JP2019047037A - 光検出器 - Google Patents
光検出器 Download PDFInfo
- Publication number
- JP2019047037A JP2019047037A JP2017170465A JP2017170465A JP2019047037A JP 2019047037 A JP2019047037 A JP 2019047037A JP 2017170465 A JP2017170465 A JP 2017170465A JP 2017170465 A JP2017170465 A JP 2017170465A JP 2019047037 A JP2019047037 A JP 2019047037A
- Authority
- JP
- Japan
- Prior art keywords
- light
- scintillator
- resin layer
- detection element
- visible light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011347 resin Substances 0.000 claims abstract description 63
- 229920005989 resin Polymers 0.000 claims abstract description 63
- 238000001514 detection method Methods 0.000 claims abstract description 58
- 230000003287 optical effect Effects 0.000 claims abstract description 10
- 230000001154 acute effect Effects 0.000 claims description 12
- 239000012466 permeate Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 92
- 239000011241 protective layer Substances 0.000 description 18
- 239000004065 semiconductor Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 8
- 238000013459 approach Methods 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229960000956 coumarin Drugs 0.000 description 1
- 235000001671 coumarin Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007850 fluorescent dye Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02322—Optical elements or arrangements associated with the device comprising luminescent members, e.g. fluorescent sheets upon the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/1446—Devices controlled by radiation in a repetitive configuration
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0352—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their shape or by the shapes, relative sizes or disposition of the semiconductor regions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/103—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the PN homojunction type
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measurement Of Radiation (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
図1は、第1の実施形態に係る光検出器を示す図である。この光検出器は、入射した紫外光を可視光に変換してその光を検出することができる。
主に第1の実施形態と異なる点を説明する。
図7は、第2の実施形態に係る光検出器のp−p´断面図を示す図である。
主に第1の実施形態と異なる点を説明する。
図8は、第3の実施形態に係る光検出器のp−p´断面を示す図である。
Claims (13)
- 紫外光を可視光へ変換する構造体と、
前記構造体で変換された前記可視光を検出する光検出素子と、を具備し、
前記構造体は、前記光検出素子上に設けられ、前記光検出素子とは反対側に所定の形状で突出する光検出器。 - 前記構造体は、
紫外光を可視光へ変換する第1シンチレータと、
前記可視光に対して光透過性を持ち、前記紫外光に対して光透過性を持たない樹脂層と、
を含む請求項1に記載の光検出器。 - 前記第1シンチレータは、前記樹脂層上に前記樹脂層の外形に沿って覆うように設けられる請求項2に記載の光検出器。
- 前記紫外入射側に前記第1シンチレータがあり前記光検出素子側に前記樹脂層がある請求項2又は3に記載の光検出器。
- 前記第1シンチレータが変換した前記可視光の一部は、前記樹脂層内部を透過し、前記第1シンチレータと前記樹脂層の界面で反射して前記光検出素子に入射する請求項2から4に記載の光検出器。
- 前記樹脂層は、前記紫外光を全反射する請求項2から5に記載の光検出器。
- 前記所定の形状は、前記光入射側から見て前記光検出素子側を底面とした断面が三角形である請求項1から6のいずれか1項に記載の光検出器。
- 前記所定の形状は、前記光入射側から見て前記光検出素子側を底面とした断面が半球体状である請求項1から7のいずれか1項に記載の光検出器。
- 前記所定の形状は、前記光入射側から見て前記光検出素子側を底面とした断面が四角形である請求項1から8のいずれか1項に記載の光検出器。
- 前記所定の形状は、前記光入射側から見て前記光検出素子側を底面とした断面が多角形である請求項1から9のいずれか1項に記載の光検出器。
- 積層方向と面方向を含む面で切断した前記樹脂層の断面図において、前記樹脂層の斜面と面方向のなす鋭角は30°〜45°である請求項2から10のいずれか1項に記載の光検出器。
- 前記第1シンチレータと異なる光の波長を変換する第2シンチレータと、を具備し、
前記第2シンチレータは、前記第1シンチレータ上に設けられる請求項2から11のいずれか1項に記載の光検出器。 - 前記第2シンチレータは、中性子線を紫外光へ変換する請求項12に記載の光検出器。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017170465A JP2019047037A (ja) | 2017-09-05 | 2017-09-05 | 光検出器 |
US15/904,533 US10263128B2 (en) | 2017-09-05 | 2018-02-26 | Photodetector converting ultraviolet light into visible light |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017170465A JP2019047037A (ja) | 2017-09-05 | 2017-09-05 | 光検出器 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2019047037A true JP2019047037A (ja) | 2019-03-22 |
Family
ID=65517045
