請求項2記載の電力用半導体装置。
- 前記第1領域における前記トランジスタのチャネル領域の実効的な不純物濃度は、前記第2領域における前記トランジスタのチャネル領域の実効的な不純物濃度よりも高い請求項2記載の電力用半導体装置。
- 第1導電形の第1半導体層と、
前記第1半導体層上に設けられた第2導電形の第2半導体層と、
前記第2半導体層上に設けられた第1導電形の第3半導体層と、
前記第3半導体層及び前記第2半導体層を貫き、前記第1半導体層内に到達したゲート電極と、
前記ゲート電極と前記第1半導体層、前記第2半導体層及び前記第3半導体層との間に設けられたゲート絶縁膜と、
を備え、
前記第2半導体層における第1領域に配置された部分は、前記第2半導体層における第2領域に配置された部分よりも厚い電力用半導体装置。 - 第1導電形の第1半導体層と、
前記第1半導体層上に設けられた第2導電形の第2半導体層と、
前記第2半導体層上に設けられた第1導電形の第3半導体層と、
第1導電形であり、前記第1半導体層に接し、前記第2半導体層を貫き、前記第2半導体層によって前記第3半導体層から離隔された第4半導体層と、
少なくとも、前記第2半導体層における前記第3半導体層と前記第4半導体層との間に配置された部分の直上域に配置されたゲート電極と、
前記ゲート電極と前記第2半導体層との間に設けられたゲート絶縁膜と、
を備え、
第1領域における前記第3半導体層と前記第4半導体層との距離は、第2領域における前記第3半導体層と前記第4半導体層との距離よりも長い電力用半導体装置。 - 前記ゲート電極には開口部が形成されており、
前記第3半導体層は、前記開口部の端縁に沿って配置されており、
前記第1領域における前記開口部の端縁と前記第4半導体層の端縁との距離は、前記第2領域における前記開口部の端縁と前記第4半導体層の端縁との距離よりも長い請求項6記載の電力用半導体装置。 - 前記開口部の形状は、楕円形又は八角形である請求項7記載の電力用半導体装置。
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CN201210436214.4A CN103489864A (zh) | 2012-06-13 | 2012-11-05 | 功率用半导体装置 |
US13/720,344 US20130334597A1 (en) | 2012-06-13 | 2012-12-19 | Power semiconductor device |
US14/850,078 US20150380545A1 (en) | 2012-06-13 | 2015-09-10 | Power semiconductor device |
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