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017170465A Pending JP2019047037A (ja) | 2017-09-05 | 2017-09-05 | 光検出器 |
Country Status (2)
Country | Link |
---|---|
US (1) | US10263128B2 (ja) |
JP (1) | JP2019047037A (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112864268A (zh) * | 2019-11-28 | 2021-05-28 | 中国科学院半导体研究所 | 增强紫外波段响应度的硅雪崩光电二极管及其制备方法 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09325185A (ja) * | 1996-06-03 | 1997-12-16 | Toshiba Fa Syst Eng Kk | 放射線検出器とその製造方法と透視検査装置とctスキャナ |
JP2001068658A (ja) * | 1999-08-27 | 2001-03-16 | Sony Corp | 固体撮像装置及びその製造方法 |
JP2003092395A (ja) * | 2001-09-19 | 2003-03-28 | Sony Corp | 撮像装置 |
JP2004150932A (ja) * | 2002-10-30 | 2004-05-27 | Toshiba Corp | 放射線平面検出器 |
US20090218649A1 (en) * | 2007-11-21 | 2009-09-03 | Instituto Nacionaf De Astrofisica Optica Y Electronica | Highly efficient silicon detector with wide spectral range |
US20100032578A1 (en) * | 2008-08-08 | 2010-02-11 | Koninklijke Philips Electronics N. V. | Composite scintillator including a micro-electronics photo-resist |
JP2010515075A (ja) * | 2007-01-05 | 2010-05-06 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 高速放射線検出器 |
JP2010267770A (ja) * | 2009-05-14 | 2010-11-25 | Sony Corp | 固体撮像装置、および、その製造方法、電子機器 |
JP2011232197A (ja) * | 2010-04-28 | 2011-11-17 | Konica Minolta Medical & Graphic Inc | シンチレータパネル及び放射線画像検出装置 |
JP2014027178A (ja) * | 2012-07-27 | 2014-02-06 | Sharp Corp | 固体撮像素子および電子情報機器 |
US20150304612A1 (en) * | 2014-04-18 | 2015-10-22 | Flir Systems, Inc. | Multi-sensor monitoring systems and methods |
JP2017116532A (ja) * | 2015-11-25 | 2017-06-29 | シーメンス メディカル ソリューションズ ユーエスエー インコーポレイテッドSiemens Medical Solutions USA,Inc. | ガーネット インターフェイスの製造方法及びそれから得られたガーネットを含有する物品 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3216153B2 (ja) | 1991-07-30 | 2001-10-09 | 株式会社デンソー | 光検出器 |
JP3304742B2 (ja) | 1996-01-30 | 2002-07-22 | ウシオ電機株式会社 | 紫外光検出器 |
DE69929027T2 (de) * | 1998-12-28 | 2006-08-24 | Kabushiki Kaisha Toshiba, Kawasaki | Strahlungsdetektoreinrichtung |
JP4581498B2 (ja) | 2004-06-15 | 2010-11-17 | カシオ計算機株式会社 | 生体高分子分析チップ |
US7247813B2 (en) * | 2004-10-13 | 2007-07-24 | Advanced Lcd Technologies Development Center Co., Ltd. | Crystallization apparatus using pulsed laser beam |
JP2006185933A (ja) * | 2004-12-24 | 2006-07-13 | Advanced Lcd Technologies Development Center Co Ltd | レーザアニール方法およびレーザアニール装置 |
US7800065B2 (en) * | 2008-07-02 | 2010-09-21 | General Electric Company | Methods and apparatus for conducting heat from an electronic assembly while providing shock protection |
US8803263B2 (en) | 2008-09-03 | 2014-08-12 | Fuji Electric Co., Ltd. | Magnetic memory element and storage device using the same |
JP5791281B2 (ja) * | 2010-02-18 | 2015-10-07 | キヤノン株式会社 | 放射線検出装置及び放射線検出システム |
JP5450295B2 (ja) | 2010-07-05 | 2014-03-26 | オリンパス株式会社 | 撮像装置および撮像装置の製造方法 |
JP5062644B1 (ja) * | 2011-06-27 | 2012-10-31 | 帝人化成株式会社 | シンチレータ |
US9035263B2 (en) * | 2011-10-25 | 2015-05-19 | Konica Minolta Medical & Graphic, Inc. | Radiation imaging apparatus having an anti-static function |
JP5785201B2 (ja) * | 2012-03-13 | 2015-09-24 | 富士フイルム株式会社 | 放射線画像検出装置 |
EP2662641A1 (en) | 2012-05-07 | 2013-11-13 | Koninklijke Philips N.V. | Light collector device |
US8895932B2 (en) * | 2012-08-28 | 2014-11-25 | Konica Minolta, Inc. | Scintillator plate and radiation detection panel |
JP6386847B2 (ja) | 2014-09-19 | 2018-09-05 | 浜松ホトニクス株式会社 | 紫外線センサ及び紫外線検出装置 |
JPWO2016166864A1 (ja) | 2015-04-16 | 2017-10-26 | 株式会社東芝 | 発光素子、検出装置、および処理装置 |
WO2016166865A1 (ja) | 2015-04-16 | 2016-10-20 | 株式会社 東芝 | 発光素子、検出装置、および処理装置 |
JPWO2016166863A1 (ja) | 2015-04-16 | 2017-11-02 | 株式会社東芝 | 検出装置および処理装置 |
JP6524811B2 (ja) * | 2015-06-16 | 2019-06-05 | コニカミノルタ株式会社 | 放射線画像検出器 |
JP2017098399A (ja) | 2015-11-24 | 2017-06-01 | 株式会社東芝 | 熱電変換素子及び発電システム |
JP2017190994A (ja) | 2016-04-13 | 2017-10-19 | 株式会社東芝 | 光検出器およびライダー装置 |
-
2017
- 2017-09-05 JP JP2017170465A patent/JP2019047037A/ja active Pending
-
2018
- 2018-02-26 US US15/904,533 patent/US10263128B2/en active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09325185A (ja) * | 1996-06-03 | 1997-12-16 | Toshiba Fa Syst Eng Kk | 放射線検出器とその製造方法と透視検査装置とctスキャナ |
JP2001068658A (ja) * | 1999-08-27 | 2001-03-16 | Sony Corp | 固体撮像装置及びその製造方法 |
JP2003092395A (ja) * | 2001-09-19 | 2003-03-28 | Sony Corp | 撮像装置 |
JP2004150932A (ja) * | 2002-10-30 | 2004-05-27 | Toshiba Corp | 放射線平面検出器 |
JP2010515075A (ja) * | 2007-01-05 | 2010-05-06 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 高速放射線検出器 |
US20090218649A1 (en) * | 2007-11-21 | 2009-09-03 | Instituto Nacionaf De Astrofisica Optica Y Electronica | Highly efficient silicon detector with wide spectral range |
US20100032578A1 (en) * | 2008-08-08 | 2010-02-11 | Koninklijke Philips Electronics N. V. | Composite scintillator including a micro-electronics photo-resist |
JP2010267770A (ja) * | 2009-05-14 | 2010-11-25 | Sony Corp | 固体撮像装置、および、その製造方法、電子機器 |
JP2011232197A (ja) * | 2010-04-28 | 2011-11-17 | Konica Minolta Medical & Graphic Inc | シンチレータパネル及び放射線画像検出装置 |
JP2014027178A (ja) * | 2012-07-27 | 2014-02-06 | Sharp Corp | 固体撮像素子および電子情報機器 |
US20150304612A1 (en) * | 2014-04-18 | 2015-10-22 | Flir Systems, Inc. | Multi-sensor monitoring systems and methods |
JP2017116532A (ja) * | 2015-11-25 | 2017-06-29 | シーメンス メディカル ソリューションズ ユーエスエー インコーポレイテッドSiemens Medical Solutions USA,Inc. | ガーネット インターフェイスの製造方法及びそれから得られたガーネットを含有する物品 |
Also Published As
Publication number | Publication date |
---|---|
US10263128B2 (en) | 2019-04-16 |
US20190074388A1 (en) | 2019-03-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP3896746B1 (en) | Single-photon avalanche diode and manufacturing method, detector array, and image sensor | |
CN107665886B (zh) | 用于检测红外线辐射的盖革模式雪崩光电二极管阵列 | |
TWI443817B (zh) | Photodiode array | |
JP7455520B2 (ja) | 光検出装置 | |
WO2020121851A1 (ja) | 光検出装置 | |
US20040079865A1 (en) | Back side incident type image pickup sensor | |
KR100987057B1 (ko) | 광검출 효율이 향상된 실리콘 광전자 증배관 및 이를포함하는 감마선 검출기 | |
JP5670360B2 (ja) | 半導体受光素子及びオプトエレクトロニクス装置 | |
US8878115B2 (en) | Photoelectric conversion element, and photoelectric conversion apparatus and imaging system having a light guide | |
JP2019047037A (ja) | 光検出器 | |
JP2017163023A (ja) | 光検出器およびこれを用いた被写体検知システム | |
JP2008159711A (ja) | 半導体光検出素子及び放射線検出装置 | |
CN114270538B (zh) | 光检测装置 | |
JP6707393B2 (ja) | 裏面入射型受光素子及び光受信モジュール | |
US20170330982A1 (en) | Photo detector, photo detection device, and lidar device | |
US10297633B2 (en) | Photoelectric conversion device and scanner | |
EP2985632B1 (en) | Radiation image detection device | |
WO2018147222A1 (ja) | 半導体装置 | |
CN218975451U (zh) | 光学感测模块 | |
JP5821400B2 (ja) | 分光センサー及び角度制限フィルター | |
WO2023149284A1 (ja) | 光検出器 | |
JPH04241458A (ja) | 半導体光検出装置 | |
WO2020121852A1 (ja) | 光検出装置 | |
CN115704905A (zh) | 光电探测器及激光雷达 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20180831 |
|
RD01 | Notification of change of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7421 Effective date: 20190125 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190808 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200630 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200828 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201026 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210402 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210524 |
|
RD07 | Notification of extinguishment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7427 Effective date: 20210618 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20211203 |